JPS6322241A - Guide apparatus - Google Patents
Guide apparatusInfo
- Publication number
- JPS6322241A JPS6322241A JP16364386A JP16364386A JPS6322241A JP S6322241 A JPS6322241 A JP S6322241A JP 16364386 A JP16364386 A JP 16364386A JP 16364386 A JP16364386 A JP 16364386A JP S6322241 A JPS6322241 A JP S6322241A
- Authority
- JP
- Japan
- Prior art keywords
- guide surface
- rolling element
- movable body
- moving body
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005096 rolling process Methods 0.000 claims abstract description 67
- 230000036316 preload Effects 0.000 claims description 11
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/40—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using ball, roller or wheel arrangements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は転動体を用いた案内装置に係り、特にヨーイン
グの小さい運動を実現するに好適な案内装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a guide device using rolling elements, and particularly to a guide device suitable for realizing a movement with small yawing.
例えばＸＹステージにおいては、可動体を案内するため
に転動体を用いた案内装置が用いられている。この種の
案内装置では可動体となるステージの案内精度が高いこ
とが要求されている。この高い案内精度を得るためには
、ヨーイングの小さい案内装置が必要であシ、さらには
、真直度の高い案内面が必要である。しかし、いかに高
精度に加工された案内面といえども、案内面にはその全
長の１０万分の１程度の高さの９ねシが生じるのが通例
である。可動体は、転動体群を介して案内面に沿って移
動するので、条内面Ｖこう′Ｑシがあると、可動体の移
動姿勢が変化すり。式らに前述したう′ｉ２すに関して
述べると、うねジは、案内面の全長以上の波長の大＠な
うねシに、それより小さい波長の細かいうねりが重畳し
た形態である場合が多い。波長の小さいうＱｐによる可
動体の移動姿勢の変化は、複数の転動体による平均化効
果及び案内機構の慣らし運転によシ軽減される可能性か
めるが、波長の太きなうねシは軽減されず、可動体の移
動姿勢に強く転写される。このように、案内面にうねり
かめる場合に運動の真直度を向上させる手段としては、
例えば特開昭５２−６９０７９号公報に示されるように
バネ定数の異なる２種類の転動体の浮性変形を利用して
可動体の運動精度を同上させるものが知らｎでいる。For example, in an XY stage, a guide device using rolling elements is used to guide the movable body. This type of guiding device is required to have high guiding accuracy for the stage, which is a movable body. In order to obtain this high guiding accuracy, a guiding device with small yawing is required, and furthermore, a guiding surface with high straightness is required. However, no matter how precisely machined the guide surface is, it is common for the guide surface to have a groove with a height of about 1/100,000 of its total length. Since the movable body moves along the guide surface via a group of rolling elements, if there is a grooved surface, the moving posture of the movable body may change. Regarding the above-mentioned ridges, ridges are often in the form of large ridges with a wavelength longer than the entire length of the guide surface, and fine undulations with smaller wavelengths superimposed on them. . Changes in the moving posture of the movable body due to the small wavelength Qp may be reduced by the averaging effect of multiple rolling elements and the running-in of the guide mechanism, but the change in the moving attitude of the movable body due to the small wavelength Qp may be reduced. It is strongly transferred to the moving posture of the movable body. In this way, as a means to improve the straightness of motion when undulating on the guide surface,
For example, as shown in Japanese Unexamined Patent Publication No. 52-69079, there is a known device which utilizes floating deformation of two types of rolling elements having different spring constants to improve the motion accuracy of a movable body.
上記従来技術は、２組の転シ案内装置を可動体に対同形
式で配置する必要がろるため、装ｆ構成が複雑になり、
構造上対向形式が採用しにくい場合には不向きでめった
。In the above-mentioned conventional technology, since it is necessary to arrange two sets of transfer guide devices in the same manner on the movable body, the installation structure becomes complicated.
It is rarely suitable for cases where it is difficult to adopt a facing type due to the structure.
本発明の目的は、簡単な構造で可動体の移動姿勢変化を
小さく維持することができる案内装置を提供することに
ある。An object of the present invention is to provide a guide device that has a simple structure and can maintain small changes in the movement posture of a movable body.
本発明の上記目的は、波長の太きなうねシのある案内面
に対して、この案内面とこれに沿って移動する可動体と
の間に直径の異なる転動体群を組み込むことによシ達成
される。すなわち、案内面のうねシの谷に相当する部分
に直径の大きな転動体を、うねりの山に相当する部分に
直径の小さな転動体を配置することによシ達成される。The above object of the present invention is achieved by incorporating a group of rolling elements having different diameters between a guide surface having thick ridges and a movable body moving along the guide surface. is achieved. That is, this is achieved by arranging rolling elements with a large diameter in the portions of the guide surface corresponding to the valleys of the ridges, and rolling elements with a small diameter in the portions corresponding to the crests of the undulations.
うねシラ有する系内面に沿って可動体が移動した場合、
可動体の両端部付近で確実に転動体と接触し、また、可
動体の移動に伴ない、転動体群も移動するが、転動体群
の移動量は可動体の移動量の２分の１になることにもと
づいて、可動体が任意の位置に移動しても異なる径を有
する転動体群によシ、案内面のうねりの影響を受けずに
直進動することが可能である。When a movable body moves along the inner surface of a system with ridges,
The movable body reliably contacts the rolling elements near both ends, and as the movable body moves, the rolling element group also moves, but the amount of movement of the rolling element group is 1/2 of the amount of movement of the movable body. Based on this, even if the movable body moves to an arbitrary position, it is possible to move in a straight line without being affected by the waviness of the guide surface due to the group of rolling elements having different diameters.
以下、本発明の実施例を図面によシ説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図は、本発明の案内装置の一実施例の横断正面図、
第２図はその側面図であシ、これらの図において、１は
ベース、１０はベース１に対して案内移動されるテーブ
ル、１２はベース１に対シてテーブル１０を駆動するＩ
Ｊ ニアモータである。FIG. 1 is a cross-sectional front view of an embodiment of the guide device of the present invention;
FIG. 2 is a side view thereof, and in these figures, 1 is a base, 10 is a table that is guided and moved relative to the base 1, and 12 is an I that drives the table 10 relative to the base 1.
J is a near motor.
ベース１の一方側には案内面２が形成されている。A guide surface 2 is formed on one side of the base 1.
この案内面２とテーブル１０下面の可動体５との間には
第１の保持器３に組み込まれた複数個の転動体４が設け
られている。また、可動体５はその両端部に転動体４と
接触する第１の接触面１３および第２の接触面１４を有
し、さらにこれらの間に切欠部１５を備えている。これ
によシ可動体５およびテーブル１０は転動体４を介して
案内面２に沿って移動する。ベース１の他方側には、案
内面２に対向して予圧面６が設けられている。この。A plurality of rolling elements 4 incorporated in the first retainer 3 are provided between the guide surface 2 and the movable body 5 on the lower surface of the table 10. Furthermore, the movable body 5 has a first contact surface 13 and a second contact surface 14 that come into contact with the rolling element 4 at both ends thereof, and is further provided with a notch 15 between these. As a result, the movable body 5 and the table 10 move along the guide surface 2 via the rolling elements 4. A preload surface 6 is provided on the other side of the base 1 so as to face the guide surface 2 . this.
予圧面６にはこれに沿って第２の保持器７に組み込まれ
た複数個の予圧ロー２８が設けられている。A plurality of preload rows 28 incorporated into the second retainer 7 are provided along the preload surface 6 .
この予圧ローラ８には板ばね等からなる予圧機構９が接
触している、予圧機構９はテーブル１０の下面に取シ付
けられている。このように構成したことによシ、テーブ
ル１０が予圧機構９によ）第１図の図面上右方向へカを
受けるため、可動体５は常に転動体４を介して案内面２
に押し付けられる。前述した第１の保持器３及び第２の
保持器７はベース１の上面とテーブル１０の下面との間
に挿入される延長部３Ａ、７Ａを備えている。この延長
部３Ａ、７Ａにはベース１の上面とテーブル１０の下面
とに接するニードルローラ１１が組込まれている。この
ニードルロー２１１はテーブル１０の自重を支える。A preload mechanism 9 made of a leaf spring or the like is in contact with the preload roller 8, and the preload mechanism 9 is attached to the lower surface of the table 10. With this configuration, the table 10 receives force from the preload mechanism 9 in the right direction in the drawing of FIG.
be forced to. The first holder 3 and the second holder 7 described above include extensions 3A and 7A inserted between the upper surface of the base 1 and the lower surface of the table 10. A needle roller 11 that is in contact with the upper surface of the base 1 and the lower surface of the table 10 is incorporated into the extension parts 3A and 7A. This needle row 211 supports the weight of the table 10.
前述した複数個の転動体４は案内面２のうねりに対応し
た異なる径を有している。このように複数個の転動体４
の異径設定とうねシとの関係を第３図について説明する
。この第３図において、可動体５の全長ｔは案内面２の
全長りの約２分の１であシ、また可動体５のストローク
Ｓは案内面２の全長りの約２分の１である。そして、案
内面２はその全長りの中間部に最大凸部を有するうねり
を備え、転動体４が７岡の転動体４ａ〜４ｇで構成され
ている場合には、第１の転動体４ａは第２の転動体４ｂ
よシ直径が大きく、第２の転動体４ｂは第３の転動体４
Ｃよシ直径が大きく、第３の転動体４Ｃは第４の転動体
４ｄより直径が大きい。また、第４の転動体４ｄは第５
の転動体４ｅより直径が小さく、第５の転動体４ｅは第
６の転動体４ｆよシ直径が小さく、第６の転動体４ｆは
第７の転動体４ｇよシ直径が小さく設定されている。ま
た、前述した案内面２のうねシの高さは、案内面２の全
長りの１０万分の１程度以上となる場合が多いが、この
とき最も大きい転動体と最も小さい転動体の直径の差が
転動体の直径の数σ分の１ないし十分の１程度となるよ
うに転動体４を選択すれば良い、転動体の真円度は、直
径の１万分の１程度であるのが通例であるから、本発明
を実施する際の障害とはならない。The plurality of rolling elements 4 described above have different diameters corresponding to the undulations of the guide surface 2. In this way, a plurality of rolling elements 4
The relationship between the different diameter settings and the ridges will be explained with reference to FIG. In FIG. 3, the total length t of the movable body 5 is approximately 1/2 of the total length of the guide surface 2, and the stroke S of the movable body 5 is approximately 1/2 of the total length of the guide surface 2. be. The guide surface 2 is provided with an undulation having a maximum convex portion in the middle part of its entire length, and when the rolling elements 4 are composed of seven rolling elements 4a to 4g, the first rolling element 4a is Second rolling element 4b
The diameter is larger, and the second rolling element 4b is larger than the third rolling element 4.
The third rolling element 4C has a larger diameter than the fourth rolling element 4d. Further, the fourth rolling element 4d is the fifth rolling element.
The fifth rolling element 4e has a smaller diameter than the sixth rolling element 4f, and the sixth rolling element 4f has a smaller diameter than the seventh rolling element 4g. . In addition, the height of the ridges on the guide surface 2 mentioned above is often about 1/100,000 or more of the total length of the guide surface 2, but in this case, the diameter of the largest rolling element and the smallest rolling element The rolling elements 4 may be selected so that the difference is about 1/1 to 1/1/10th of the diameter of the rolling elements, and the roundness of the rolling elements is usually about 1/10,000 of the diameter. Therefore, this does not pose an obstacle to implementing the present invention.
次に上述した本発明の装置の一実施例の動作を説明する
。Next, the operation of one embodiment of the above-described apparatus of the present invention will be described.
いま、第１図に示すように案内面２の全長の中間部に凸
状の最大高さを有するうねシが形成されている場合にお
いて、リニアモータ１２の駆動力によシ可動体５が第３
図に示す状態から、第４図に示すように図面上、下方に
移動すると、転動体群は可動体５の移動量の２分の１だ
け移動する。このとき、可動体５の第１の接触面１３と
案内面２との間には第１の転動体４ａおよ′び第２の転
動体４ｂが位置し、一方、可動体５の第２の接触面１４
と案内面２との間には第４の転動体４ｄおよび第５の転
動体４ｅが位置する。この移動に際し、可動体５の第２
の接触面１４に相対する案内面２ａは、可動体５の第１
の接触面１３に相対する案内面２ｂよシ盛勺上がってい
るが、第１の転動体４ａと第２の転動体４ｂとの直径の
平均値は第４の転動体４ｄと第５の転動体４ｅとのそれ
よシも大きいため、これによシ、可動体５のうねり高さ
変化による姿勢変化が補償され、可動体５が第３図に示
す案内面２の中間部第４図に示すようにその図面上下方
に移動しても、可動体５は姿勢変化を生ぜずに直進動す
る。その結果、これに連結するテーブルを真直度を保っ
て移動式ぞることができる。Now, as shown in FIG. 1, when a convex ridge having a maximum height is formed in the middle part of the entire length of the guide surface 2, the movable body 5 is moved by the driving force of the linear motor 12. Third
When moving downward in the drawing from the state shown in the figure as shown in FIG. 4, the rolling element group moves by one-half of the amount of movement of the movable body 5. At this time, the first rolling element 4a and the second rolling element 4b are located between the first contact surface 13 and the guide surface 2 of the movable body 5, while the second rolling element 4b of the movable body 5 contact surface 14
A fourth rolling element 4d and a fifth rolling element 4e are located between the guide surface 2 and the guide surface 2. During this movement, the second
The guide surface 2a facing the contact surface 14 of the movable body 5
The average value of the diameters of the first rolling element 4a and the second rolling element 4b is higher than that of the fourth rolling element 4d and the fifth rolling element. Since the deviation from the moving body 4e is also large, this compensates for the change in attitude of the movable body 5 due to the change in the undulation height, and the movable body 5 moves to the middle part of the guide surface 2 shown in FIG. 3 in FIG. As shown, even when moving up and down in the drawing, the movable body 5 moves straight without changing its posture. As a result, the table connected thereto can be movably traced while maintaining its straightness.
なお、上述の実施例は、波長の太きなうねりに工）中央
部がｍＤ上がった案内面に本発明の案内装置を適用した
が、不発明の案内装置は案内面が他の形態の形状誤差を
イする場合にも適用可能でるる。要は、案内面の形状に
応じて転動体４の直径を変えｎば、可動体５の移動姿勢
の変化を小さく抑えることができる。また、上述の実施
例では転動体４の数を７個としたが、７４１ｖＡ以外の
数の転動体を組φ込んで構成することも可能である。In the above-mentioned embodiments, the guide device of the present invention was applied to a guide surface whose central portion was raised by mD due to thick wave undulations. It can also be applied to eliminate errors. In short, by changing the diameter of the rolling elements 4 according to the shape of the guide surface, changes in the moving posture of the movable body 5 can be suppressed to a small level. Further, in the above embodiment, the number of rolling elements 4 is seven, but it is also possible to incorporate a number of rolling elements other than 741 vA.
また、転動体４の径寸法設定のために、案内面の形状を
把握する必要があるが、案内面の形状は三次元座標測定
器等の高精度な測定器を用いて測定することが可能でる
る。でして、この種の測定器を用いることが困難な場合
には万一トコリメータを用いれば良い。その測定方策を
第５図を用いて説明する。この図に２いて第１図および
第２図と同一部分は同一符号で示しである。可動体５に
は反射ミラー１６が取り付けられている。オートコリメ
ータ１７により反射ミラ−１６０角度変化を検出する。In addition, in order to set the diameter of the rolling elements 4, it is necessary to know the shape of the guide surface, but the shape of the guide surface can be measured using a high-precision measuring device such as a three-dimensional coordinate measuring device. Out. Therefore, if it is difficult to use this type of measuring device, a tocollimator may be used. The measurement strategy will be explained using FIG. In this figure, the same parts as in FIGS. 1 and 2 are designated by the same reference numerals. A reflecting mirror 16 is attached to the movable body 5. An autocollimator 17 detects a change in the angle of the reflection mirror 160.
すべての転動体４の直径を等しく設定しておけば、可動
体５の移動姿勢には案内面２の形状が強く転写されるの
で、可動体５を移動させたときにオートコリメータ１７
によシ検出される反射ミラー１６の角度変化から案内面
２の形状を割り出すことが可能である。しかる後に、案
内面２の形状に応じて直径の異なる転動体群を第１の保
持器３に組み込めば、前述のように可動体５の姿勢変化
を小さく抑えることができる。If the diameters of all the rolling elements 4 are set equal, the shape of the guide surface 2 will be strongly transferred to the moving posture of the movable body 5, so when the movable body 5 is moved, the autocollimator 17
It is possible to determine the shape of the guide surface 2 from the angle change of the reflecting mirror 16 detected by the sensor. If a group of rolling elements having different diameters are then incorporated into the first retainer 3 according to the shape of the guide surface 2, changes in the posture of the movable body 5 can be suppressed to a small value as described above.
さらに、本発明においては、案内面が垂直、水平な場合
にも適用できることは勿論である。Furthermore, the present invention can of course be applied to cases where the guide surface is vertical or horizontal.
以上述べた本発明の装置を例えばＸＹプロッタ、工作機
械、縮小露光装置に適用すれば、それらの可動体を正確
に案内することができ、そのｉｆｆの精度を向上させる
ことができる。If the apparatus of the present invention described above is applied to, for example, an XY plotter, a machine tool, or a reduction exposure apparatus, it is possible to accurately guide those movable bodies, and the accuracy of the IF can be improved.
本発明によれば、簡単な構造で可動体を姿勢変化させる
ことなく案内させることができる、その結果、適用装置
の位置決め精度を飛躍的に増大させることができる。According to the present invention, the movable body can be guided without changing its posture with a simple structure, and as a result, the positioning accuracy of the applied device can be dramatically increased.
第１図は本発明の装置の一実施例を示す横断平面図、第
２図は第１図の側面図、第３図および第４図は本発明の
装置の実施例の動作を示す説明図、第５図は案内面の形
状測定方策の一例を示す説明図である。
１・・・ベース、２・・・案内面、３・・・第１の保持
器、４・・・転動体、５・・・可動棒、６・・・予圧面
、７・・・第２の保持器、８・・・予圧ローラ、９・・
・予圧機構、１０・・・テーブル、１１・・・ニードル
ローラ、１２・・・リニアモータ、１３・・・第１の接
触面、１４・・・第２の接触第 ／ 凹
第 ２ 目
４・転動体 Δ−第２の接続辺
５ 可動棒
第 ３Ｉ２］
早 ４２
４（Ｌ〜４一つし Ｊと１巳ミ（卜りフイ本２ｏ−、２
ｅ−寛ハ面
第 ５ 図
／６・・・反身Ｔミラー
／７１１、オ一トフリメータFIG. 1 is a cross-sectional plan view showing one embodiment of the device of the present invention, FIG. 2 is a side view of FIG. 1, and FIGS. 3 and 4 are explanatory diagrams showing the operation of the embodiment of the device of the present invention. , FIG. 5 is an explanatory diagram showing an example of a method for measuring the shape of a guide surface. DESCRIPTION OF SYMBOLS 1... Base, 2... Guide surface, 3... First retainer, 4... Rolling element, 5... Movable rod, 6... Preload surface, 7... Second retainer, 8...preload roller, 9...
・Preload mechanism, 10...Table, 11...Needle roller, 12...Linear motor, 13...First contact surface, 14...Second contact/concave second eye 4・Rolling element Δ-Second connecting side 5 Movable rod No. 3I2] Early 42 4 (L~4 one piece J and 1 Mi (turning side 2o-, 2
e-Kanha side No. 5 Figure/6...Reverse T-mirror/711, Oto-frimeter
Claims (1)
転動する転動体群と、この転動体群を介して前記案内面
に沿つて移動する可動体とを備える案内装置において、
前記可動体の両端に転動体と接する接触面を設け、この
接触面と案内面との間に設けられる各転動体の径を、少
なくとも案内面の全長以上の波長の案内面のうねりに対
して可動体の移動姿勢が一定に保たれるようにそれぞれ
設定したことを特徴とする案内装置。 ２、可動体はその両端の接触面間に切欠部を備えたこと
を特徴とする特許請求の範囲第１項記載の案内装置。 ３、案内面は垂直案内面であることを特徴とする特許請
求の範囲第２項記載の案内装置。 ４、案内面は水平案内面であることを特徴とする特許請
求の範囲第２項記載の案内装置。 ５、可動体は予圧機構により案内面に押圧されることを
特徴とする特許請求の範囲第３項または第４項記載の案
内装置。[Claims] 1. A guide surface, a group of rolling elements that roll within a certain distance range along this guide surface, and a movable body that moves along the guide surface via this group of rolling elements. In a guide device comprising:
A contact surface in contact with the rolling elements is provided at both ends of the movable body, and the diameter of each rolling element provided between the contact surface and the guide surface is set so that the diameter of each rolling element is at least equal to the undulation of the guide surface with a wavelength equal to or longer than the entire length of the guide surface. A guide device characterized in that each movable body is set so that its moving posture is kept constant. 2. The guide device according to claim 1, wherein the movable body has a notch between contact surfaces at both ends thereof. 3. The guide device according to claim 2, wherein the guide surface is a vertical guide surface. 4. The guide device according to claim 2, wherein the guide surface is a horizontal guide surface. 5. The guide device according to claim 3 or 4, wherein the movable body is pressed against the guide surface by a preload mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16364386A JPS6322241A (en) | 1986-07-14 | 1986-07-14 | Guide apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16364386A JPS6322241A (en) | 1986-07-14 | 1986-07-14 | Guide apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322241A true JPS6322241A (en) | 1988-01-29 |
Family
ID=15777843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16364386A Pending JPS6322241A (en) | 1986-07-14 | 1986-07-14 | Guide apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322241A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04304936A (en) * | 1991-03-29 | 1992-10-28 | Canon Inc | Movement guide device |
-
1986
- 1986-07-14 JP JP16364386A patent/JPS6322241A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04304936A (en) * | 1991-03-29 | 1992-10-28 | Canon Inc | Movement guide device |
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