JPH043007Y2 - - Google Patents

Info

Publication number
JPH043007Y2
JPH043007Y2 JP1986087348U JP8734886U JPH043007Y2 JP H043007 Y2 JPH043007 Y2 JP H043007Y2 JP 1986087348 U JP1986087348 U JP 1986087348U JP 8734886 U JP8734886 U JP 8734886U JP H043007 Y2 JPH043007 Y2 JP H043007Y2
Authority
JP
Japan
Prior art keywords
base material
reaction tube
plasma
waveguide
goniometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986087348U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62198277U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986087348U priority Critical patent/JPH043007Y2/ja
Publication of JPS62198277U publication Critical patent/JPS62198277U/ja
Application granted granted Critical
Publication of JPH043007Y2 publication Critical patent/JPH043007Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1986087348U 1986-06-09 1986-06-09 Expired JPH043007Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986087348U JPH043007Y2 (cs) 1986-06-09 1986-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986087348U JPH043007Y2 (cs) 1986-06-09 1986-06-09

Publications (2)

Publication Number Publication Date
JPS62198277U JPS62198277U (cs) 1987-12-17
JPH043007Y2 true JPH043007Y2 (cs) 1992-01-31

Family

ID=30944471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986087348U Expired JPH043007Y2 (cs) 1986-06-09 1986-06-09

Country Status (1)

Country Link
JP (1) JPH043007Y2 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054996A (ja) * 1983-09-07 1985-03-29 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法
JPS6054995A (ja) * 1983-09-07 1985-03-29 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法

Also Published As

Publication number Publication date
JPS62198277U (cs) 1987-12-17

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