JPH04304936A - Movement guide device - Google Patents

Abstract

PURPOSE:To provide a movement guide device whose positioning accuracy and yawing accuracy are high without increasing the manufacturing cost by providing a guide means composed of the plane subjected to rolling support and a guide means subjected to rolling support composed of the plane orthogonal to this guide means. CONSTITUTION:A straight guide guides a moving table 3 with its movement relatively along the track in the vertical direction set on a pedestal 20. In this case, a pair of parallel horizontal face guide rails 4a, 4b are fixed on the pedestal 20, a pair of roller bearings 13a, 13b are arranged on this face, a pair of guide shoes 21a, 21b are fixed at the lower part of a moving table 3 so as to place on this upper face as well and a 1st guide means is composed. On the other hand, a 2nd guide means is composed by a vertical face guide rail 8 fixed onto the pedestal 20, a slide guide shoe unit 25 fitted to the lower part of the moving table 3 and a pressing roller 27.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention relates to a movement guide device.
More specifically, the present invention relates to a movement guide device for relatively moving a second member such as a sample transport stage along a trajectory set on a first member such as a support base. The present invention provides a movement guide device suitable for a sample transport device such as a semiconductor wafer in a step-and-repeat reduction projection exposure apparatus that repeatedly moves and stops at high speed and with high precision, especially when manufacturing semiconductor devices such as integrated circuits. It is something to do.

0002

[Description of the Prior Art] A reduction projection exposure apparatus used in the manufacture of semiconductor devices such as LSIs regularly exposes a mask or reticle pattern on a semiconductor wafer in a grid pattern, and improves the positional accuracy with respect to the previous printed pattern. Of course, it is necessary to increase the speed of the step-and-repeat operation in order to improve the work efficiency. For this reason, the transport system of the wafer stage that moves the wafer within the XY two-dimensional coordinate plane is required to start and stop at high speed and has high stopping position accuracy.For this reason, various improvements have been made to the movement guide device of the stage. being done.

Various examples of conventional movement guide devices of this type include:
For example, it is described in Japanese Patent Application Laid-Open No. 61-63028. 3 to 10 each show examples described in the above publications.

The one shown in FIG. 4 is a combination of a V-groove slide guide 1 and a flat slide guide 2, which are widely used in general machine tools, to regulate the relative movement direction of a moving table 3 in one dimension. In this example, the sliding surfaces of each guide 1 and 2 are made of a metal surface lubricated with oil or made of a polymeric material such as polytetrafluorethylene (trade name: Teflon) or PTFE.
(Product name: Rulon, Tarkite) and other polymer composite materials with a low friction coefficient finish for smooth sliding.

[0005] The one shown in FIG. 5 uses two guides 4a and 4b to slide on a metal surface with oil lubrication or through PTFE, etc., to regulate the vertical direction and to control the lateral direction. The direction is controlled by sandwiching the guide 8 between the preloaded pressing roller 6 and the slider 7, and lubricating the contact surface between the slider 7 and the guide 8 with oil between metals so that they slide. In this example, this is done by sliding the material through PTFE or the like.

The one shown in FIG. 6 is an example of a guide system generally called a cross roller, and is composed of a combination of a V-rail 9 and a ball bearing 10.

What is shown in FIG. 7 is an example in which a general direct-acting bearing 11 and a rod-shaped guide 12 are combined.

The system shown in FIG. 8 is similar to the example shown in FIG. 4, and is an example in which a V-groove slide guide 1 and a flat slide guide 2 are combined with rolling elements 13.

The one shown in FIG. 9 has a plurality of rows of air pads 14 arranged in each guide part to constitute a non-contact type air bearing, and the table 3 is placed in a floating state. This is an example.

The one shown in FIG. 10 is an example in which a pair of parallel V-groove slide guides 1, 1, which are found in precision machine tools, are arranged, and is basically the same as the one shown in FIG.

FIG. 3 shows the device proposed in the above publication. In the device shown in the figure, a pair of parallel horizontal guide rails 4a, 4b are fixedly provided, and roller bearings 13a, 13b are aligned on the rail surface with a retainer (not shown).
The table 3 is placed thereon to support the table 3's own weight. That is, the displacement of the table 3 in the vertical direction is restricted. On the other hand, in the horizontal direction, a sliding friction type guide 8 is sandwiched between a pressing roller 6 and a slider 7, and the sliding surface is lubricated with oil, or it is slid through PTFE, etc. By controlling the pressing force of the roller 6, the frictional force of the sliding movement is controlled.

0012

[Problems to be Solved by the Invention] However, since the conventional example shown in FIGS. 4 and 5 uses a guide configured with sliding support, it is difficult to use a guide with rolling support via rolling elements or static pressure support via fluid. This has the disadvantage that the error in the stopping position becomes larger than when using a guide.

[0013] Furthermore, when the sliding parts are lubricated with oil,
This requires maintenance of the lubricating part, and when solid lubrication is used, the solid lubricant has the disadvantage of being worn out. This drawback also exists in the conventional example shown in FIG.

Furthermore, among the above conventional examples, in each of the systems except for those shown in FIGS. 3 and 4, the direction of movement and all characteristics other than the direction of movement are determined by the two guides. Even if precision is desired, all guides must be processed, assembled and adjusted with high precision, which may not result in the desired precision or is disadvantageous in terms of cost.

SUMMARY OF THE INVENTION An object of the present invention is to provide a moving guide device that is relatively inexpensive and has high stopping position accuracy and yawing accuracy in view of the problems with the conventional type described above.

[0016]

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a second member along a trajectory set on a first member.
In a movement guide device for relatively moving members, a first rolling element prevents relative displacement of the first and second members in a direction perpendicular to the movement plane and rolls between the first and second members in the movement direction. and a second rolling element that prevents relative change between the first and second members in the direction perpendicular to the movement direction within the movement plane and rolls between the first and second members in the movement direction. and a second guide means having a pressing roller that presses the second rolling element against the rolling surface.

[0017]

[Operation] In the present invention, the above-mentioned relative movement is guided using two mutually independent guides that roll and support in a direction perpendicular to the movement plane and in a direction perpendicular to the movement direction within the movement plane, for example, the vertical direction and the horizontal direction. As a result, the friction of the guide portion is reduced and high positioning is possible. Further, since the guides in each direction are independent, for example, in order to improve yawing accuracy, it is sufficient to increase the accuracy of only the guide on the side that supports the horizontal direction, making it easy to increase the accuracy.

[0018] In the present invention, since a means for controlling the preload force on the second rolling element is further provided, it is possible to control rigidity and yawing in a direction perpendicular to the movement direction within the movement plane, for example, in the horizontal direction. , it is possible to achieve improved posture accuracy.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Examples of the present invention will be described below with reference to the drawings.

FIG. 1 is a front view showing the basic configuration of a movement guide device according to an embodiment of the present invention. This device shows an example of a linear guide that relatively moves and guides a movable table 3 as a second member along a trajectory set on a base 20 as a first member in a direction perpendicular to the drawing.

A pair of parallel horizontal guide rails 4a and 4b are fixedly provided on the base 20, and roller bearings ( or linear roller bearings) 13a, 13b are provided. Guide shoes 21a and 21b are fixedly provided at the lower part of the table 3 so as to rest on the roller bearings, and these constitute a first guide means. Note that the horizontal guide rail 4a,
4b and the guide shoes 21a, 21b do not need to protrude as shown in the figure, and one of them may be configured to be flush with the upper surface of the base 20 or the lower surface of the movable table 3, for example. good.

The base 20 constitutes the second guide means.
A vertical guide rail 8 is fixed to the table 3, a slide guide shoe unit 25 and a pressing roller unit 27 are attached to the lower part of the table 3. The slide guide shoe unit 25 includes a slide guide shoe 7, a roller bearing 26 that is attached to the slide guide shoe 7 and forms a rolling surface of the slide guide shoe unit 25, and a plurality of rollers. A retainer 28 is provided which aligns the bearings in two rows in the moving direction and holds the two rows of roller bearings in a V shape.

The guide rail 8 has guide surfaces on both sides, and provides a vertical guide surface for guiding the movement of the table 3 in a direction perpendicular to the direction of movement.

Although only one slide guide shoe unit 25 is shown in FIG. 1, there are actually two slide guide shoe units 25 fixed to the table 3, one at the front and one at the back. The rolling surface is made to roll on the guide surface on the right side of the rail 8 in FIG. 1 via a roller bearing 26. Note that this slide guide shoe unit 25 may be configured in one piece and provided with a plurality of rolling surfaces. In any case, it is preferable to configure the plurality of rolling surfaces to roll on the guide surface.

The pressing roller unit 28 is also 1 in FIG.
Although only one is shown, there are actually two in total, one in the front and one in the back of the figure, and each is attached to the table 3 at the corresponding position of the slide guide shoe unit 25. There is. As a modification, only one pressing roller unit 27 may be arranged at a position corresponding to the intermediate position between the two slide guide shoe units 25. Further, three or more pressing roller units 27 may be installed.

The pressing roller unit 27 clamps the guide rail 8 between the slide guide unit 25 and the slide guide shoe unit 25 by adjusting or controlling the pressing force. The amount of elastic deformation of the rolling element 26 between it and the guide rail 8 is set to a desired value or variably controlled.

As described above, in the embodiment shown in FIG. 1, the basic configuration is such that the guide for preventing relative displacement in the vertical direction is composed of a flat surface and a rolling element to support the weight of the table and at the same time restrain rolling and pitching. And horizontally
The guide for preventing relative displacement in the vertical direction is composed of a flat surface perpendicular to the vertical guide and a rolling element, and the preload applied to the rolling element can be arbitrarily set or variably controlled.

As described above, in the movement guide device shown in FIG. 1, high stopping position accuracy can be obtained by preventing relative displacement in the vertical and lateral directions and further restraining rolling and pitching. Further, by adding a mechanism that can arbitrarily set or variably control the horizontal preload force of the horizontal guide, arbitrary horizontal rigidity can be obtained. Furthermore, yawing can be controlled by varying and controlling this preload force between two locations.

The present invention is suitable for a wafer transport system of an exposure apparatus, and FIG. 2 shows an example thereof.

In FIG. 2, two units of the basic configuration shown in FIG. 1 are combined, one in each of the two mutually perpendicular directions, X and Y. Here, the first movement guide system is a Y direction guide mechanism provided on the base 31 as the first member and the Y stage 32 as the second member, and the second movement guide system is the Y direction guide mechanism provided on the base 31 as the first member and the Y stage 32 as the second member. This is an X-direction guide mechanism that also serves as the Y stage 32 and is provided on this and an X stage 33 as a second member. A sample stage 34 is provided above the X stage 33 and is capable of minute displacement in the Z-axis direction perpendicular to the XY directions and minute rotation around the Z-axis.
A wafer (not shown) carried above is moved to a desired position within the XY orthogonal coordinate plane by an X stage 33 and a Y stage 32.

A pair of horizontal guide rails 3 are provided on the base 31.
5a, 35b and one vertical plane guide rail 36 are fixed in parallel with each other, and on the horizontal plane guide rail,
Linear roller bearings 37a and 37b are arranged respectively.

A pair of guide shoes 38a, 38b are fixed on the lower surface of the Y stage 32 so as to rest on roller bearings 37a, 37b on the horizontal guide rail, and a pair of guide shoes 38a, 38b are fixed on the lower surface of the Y stage 32. Slide the slide so that the slide guide shoe 39 is in contact with one vertical guide surface of the guide rail 36 via the linear roller bearing 51, and the pressing roller unit 40 is in contact with the other vertical guide surface. A guide shoe unit 39 and a pressing roller unit 40 are arranged opposite to each other. Although only one slide guide shoe unit and one pressing roller unit are shown in FIG. 2, they are provided at two locations as described in FIG. 1.

The movement of the Y stage 32 is carried out by a motor 41 and a feed screw 42 provided on the base 31 side, and a feed nut (provided on the Y stage side) screwed into the feed screw 42. (not shown), etc.

On the upper surface of the Y stage 32, a pair of horizontal guide rails 43a, 43b and a vertical guide rail 44 are arranged parallel to each other in a direction orthogonal to the guide shoes 38a, 38b on the lower surface. It is permanently installed. Linear roller bearings 45a, 45b are similarly arranged on the guide surfaces of the horizontal guide rails 43a, 43b.

On the lower surface of the X stage 33, there are roller bearings 45a and 4 on the horizontal guide rail on the Y stage.
A pair of guide shoes 46a, 46b are placed on top of 5b.
A slide guide shoe 47 is in contact with one vertical guide surface of the vertical guide rail 44 via a linear roller bearing 52, and a pressing roller is in contact with the other vertical guide surface. - The slide guide shoe 47 and the pressing roller unit 48 are arranged oppositely so that the roller unit 48 is in contact with the slide guide shoe 47 and the pressing roller unit 48. Like the one above, there are two locations.

The movement of the X stage 33 is similar to that of the Y stage 32.
This is performed by a drive/transmission mechanism consisting of a motor 49 and a feed screw 50 provided on the side, and a feed nut (not shown) provided on the X stage side and screwed into the feed screw 50.

In the wafer transfer system having such a configuration, stepping motors or the like are used for the motors 41 and 49 to give a predetermined amount of momentum at a predetermined repetition timing, so that the base 31 is moved. Y stage 32
The X stage 33 can be moved in the axial direction.

By applying the present invention alone to a conventional sample transfer device such as a wafer transfer system, it is possible to improve the stopping position accuracy and yawing accuracy of the sample transfer device. However, the present invention improves pitching and rolling accuracy, and further increases stopping position accuracy and yawing accuracy by applying the following table moving mechanisms in combination as the X stage and Y stage. can do.

FIG. 11 shows a vertical cross-sectional view of an example of the table moving mechanism, and FIG. 12 shows a cross-sectional view taken along line AA. In these figures, 101 is a translation table, 102 is a set of guides, and 101 is a translation table 1.
The lower surface of 01 is directed to be movable in the X direction by a guide 102 via a lubricating layer. Further, 103 is a ball nut or a feed nut, which is screwed into a ball screw or a feed screw 104. Reference numeral 105 designates a pair of bearing housings that house bearings that hold both ends of the ball screw or feed screw 104, respectively, while the bearing housings themselves are connected to the base 10.
6.

Next, reference numerals 107 each represent a leaf spring, and both constitute a parallel leaf spring. These leaf springs 107 are designed with length, plate pressure, and plate thickness so that they will not buckle even when the movable table 101 and devices placed thereon are added vertically (in the Z direction). The width and the number of plates to be installed in parallel are determined, and in particular, in order to increase torsional rigidity, it is preferable to make the width (Y direction) sufficiently wider than the plate thickness (Z direction). Note that the shape of the spring can be modified in various ways.

Reference numeral 109 designates a first fixture for holding each leaf spring 107 horizontally (in the X direction) while keeping it substantially parallel to each other, and for fixing the leaf springs 107 to the lower surface of the translation table 1. A viscoelastic rubber 108 is sandwiched between the first fixture 109 and the nut 103. Further, 110 is connected to a second fixture 111 for gripping the other end of each leaf spring 107 and fixing them to the side of the nut 103. Note that one end of the ball screw or feed screw 104 is
It is connected or integrated with a rotating shaft 12 that is rotationally driven manually or by an electric motor.

With the above configuration, when the ball screw or the feed screw 104 is rotated, the nut 103 is fed by the screw 104 and moves in the horizontal direction, and the translation table 101 is moved by being pulled or pressed by the leaf spring 107. At this time, pitching that occurs when rotational motion is converted into linear motion is absorbed by the parallel leaf spring 107. Further, since the viscoelastic rubber 108 is sandwiched between the first fixture 109 and the nut 103, a shearing force is applied to the viscoelastic rubber 108 when the leaf spring 107 absorbs the displacement of the nut 103. Here, the internal friction and viscous resistance of the viscoelastic rubber 108 provide a damping effect on the vibration of the nut, and the parallel movement table 101 is positioned without being subjected to vibration from the nut 103. The above examples are examples in which pitching characteristics are improved.

FIG. 13 shows an example of a table moving mechanism with improved yawing characteristics. FIG. 14 shows a BB cross section in FIG. 13. Also, the same numbers as in the previous example indicate members having substantially the same function. In these figures, 103 is a ball nut or a feed nut, and is provided with parallel plate spring attachment parts on both sides in the Y direction. Reference numeral 107 designates leaf springs similar to those described above, and constitutes two sets of two parallel leaf springs each. A spacer (not shown) is sandwiched between each set of leaf springs 107.

Next, reference numeral 113 denotes a leaf spring fixing block having a circular opening into which the nut 103 is inserted, and a viscoelastic rubber 108 is sandwiched circumferentially in the gap between the leaf spring fixing block 113 and the nut 103. This block 113 is fixed to the lower surface of the parallel movement table 101, while each parallel plate spring 107 is fixed to both side surfaces so as to extend within the XZ plane perpendicular to the horizontal plane.

With the above configuration, when the ball screw or feed screw 104 is rotated, the translation table 1 is pushed or pulled by both parallel leaf springs 107, 107 and moves back and forth. In this case, yawing is absorbed by the parallel plate springs, and at this time, a vibration damping effect is obtained by the viscoelastic rubber 108, so that the parallel movement table 101 is positioned without being subjected to vibrations from the nuts 103.

The table moving mechanism shown in FIGS. 15 and 16 is an example in which both pitching and yawing characteristics are improved. In the figure, members having substantially the same functions as those in the previous example are given the same numbers.

In these figures, reference numeral 115 denotes a relay block, to which plate springs 107 held in parallel are fixed to the top, bottom (Z direction), left and right (Y direction) surfaces, respectively, and a ball screw or screw 104 is fixed in the center. It has a circular opening through which it can freely pass. 116 is a parallel leaf spring mounting block,
A circular opening is provided in the center so that a nut 103 can be inserted, and a viscoelastic rubber 108 is sandwiched between the parallel leaf spring mounting block 116 and the nut 103. This block is fixed to the lower surface of the parallel movement table 101. ing.

[0048] A parallel plate spring 1 extends in the horizontal plane (XY plane) and sandwiches the feed screw 104 from above and below (Z direction).
07, 107 is fixed to the upper and lower surfaces of the mounting block 116, and the other end is fixed to the upper and lower surfaces of the relay block 115 as described above.

Further, one ends of parallel plate springs 107, 107 extending in a plane perpendicular to the horizontal plane (AXZ plane) and sandwiching the feed screw 104 from the left and right (Y direction) are fixed to the left and right surfaces of the nut 103, The other ends are fixed to the left and right surfaces of the relay block 115.

The action of the composite parallel plate springs sandwiching the viscoelastic rubber 108 is such that the horizontal component of the swing of the ball screw or feed screw 104 and nut 103 is controlled by the left and right parallel plate springs, and the vertical component is controlled by the top and bottom. This vibration is absorbed by the parallel plate spring, damped by the viscoelastic rubber, and transmitted only to the translation table 101 in the axial direction.

Although the above example is a one-way moving table, if these tables are stacked in two layers and the directions of the feed screws are perpendicular to each other, an X-Y moving table can be obtained. In an X-Y moving table, when the table placed on the lower side is moved, a force is generated that vibrates the feed screw and nut of the table placed on the upper side. Since vibrations are also damped, X-Y
High-speed and highly accurate positioning is also possible with a moving table.

In addition to the viscoelastic rubber described in the above embodiment, it is also possible to use viscous oil by making the gap between the nut and the plate spring fixing block such that the liquid is balanced by surface tension. Furthermore, the parallel plate springs can be made of a magnetic material, and a magnetic fluid can be used instead of the viscoelastic rubber. The use of these viscous fluids has the advantage of facilitating assembly by injecting the viscous fluid after assembling the parallel plate springs.

In addition, although the transmission mechanism has been described as a feed screw that converts rotational motion into linear motion, this part is a linear motor that combines a drive mechanism such as a linear motor, air cylinder, hydraulic cylinder, solenoid, etc. and a transmission mechanism into one. A feeding mechanism may also be used.

[0054] In order to absorb the whirling of the feed screw when it rotates, the conventional table moving mechanism has, for example,
-As disclosed in Publication No. 145527 as a precision sample moving device, the nut of the feed screw was connected to the moving table (moving table or sample stage) via a parallel plate spring, so the nut of the feed screw vibrated. There was a disadvantage that vibration damping was poor when Therefore, in the conventional example, (1)
When high-speed positioning is performed, the nut vibrates due to the whirling of the feed screw, and this vibration is transmitted to the moving table, worsening positioning time and positioning accuracy. (2) When external force is applied to the moving table, the feed screw and nut vibrate. This vibration is transmitted to the movable table, resulting in deterioration of positioning time and positioning accuracy.

However, in the above-mentioned table moving mechanism, a parallel plate spring is provided to absorb the displacement of the feed screw in a direction other than the direction of movement of the nut, and a damping material for damping the vibration is provided between the plate spring fixing block and the nut. Since it is sandwiched, it is possible to improve the positional deviation of the parallel moving table caused by the whirling of the feed screw, and the characteristics of yawing, pitching, or both, and it is possible to improve positioning accuracy and positioning time. Furthermore, even when an excitation force is applied to this parallel movement table, it is possible to provide an apparatus with less displacement.

[0056]

[Modification of the Invention] In the above embodiment, an example was explained in which linear roller bearings arranged in a V-shape were used as the roller bearing 26 for regulating displacement in the horizontal direction, but as shown in FIG. Alternatively, a flat type linear roller bearing 29 similar to the roller bearings 13a and 13b for regulating the vertical direction may be supported by the bearing 30.

Further, the horizontal guide surfaces for preventing vertical movement do not need to be on the same plane as in FIG. 1 or 2, but may be at different levels as shown in FIG. In this case, the base 60 and stage 61 as parts can be shared.

[0058]

[Effects of the Invention] As explained above, according to the present invention,
The manufacturing cost is not increased by guiding with the first guide means configured by a flat surface supported by rolling, and the second guide means configured by rolling support configured by a flat surface perpendicular to the first guide means. With high positioning accuracy,
A movement guide device with high yawing accuracy can be provided.

[Brief explanation of the drawing]

FIG. 1 is a front view showing the basic configuration of a movement guide device according to an embodiment of the present invention.

FIG. 2 is a perspective view showing an application example of the present invention applied to a wafer transfer system.

FIG. 3 is a front view showing an eighth conventional example.

FIG. 4 is a front view showing a first conventional example.

FIG. 5 is a front view showing a second conventional example.

FIG. 6 is a front view showing a third conventional example.

FIG. 7 is a front view showing a fourth conventional example.

FIG. 8 is a front view showing a fifth conventional example.

FIG. 9 is a front view showing a sixth conventional example.

FIG. 10 is a front view showing a seventh conventional example.

11 is a longitudinal cross-sectional view showing one embodiment of a table moving mechanism used as an X stage and a Y stage in the wafer transfer system of FIG. 2. FIG.

FIG. 12 is a sectional view taken along line AA in FIG. 11;

FIG. 13 is a longitudinal sectional view showing a second embodiment of the table moving mechanism.

FIG. 14 is a sectional view taken along line BB in FIG. 13;

FIG. 15 is a perspective view showing a third embodiment of the table moving mechanism.

16 is a plan view showing the main part of FIG. 15. FIG.

17 is a front view showing a modification of the embodiment shown in FIG. 1. FIG.

18 is a front view showing another modification of the embodiment of FIG. 1. FIG.

[Explanation of symbols]

3,61,101 Moving table (moving stage) 4
a, 4b, 35a, 35b, 43a, 43b Horizontal guide rail 7, 39, 47 Slide guide shoe 8, 36, 4
4 Vertical guide rails 13a, 13b, 37a, 3
7b, 45a, 45b Linear roller bearing 20, 61 Base 21a, 21b, 38a, 38b, 46a, 46b
Guide shoe 25 Slide guide shoe unit 26, 51, 5
2 Linear roller bearings 27, 40, 48 Pressing roller unit 32 Y stage 33 Elastic rubber 109, 110 Leaf spring fixture 111, 114 Nut housing 112 Rotating shaft 113 Leaf spring fixing block 115 Relay block 116 Mounting block

Claims (12)

[Claims] 1. A movement guide device for relatively moving a second member along a trajectory set on a first member, comprising:
a first guide means having a first rolling element that prevents relative displacement of the first and second members in a direction perpendicular to the movement plane and rolls between the first and second members in the movement direction; A second rolling element that prevents relative change between the first and second members in a direction perpendicular to the direction of movement and rolls between the first and second members in the direction of movement; and a second rolling element that is positioned relative to the rolling surface. A movement guide device comprising: a second guide means having a pressing roller that presses the device. 2. The movement guide device according to claim 1, wherein at least one of the first and second rolling elements comprises a roller bearing aligned along the track. 3. The movement guide device according to claim 1, wherein at least one of the first and second rolling elements comprises a ball bearing aligned along the track. 4. The guide surface of the first guide means is formed of a plane, and the guide surface of the second guide means is formed of a plane perpendicular to the plane.
The movement guide device described in . 5. The movement guide device according to claim 1, wherein the pressing roller can variably control the pressing force. 6. The second guide means includes a rail means having a pair of opposing guide surfaces, the pressing rod rolling on one guide surface via the rolling element, and the pressing rod on the other guide surface. 6. The movement guide device according to claim 1, wherein the roller is pressed so as to be relatively movable. 7. A movable table for placing and moving an object, a guide mechanism for regulating movement of the movable table, a drive mechanism for generating a force for moving the movable table, and a drive mechanism for generating a driving force. The movement guide device according to any one of claims 1 to 6, wherein the movement guide device is used as the guide mechanism of a sample transfer device having a transmission mechanism for transmitting information to the movement table. 8. The sample transfer device connects the movable table and the transmission mechanism via a plurality of parallel leaf springs, and includes a restraint between the transmission mechanism and the parallel leaf spring or a parallel leaf spring fixture. 8. The movement guide device according to claim 7, wherein a moving material is sandwiched therein. 9. The movement guide device according to claim 8, wherein the vibration damping material is viscoelastic rubber, oil, or polymer resin. 10. The movement guide device according to claim 8, wherein the parallel leaf spring is a magnetic material and the vibration damping material is a magnetic fluid. 11. The movement guide device according to claim 8, wherein the transmission mechanism has a structure that converts rotational motion into linear motion. 12. The movement guide device according to claim 8, wherein the transmission mechanism is a linear feed mechanism integrated with the drive mechanism.