JPH0431327B2 - - Google Patents

Info

Publication number
JPH0431327B2
JPH0431327B2 JP28529185A JP28529185A JPH0431327B2 JP H0431327 B2 JPH0431327 B2 JP H0431327B2 JP 28529185 A JP28529185 A JP 28529185A JP 28529185 A JP28529185 A JP 28529185A JP H0431327 B2 JPH0431327 B2 JP H0431327B2
Authority
JP
Japan
Prior art keywords
displacement
signal
capacitance
temperature
capacitances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28529185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62144020A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP28529185A priority Critical patent/JPS62144020A/ja
Publication of JPS62144020A publication Critical patent/JPS62144020A/ja
Publication of JPH0431327B2 publication Critical patent/JPH0431327B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP28529185A 1985-12-18 1985-12-18 容量式変位変換装置 Granted JPS62144020A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28529185A JPS62144020A (ja) 1985-12-18 1985-12-18 容量式変位変換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28529185A JPS62144020A (ja) 1985-12-18 1985-12-18 容量式変位変換装置

Publications (2)

Publication Number Publication Date
JPS62144020A JPS62144020A (ja) 1987-06-27
JPH0431327B2 true JPH0431327B2 (xx) 1992-05-26

Family

ID=17689617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28529185A Granted JPS62144020A (ja) 1985-12-18 1985-12-18 容量式変位変換装置

Country Status (1)

Country Link
JP (1) JPS62144020A (xx)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5163947B2 (ja) * 2008-04-15 2013-03-13 株式会社Ihi 油膜厚さ計測装置および方法
JP5501043B2 (ja) * 2010-03-16 2014-05-21 株式会社ミツトヨ 容量変化型変位計

Also Published As

Publication number Publication date
JPS62144020A (ja) 1987-06-27

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