JPH04305069A - Method for joining alumina-based sintered body - Google Patents
Method for joining alumina-based sintered bodyInfo
- Publication number
- JPH04305069A JPH04305069A JP9325491A JP9325491A JPH04305069A JP H04305069 A JPH04305069 A JP H04305069A JP 9325491 A JP9325491 A JP 9325491A JP 9325491 A JP9325491 A JP 9325491A JP H04305069 A JPH04305069 A JP H04305069A
- Authority
- JP
- Japan
- Prior art keywords
- alumina
- based sintered
- joining
- sintered body
- sintered bodies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 title claims description 19
- 238000005219 brazing Methods 0.000 claims abstract description 43
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052751 metal Inorganic materials 0.000 claims abstract description 21
- 239000002184 metal Substances 0.000 claims abstract description 21
- 239000000945 filler Substances 0.000 claims abstract description 17
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 16
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 16
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 20
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 18
- 230000003647 oxidation Effects 0.000 claims description 16
- 238000007254 oxidation reaction Methods 0.000 claims description 16
- 229910052782 aluminium Inorganic materials 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910000676 Si alloy Inorganic materials 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 abstract description 8
- 239000000292 calcium oxide Substances 0.000 abstract description 6
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 abstract description 6
- 239000000395 magnesium oxide Substances 0.000 abstract description 6
- 238000005260 corrosion Methods 0.000 abstract description 5
- 230000007797 corrosion Effects 0.000 abstract description 5
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 abstract description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 235000012255 calcium oxide Nutrition 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005495 investment casting Methods 0.000 description 1
- -1 silicon. but Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明はアルミナ系焼結体の接合
方法、詳しくはアルミナ系セラミックス基板の接合方法
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for joining alumina-based sintered bodies, and more particularly to a method for joining alumina-based ceramic substrates.
【０００２】0002
【従来の技術】従来のセラミックス基板の接合方法、例
えばアルミナ基板とアルミナ基板とを接合する方法とし
ては、これらの両基板の間にアルミニウム合金のろう材
を挟み込み、所定の温度に加熱することによりろう付け
することが一般的であった。[Prior Art] A conventional method for bonding ceramic substrates, for example, a method for bonding an alumina substrate to an alumina substrate, involves sandwiching an aluminum alloy brazing material between the two substrates and heating it to a predetermined temperature. Brazing was common.
【０００３】0003
【発明が解決しようとする課題】しかしながら、このよ
うな接合方法によれば、アルミナ基板と異なる材質によ
るろう材部分は、アルミナ基板に比較してその高温強度
が低く、耐熱性、耐食性に劣るという課題があった。[Problem to be Solved by the Invention] However, according to such a joining method, the brazing material part made of a material different from that of the alumina substrate has lower high-temperature strength and inferior heat resistance and corrosion resistance compared to the alumina substrate. There was an issue.
【０００４】0004
【発明の目的】そこで、本発明は、ろう付けしたアルミ
ナ焼結体においてろう材部分もアルミナ焼結体と同質化
することにより、高温強度を上げ、耐熱性、耐食性を改
良したアルミナ焼結体の接合方法を提供することを、そ
の目的としている。[Object of the Invention] Therefore, the present invention provides an alumina sintered body with increased high-temperature strength and improved heat resistance and corrosion resistance by making the brazing material part of the brazed alumina sintered body homogeneous with the alumina sintered body. Its purpose is to provide a method for joining.
【０００５】[0005]
【課題を解決するための手段】請求項１に記載の発明は
、アルミナ系焼結体同士の間に、アルミニウムまたはア
ルミニウム／ケイ素系合金からなるろう材を挟んで非酸
化雰囲気中で加熱接合した後、酸化処理するアルミナ系
焼結体の接合方法である。[Means for Solving the Problems] The invention as set forth in claim 1 is characterized in that alumina-based sintered bodies are bonded by heating in a non-oxidizing atmosphere with a brazing material made of aluminum or an aluminum/silicon-based alloy sandwiched between the alumina-based sintered bodies. This is a method for joining alumina-based sintered bodies that are then subjected to oxidation treatment.
【０００６】請求項２に記載の発明は、上記ろう材とし
て、アルミニウムまたはアルミニウム／ケイ素系合金に
二酸化ケイ素等の酸化物を含むアルミナ系焼結体の接合
方法である。The invention according to claim 2 is a method for joining an alumina-based sintered body containing an oxide such as silicon dioxide to aluminum or an aluminum/silicon-based alloy as the brazing material.
【０００７】請求項３に記載の発明は、上記ろう材中の
二酸化ケイ素等の酸化物の量または金属ケイ素の量を、
このろう材が上記酸化処理完了後、アルミナ系焼結体と
同じ酸化物の組成比になるように配合したアルミナ系焼
結体の接合方法である。[0007] The invention according to claim 3 is characterized in that the amount of oxide such as silicon dioxide or the amount of metallic silicon in the brazing material is
This is a method for joining an alumina-based sintered body in which the brazing filler metal is blended so as to have the same oxide composition ratio as that of the alumina-based sintered body after the above-mentioned oxidation treatment is completed.
【０００８】[0008]
【作用】請求項１に記載の発明に係るアルミナ系焼結体
の接合方法にあっては、アルミナ系焼結体同士を接合す
る場合、これらのアルミナ系焼結体の間にろう材を挟ん
で非酸化雰囲気（例えば真空中）でろう付けした後、酸
化処理する。このろう付け、酸化処理においては、ろう
材はアルミニウムＡｌまたはアルミニウム／ケイ素合金
を有している。そして、この後の酸化処理において、ア
ルミニウムＡｌは雰囲気中からの酸素の供給により酸化
されてアルミナとなる。これらの結果、酸化完了後のろ
う材部分とそれ以外の部分とはいずれもほぼ同じ成分の
アルミナ系焼結体となって同質化しているものである。[Operation] In the method for joining alumina-based sintered bodies according to the invention described in claim 1, when joining alumina-based sintered bodies, a brazing material is sandwiched between these alumina-based sintered bodies. After brazing in a non-oxidizing atmosphere (e.g. in vacuum), oxidation treatment is performed. In this brazing and oxidation treatment, the brazing material has aluminum Al or an aluminum/silicon alloy. Then, in the subsequent oxidation treatment, aluminum Al is oxidized to alumina by supplying oxygen from the atmosphere. As a result, after the oxidation is completed, the brazing filler metal portion and the other portions become homogeneous alumina-based sintered bodies having almost the same composition.
【０００９】請求項２に記載の発明に係るアルミナ系焼
結体の接合方法では、接合されるアルミナ系焼結体は、
例えば二酸化ケイ素を主成分として酸化マグネシウム、
酸化カルシウム等の酸化物を０．１〜１０重量％含んで
いる。また、これらを接合するためのろう材も、二酸化
ケイ素を主成分として酸化マグネシウム、酸化カルシウ
ム等の酸化物を含んでいる。したがって、ろう付け、酸
化処理において、ろう材を構成するアルミニウムは、ア
ルミナ系焼結体中（特にろう材との界面部中）および／
またはろう材中に含まれている二酸化ケイ素を主成分と
する酸化物から酸素を供給され、その結果、アルミナと
なる。特に、酸化処理においては、雰囲気中からも酸素
の供給がなされるため、アルミニウムばかりでなく、ア
ルミニウムにより還元されて生成したケイ素Ｓｉ等の金
属も酸化することとなる。これらの結果、酸化完了後の
ろう材部分の酸化物の割合は、アルミナ焼結体部分のそ
れとほぼ同じ割合となり、結局、アルミナ焼結体部分と
ろう材部分とは同質のものとなる。In the method for joining alumina-based sintered bodies according to the second aspect of the invention, the alumina-based sintered bodies to be joined include:
For example, magnesium oxide with silicon dioxide as the main component,
Contains 0.1 to 10% by weight of oxides such as calcium oxide. Moreover, the brazing material for joining these materials also contains silicon dioxide as a main component and oxides such as magnesium oxide and calcium oxide. Therefore, in brazing and oxidation treatment, aluminum constituting the brazing material is contained in the alumina-based sintered body (particularly in the interface with the brazing material) and/or
Alternatively, oxygen is supplied from an oxide whose main component is silicon dioxide contained in the brazing material, resulting in alumina. In particular, in the oxidation treatment, since oxygen is supplied from the atmosphere, not only aluminum but also metals such as silicon Si produced by reduction with aluminum are oxidized. As a result, the proportion of oxide in the brazing filler metal after oxidation is approximately the same as that in the alumina sintered body, and as a result, the alumina sintered body and the brazing filler metal have the same quality.
【００１０】請求項３に記載の発明に係るアルミナ系焼
結体の接合方法では、ろう材を選択する場合にこれを挟
むアルミナ系焼結体の酸化物の含有割合に基づいて行う
。ろう付け、酸化処理後のろう材部分の酸化物成分とそ
れ以外の部分の酸化物成分とが同じ割合となるように、
このろう材を選択する。なお、この場合、アルミナ系焼
結体のろう材接合部界面にペースト状の酸化物を塗布し
てろう付け、酸化処理を行ってもよい。結局、接合され
たアルミナ焼結体は同質のものとなる。この結果、高温
強度、耐熱性、耐食性に優れたアルミナ系焼結体を形成
することができる。In the method for joining alumina-based sintered bodies according to the third aspect of the invention, the brazing filler metal is selected based on the oxide content of the alumina-based sintered bodies sandwiching the brazing material. After brazing and oxidation treatment, the oxide components in the brazing filler metal part and the oxide components in other parts are in the same proportion.
Select this brazing filler metal. In this case, a paste-like oxide may be applied to the interface of the brazing material joint of the alumina-based sintered body to perform brazing and oxidation treatment. In the end, the joined alumina sintered bodies become of the same quality. As a result, an alumina-based sintered body having excellent high-temperature strength, heat resistance, and corrosion resistance can be formed.
【００１１】[0011]
【実施例】以下、本発明に係るアルミナ系焼結体の接合
方法の一実施例を図面に基づいて説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the method for joining alumina-based sintered bodies according to the present invention will be described below with reference to the drawings.
【００１２】図１は本発明の接合方法を説明するための
概念図である。FIG. 1 is a conceptual diagram for explaining the joining method of the present invention.
【００１３】この図に示すように、まず、アルミナ焼結
体として２枚のアルミナ基板１１Ａ、１１Ｂを準備する
。これらのアルミナ基板１１Ａ、１１Ｂは、共に、９０
重量％のアルミナに、１０重量％の二酸化ケイ素および
その他のマグネシア、カルシア等を含むものである。
また、ろう材１２としてはアルミニウム／ケイ素系合金
であって酸化処理完了後アルミナ基板１１Ａ、１１Ｂと
同様の組成比になるように二酸化ケイ素、マグネシア、
カルシア等の成分を含むものとする。As shown in this figure, first, two alumina substrates 11A and 11B are prepared as alumina sintered bodies. These alumina substrates 11A and 11B are both 90
It contains 10% by weight of silicon dioxide and other substances such as magnesia and calcia in % by weight of alumina. The brazing material 12 is an aluminum/silicon alloy, and after the oxidation treatment is completed, silicon dioxide, magnesia,
It shall contain components such as calcia.
【００１４】そして、ろう材１２を挟んでこれらのアル
ミナ基板１１Ａ、１１Ｂを重ね合わせ、真空雰囲気中で
加熱してろう付けを行う。次に、この積層体１３を例え
ば大気中で６５０℃まで加熱し、酸化処理を行う。これ
らの一連の工程において、ろう材１２中のアルミニウム
は、アルミナ基板１１Ａ、１１Ｂ中およびろう材１２中
の二酸化ケイ素を主成分とする酸化物から酸素を奪い、
アルミナになる。酸素を奪われた二酸化ケイ素を主成分
とする酸化物はケイ素等の金属に還元される。しかし、
酸化処理工程においては、大気中からも酸素が供給され
るため、アルミニウムのほか金属ケイ素も酸化して、そ
れぞれアルミナ、二酸化ケイ素等の酸化物になる。した
がって、積層体１３は全体としてアルミナ焼結体と同質
のものとなる。[0014] Then, these alumina substrates 11A and 11B are stacked on top of each other with the brazing material 12 in between, and brazing is performed by heating in a vacuum atmosphere. Next, this laminate 13 is heated, for example, to 650° C. in the atmosphere to undergo an oxidation treatment. In these series of steps, the aluminum in the brazing filler metal 12 deprives oxygen from the oxide whose main component is silicon dioxide in the alumina substrates 11A, 11B and the brazing filler metal 12.
Becomes alumina. The oxide whose main component is silicon dioxide, which has been deprived of oxygen, is reduced to metals such as silicon. but,
In the oxidation treatment step, since oxygen is also supplied from the atmosphere, metal silicon as well as aluminum is oxidized to become oxides such as alumina and silicon dioxide, respectively. Therefore, the laminate 13 as a whole has the same quality as the alumina sintered body.
【００１５】なお、上記実施例では、ろう材１２中に、
金属アルミニウムを酸化させるため、酸素供給源である
二酸化ケイ素を主成分とする酸化物を含ませたものを用
いたが、二酸化ケイ素を主成分とする酸化物はペースト
状にしてこのアルミナ焼結体１１Ａ、１１Ｂの接合面に
被着するようにしてもよい。[0015] In the above embodiment, the brazing filler metal 12 contains:
In order to oxidize metal aluminum, we used an oxide containing an oxide whose main component is silicon dioxide, which is an oxygen supply source, but the oxide whose main component is silicon dioxide was made into a paste and used in this alumina sintered body. It may also be applied to the joining surfaces of 11A and 11B.
【００１６】[0016]
【発明の効果】本発明は、ろう付けしたアルミナ焼結体
においてそのろう材部分もアルミナ焼結体と同質化させ
ることができたため、全体としてアルミナ焼結体と同じ
程度にまでその高温強度が高められ、また、その耐熱性
、耐食性を改良することができた。これにより従来は精
密鋳造によってのみ形成されていたアルミナ系焼結体を
簡単な接合により形成することができ、コストメリット
も大きくなる。[Effects of the Invention] In the present invention, the brazing material in the brazed alumina sintered body can be made homogeneous with the alumina sintered body, so that the high-temperature strength of the alumina sintered body as a whole is increased to the same level as that of the alumina sintered body. It was also possible to improve its heat resistance and corrosion resistance. As a result, an alumina-based sintered body, which was conventionally formed only by precision casting, can be formed by simple bonding, and the cost advantage is also large.
【図１】本発明の一実施例に係るアルミナ系焼結体の接
合方法を説明するための概念図である。FIG. 1 is a conceptual diagram for explaining a method for joining alumina-based sintered bodies according to an embodiment of the present invention.
１１Ａ、１１Ｂ アルミナ基板 １２ ろう材 １３ 積層体 11A, 11B Alumina substrate 12 Brazing filler metal 13 Laminated body
Claims (3)
ニウムまたはアルミニウム／ケイ素系合金からなるろう
材を挟んで接合するアルミナ系焼結体の接合方法であっ
て、これらの積層体を非酸化雰囲気中で加熱接合した後
、酸化処理することを特徴とするアルミナ系焼結体の接
合方法。Claim 1: A method for joining alumina-based sintered bodies by sandwiching a brazing filler metal made of aluminum or an aluminum/silicon alloy between the alumina-based sintered bodies, wherein the laminates are bonded in a non-oxidized manner. A method for joining alumina-based sintered bodies, which comprises heating and joining in an atmosphere, followed by oxidation treatment.
はアルミニウム／ケイ素系合金に二酸化ケイ素等の酸化
物を含む請求項１に記載のアルミナ系焼結体の接合方法
。2. The method for joining alumina-based sintered bodies according to claim 1, wherein the brazing material contains an oxide such as silicon dioxide in aluminum or an aluminum/silicon-based alloy.
物の量または金属ケイ素の量を、このろう材が上記酸化
処理完了後のアルミナ系焼結体と同じ酸化物の組成比に
なるように配合した請求項２に記載のアルミナ系焼結体
の接合方法。3. The amount of oxide such as silicon dioxide or the amount of silicon metal in the brazing filler metal is adjusted so that the brazing filler metal has the same oxide composition ratio as the alumina-based sintered body after the completion of the oxidation treatment. The method for joining an alumina-based sintered body according to claim 2, wherein the alumina-based sintered body is blended with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9325491A JP2946810B2 (en) | 1991-03-29 | 1991-03-29 | Joining method of alumina-based sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9325491A JP2946810B2 (en) | 1991-03-29 | 1991-03-29 | Joining method of alumina-based sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04305069A true JPH04305069A (en) | 1992-10-28 |
| JP2946810B2 JP2946810B2 (en) | 1999-09-06 |
Family
ID=14077365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9325491A Expired - Lifetime JP2946810B2 (en) | 1991-03-29 | 1991-03-29 | Joining method of alumina-based sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2946810B2 (en) |
-
1991
- 1991-03-29 JP JP9325491A patent/JP2946810B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2946810B2 (en) | 1999-09-06 |
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