JPH04300253A - Production of porous piezoelectric element - Google Patents
Production of porous piezoelectric elementInfo
- Publication number
- JPH04300253A JPH04300253A JP3062830A JP6283091A JPH04300253A JP H04300253 A JPH04300253 A JP H04300253A JP 3062830 A JP3062830 A JP 3062830A JP 6283091 A JP6283091 A JP 6283091A JP H04300253 A JPH04300253 A JP H04300253A
- Authority
- JP
- Japan
- Prior art keywords
- pore
- piezoelectric element
- forming material
- powder
- porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000000463 material Substances 0.000 claims abstract description 75
- 239000000843 powder Substances 0.000 claims abstract description 48
- 230000008016 vaporization Effects 0.000 claims abstract description 12
- 239000011230 binding agent Substances 0.000 claims abstract description 4
- 239000002131 composite material Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 15
- 239000002245 particle Substances 0.000 claims description 13
- 238000001035 drying Methods 0.000 claims description 10
- 238000009834 vaporization Methods 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 6
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 4
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 3
- 239000007864 aqueous solution Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 238000009827 uniform distribution Methods 0.000 abstract description 2
- 239000008187 granular material Substances 0.000 abstract 1
- 239000011259 mixed solution Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000011148 porous material Substances 0.000 description 13
- 239000002002 slurry Substances 0.000 description 12
- 238000010304 firing Methods 0.000 description 7
- 238000005469 granulation Methods 0.000 description 4
- 230000003179 granulation Effects 0.000 description 4
- 239000011812 mixed powder Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、例えば超音波圧電素子
に使用する多孔質圧電素子の製造に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the production of porous piezoelectric elements used, for example, in ultrasonic piezoelectric elements.
【０００２】0002
【従来の技術】圧電素子は、例えば超音波センサ、マイ
クロフォン、ピックアップのような機械的なひずみを電
気信号に変換する変換器として広く用いられている。電
気信号を入力して機械的な出力を得る逆の変換作用も、
音波や超音波のトランスデューサ、ヘッドフォンなどに
利用されている。この圧電素子は、例えばＰｂ（Ｚｒ，
Ｔｉ）Ｏ３のような圧電材料からなり、内部に無数の微
細な空孔が形成された多孔質形状になっている。2. Description of the Related Art Piezoelectric elements are widely used as transducers for converting mechanical strain into electrical signals, such as in ultrasonic sensors, microphones, and pickups. The reverse conversion action of inputting an electrical signal and obtaining a mechanical output is also possible.
It is used in sonic and ultrasonic transducers, headphones, etc. This piezoelectric element is made of, for example, Pb (Zr,
It is made of a piezoelectric material such as Ti)O3, and has a porous shape with countless fine pores formed inside.
【０００３】この多孔質圧電素子は、図４に示すように
、圧電材料粉と、焼成熱により気化する空孔形成材とを
ボールミルで混合し、得られた混合粉を加圧成形したも
のを焼成して製造される。空孔形成材には、例えば平均
粒径が５μｍ程度のポリメチルメタクリレート樹脂球が
用いられ、焼成熱により気化するとその部分に空孔が形
成される。製造された多孔質圧電素子には用途に応じて
切削加工や研磨加工が施される。As shown in FIG. 4, this porous piezoelectric element is made by mixing piezoelectric material powder and a pore-forming material that is vaporized by the heat of firing in a ball mill, and then press-molding the resulting mixed powder. Manufactured by firing. For example, polymethyl methacrylate resin spheres having an average particle size of about 5 μm are used as the pore-forming material, and when the resin spheres are vaporized by the heat of firing, pores are formed in the portions. The manufactured porous piezoelectric element is subjected to cutting or polishing depending on the intended use.
【０００４】多孔質圧電素子は上記のように製造されて
きたが、ボールミルを用いて圧電材料粉と空孔形成材と
を混合すると空孔形成材が帯電し、空孔形成材同士が連
結したり凝集することがある。図５にボールミルを用い
て混合された混合粉を示す。このような混合粉を加圧成
形して焼成すると、凝集した空孔形成材３が気化した跡
には連続した空孔や大きな空孔が形成されてしまう。大
きな空孔がある多孔質圧電素子は機械強度が低く、微細
な加工に適していない。Porous piezoelectric elements have been manufactured as described above, but when the piezoelectric material powder and the pore-forming material are mixed using a ball mill, the pore-forming material is charged and the pore-forming materials are connected to each other. or may aggregate. Figure 5 shows the mixed powder mixed using a ball mill. When such a mixed powder is pressure-molded and fired, continuous pores or large pores are formed in the remains where the aggregated pore-forming material 3 has evaporated. Porous piezoelectric elements with large pores have low mechanical strength and are not suitable for fine processing.
【０００５】[0005]
【発明が解決しようとする課題】本発明は前記の課題を
解決するためなされたもので、微細な空孔が均一に分布
し、機械強度が高く、微細加工性が優れた多孔質圧電素
子が得られる多孔質圧電素子の製造方法を提供すること
を目的とする。[Problems to be Solved by the Invention] The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a porous piezoelectric element with uniform distribution of fine pores, high mechanical strength, and excellent microprocessability. It is an object of the present invention to provide a method for manufacturing the porous piezoelectric element obtained.
【０００６】[0006]
【課題を解決するための手段】前記の目的を達成するた
めになされた本発明の多孔質圧電素子の製造方法を、実
施例に対応する図面を用いて説明する。[Means for Solving the Problems] A method for manufacturing a porous piezoelectric element of the present invention, which has been made to achieve the above object, will be explained using drawings corresponding to embodiments.
【０００７】図１に示すように本発明の多孔質圧電素子
の製造方法は、圧電材料粉２と粘結材４と加熱気化性の
空孔形成材３とを混合した混合液５を、空孔形成材２の
気化温度以下に温度設定された熱風１４中に圧搾空気１
３とともに噴霧して乾燥させ、空孔形成材３の表面を圧
電材料粉２で被覆した複合粉体７を造粒する。得られた
複合粉体７を成形した成形体を空孔形成材３の気化温度
以上の温度で焼成する。As shown in FIG. 1, the method for manufacturing a porous piezoelectric element of the present invention involves adding a mixed liquid 5 of a piezoelectric material powder 2, a caking material 4, and a heat-vaporizable pore-forming material 3 to the air. Compressed air 1 is placed in hot air 14 whose temperature is set below the vaporization temperature of pore-forming material 2.
3 and dried to form a composite powder 7 in which the surface of the pore-forming material 3 is coated with the piezoelectric material powder 2. A molded body obtained by molding the obtained composite powder 7 is fired at a temperature equal to or higher than the vaporization temperature of the pore-forming material 3.
【０００８】圧電材料粉２は、例えば、Ｐｂ（Ｚｒ，Ｔ
ｉ）Ｏ３ である。The piezoelectric material powder 2 is, for example, Pb (Zr, T
i) O3.
【０００９】圧電材料粉２は最大粒径が１μｍ以下のも
のを使用する。最大粒径が１μｍを越えるものは、空孔
形成材３を密に被覆することが困難である。The piezoelectric material powder 2 used has a maximum particle size of 1 μm or less. If the maximum particle size exceeds 1 μm, it is difficult to cover the pore-forming material 3 densely.
【００１０】空孔形成材３は加熱気化性で、気化温度が
２００〜１０００℃である材料、例えば、ポリメチルメ
タクリレート樹脂を使用する。気化温度が２００℃以下
の場合には、造粒された複合粉体７中の空孔形成材３が
熱風１４で溶融したり気化する恐れがある。一方、１０
００℃以上になると、焼成の際に空孔形成材３が完全に
気化しないことがあり、所望の特性が得られなくなる。The pore-forming material 3 is a heat-vaporizable material having a vaporization temperature of 200 to 1000° C., such as polymethyl methacrylate resin. If the vaporization temperature is 200° C. or lower, there is a risk that the pore-forming material 3 in the granulated composite powder 7 may be melted or vaporized by the hot air 14. On the other hand, 10
If the temperature exceeds 00° C., the pore-forming material 3 may not be completely vaporized during firing, making it impossible to obtain desired characteristics.
【００１１】空孔形成材３の平均粒径は２〜３０μｍの
ものが好ましい。平均粒径が２μｍ以下のときは圧電材
料粉２と空孔形成材３との粒径が近接するため、複合粉
体化が困難になる。平均粒径が３０μｍ以上のときは焼
成体の空孔径が大きくなり、圧電素子の機械強度や微細
加工性が低下する。[0011] The average particle size of the pore-forming material 3 is preferably 2 to 30 μm. When the average particle size is 2 μm or less, the particle sizes of the piezoelectric material powder 2 and the pore-forming material 3 are close to each other, making it difficult to form a composite powder. When the average particle size is 30 μm or more, the pore size of the fired body becomes large, and the mechanical strength and microfabricability of the piezoelectric element decrease.
【００１２】粘結材４としては、例えば１〜５％のポリ
ビニルアルコール水溶液が好適である。[0012] As the binder 4, for example, a 1 to 5% aqueous polyvinyl alcohol solution is suitable.
【００１３】なお、熱風１４の温度は空孔形成材３の気
化温度以下に設定しておく。熱風１４の温度が空孔形成
材３の気化温度よりも高くなると、空孔形成材３が熱風
１４で溶融したり気化して所望の複合粉体７が得られな
くなる。The temperature of the hot air 14 is set below the vaporization temperature of the pore-forming material 3. If the temperature of the hot air 14 becomes higher than the vaporization temperature of the pore-forming material 3, the pore-forming material 3 will be melted or vaporized by the hot air 14, making it impossible to obtain the desired composite powder 7.
【００１４】[0014]
【作用】圧電材料粉２、空孔形成材および粘結材４の混
合液５を圧搾空気とともに熱風中に噴霧すると、個々の
空孔形成材３は圧電材料粉２および粘結材４で別々に覆
われた状態で乾燥し、複合粉体７が造粒される。造粒さ
れた複合粉体７を加圧成形した場合でも空孔形成材３同
士は接触しないため、空孔形成材３が連結したり凝集す
ることはない。得られた複合粉体７の成形物を焼成する
と、空孔形成材３は焼成熱で気化し、その部分には微細
な独立した空孔が形成される。[Operation] When the mixed liquid 5 of the piezoelectric material powder 2, the pore-forming material and the caking material 4 is sprayed into hot air together with compressed air, the individual pore-forming materials 3 are separated by the piezoelectric material powder 2 and the caking material 4. The composite powder 7 is granulated by drying while being covered with. Even when the granulated composite powder 7 is pressure-molded, the pore-forming materials 3 do not come into contact with each other, so the pore-forming materials 3 do not connect or aggregate. When the obtained molded composite powder 7 is fired, the pore-forming material 3 is vaporized by the heat of firing, and fine independent pores are formed in that part.
【００１５】[0015]
【実施例】以下、本発明の実施例を説明する。先ず、図
１を用いて本発明の多孔質圧電素子の製造方法に用いる
造粒装置の概略を説明する。[Examples] Examples of the present invention will be described below. First, the outline of a granulation apparatus used in the method for manufacturing a porous piezoelectric element of the present invention will be explained using FIG.
【００１６】この造粒装置は、圧電材料粉２、空孔形成
材３および粘結材４が混合されたスラリー５を収容した
スラリー容器１１と、スラリー５を乾燥して複合粉体７
を造粒する乾燥チャンバ１０と、乾燥した複合粉体７を
分離するサイクロン１６とをこの順に連結したものであ
る。スラリー容器１１は送液ポンプ１２を介し、乾燥チ
ャンバ１０の内部に取付けられたノズル１５に連結して
いる。ノズル１５は二重構造になっており、スラリー容
器１１はその内側ノズル（１．２ｍｍφ）に接続される
。外側ノズル（１．７ｍｍφ）は乾燥チャンバ１０外部
の圧搾空気源１３に接続している。乾燥チャンバ１０の
内部には１８０℃の熱風１４が毎分０．４５ｍ３の速度
で送気されている。
乾燥チャンバ１０の排出側にはサイクロン１６が連結さ
れ、その後段には排気ポンプ１８が接続されている。This granulation device includes a slurry container 11 containing a slurry 5 in which a piezoelectric material powder 2, a pore-forming material 3, and a caking material 4 are mixed, and a composite powder 7 by drying the slurry 5.
A drying chamber 10 for granulating the composite powder 7 and a cyclone 16 for separating the dried composite powder 7 are connected in this order. The slurry container 11 is connected to a nozzle 15 installed inside the drying chamber 10 via a liquid pump 12 . The nozzle 15 has a double structure, and the slurry container 11 is connected to the inner nozzle (1.2 mmφ). The outer nozzle (1.7 mmφ) is connected to a compressed air source 13 outside the drying chamber 10. Hot air 14 at 180° C. is blown into the drying chamber 10 at a rate of 0.45 m 3 per minute. A cyclone 16 is connected to the discharge side of the drying chamber 10, and an exhaust pump 18 is connected to the downstream side.
【００１７】複合粉体の造粒は以下のように行なう。送
液ポンプ１２を駆動してノズル１５の内側ノズルからス
ラリー５を噴出する。同時に外側ノズルから１ｋｇ／ｃ
ｍ２の圧搾空気を噴出し、乾燥チャンバ１０の内部にス
ラリー５を噴霧する。霧化したスラリー粒６は空孔形成
材３が完全に独立しており、夫々の空孔形成材３の粒子
表面が圧電材料粉２と粘結材４とで覆われたまま熱風１
４中で乾燥され、複合粉体７が造粒される。造粒された
複合粉体７は熱風１４の流れとともにサイクロン１６に
流入して分離される。熱風１４は排気ポンプ１８を経て
放出される。Granulation of the composite powder is carried out as follows. The liquid feeding pump 12 is driven to eject the slurry 5 from the inner nozzle of the nozzle 15. At the same time, 1kg/c from the outside nozzle
m2 of compressed air is ejected to spray the slurry 5 inside the drying chamber 10. In the atomized slurry particles 6, the pore forming material 3 is completely independent, and the particle surface of each pore forming material 3 is covered with the piezoelectric material powder 2 and the caking material 4 while being exposed to the hot air 1.
4, and the composite powder 7 is granulated. The granulated composite powder 7 flows into a cyclone 16 with the flow of hot air 14 and is separated. Hot air 14 is discharged via exhaust pump 18.
【００１８】図２に得られた複合粉体７を示す。夫々の
複合粉体７は一個の空孔形成材３を核とし、その全表面
が圧電材料粉２と粘結材４とで被覆されている。この複
合粉体７を加圧成形すると空孔形成材３は均一に分布し
た状態で成形され、空孔形成材３同士が接触することは
ない。所望の形状に成形した成形体を常法に従って焼成
すれば多孔質圧電素子が得られる（図３参照）。複合粉
体７を加圧成形した場合でも空孔形成材３同士は接触し
ないため、空孔形成材３が連結したり凝集することはな
い。得られた複合粉体の成形物を焼成すると、空孔形成
材３は焼成熱で気化し、微細な空孔が均一に分布した多
孔質圧電素子が製造される。FIG. 2 shows the composite powder 7 obtained. Each composite powder 7 has one pore-forming material 3 as a core, and its entire surface is coated with piezoelectric material powder 2 and caking material 4. When this composite powder 7 is pressure-molded, the pore-forming materials 3 are molded in a uniformly distributed state, and the pore-forming materials 3 do not come into contact with each other. A porous piezoelectric element can be obtained by firing a molded body formed into a desired shape according to a conventional method (see FIG. 3). Even when the composite powder 7 is pressure-molded, the pore-forming materials 3 do not come into contact with each other, so the pore-forming materials 3 do not connect or aggregate. When the resulting molded composite powder is fired, the pore-forming material 3 is vaporized by the heat of firing, producing a porous piezoelectric element in which fine pores are uniformly distributed.
【００１９】空孔形成材３として平均粒径が５μｍ、気
化温度２４０℃のポリメチルメタクリレート樹脂球５重
量部、圧電材料粉２として最大粒径が１μｍのＰｂ（Ｚ
ｒ，Ｔｉ）Ｏ３粉４５重量部、粘結材４としてポリビニ
ルアルコールの２．５％水溶液５０重量部を容器１１に
入れ、充分に撹拌、混合してスラリー５を調製し、上記
の手順に従って複合粉体７を得た。得られた複合粉体、
約４ｃｍ３ を、成形圧１．４ｔ／ｃｍ２で加圧成形し
、１２７０℃で１時間焼成したところ、得られた多孔質
圧電素子は、機械強度が高く、微細加工性が優れていた
。As the pore forming material 3, 5 parts by weight of polymethyl methacrylate resin spheres with an average particle diameter of 5 μm and a vaporization temperature of 240° C., as the piezoelectric material powder 2, Pb (Z) with a maximum particle diameter of 1 μm.
r, Ti) 45 parts by weight of O3 powder and 50 parts by weight of a 2.5% aqueous solution of polyvinyl alcohol as the binder 4 are placed in a container 11, stirred and mixed thoroughly to prepare a slurry 5, and then composited according to the above procedure. Powder 7 was obtained. The obtained composite powder,
Approximately 4 cm 3 was pressure-molded at a molding pressure of 1.4 t/cm 2 and fired at 1270° C. for 1 hour. The resulting porous piezoelectric element had high mechanical strength and excellent microfabricability.
【００２０】[0020]
【発明の効果】以上、詳細に説明したように本発明の多
孔質圧電素子の製造方法によれば、空孔形成材が連結し
たり凝集することがないため、微細な独立空孔を有する
多孔質圧電素子を得ることが出来る。製造された多孔質
圧電素子は、機械強度が高く、微細加工性が優れている
。Effects of the Invention As described above in detail, according to the method of manufacturing a porous piezoelectric element of the present invention, the pore-forming material does not connect or agglomerate. A high quality piezoelectric element can be obtained. The manufactured porous piezoelectric element has high mechanical strength and excellent microprocessability.
【図１】本発明の多孔質圧電素子の製造方法に用いる造
粒装置の概略側面図である。FIG. 1 is a schematic side view of a granulation device used in the method of manufacturing a porous piezoelectric element of the present invention.
【図２】本発明の多孔質圧電素子の製造方法で造粒され
た複合粉体の拡大図である。FIG. 2 is an enlarged view of a composite powder granulated by the method for manufacturing a porous piezoelectric element of the present invention.
【図３】本発明を適用する多孔質圧電素子の製造方法を
示す工程図である。FIG. 3 is a process diagram showing a method for manufacturing a porous piezoelectric element to which the present invention is applied.
【図４】従来の多孔質圧電素子の製造方法を示す工程図
である。FIG. 4 is a process diagram showing a conventional method for manufacturing a porous piezoelectric element.
【図５】従来の製造方法における混合粉の混合状態を示
す図である。FIG. 5 is a diagram showing the mixing state of mixed powder in a conventional manufacturing method.
２は圧電材料粉、３は空孔形成材、４は粘結材、５はス
ラリー、６はスラリー粒、７は複合粉体、１０は乾燥チ
ャンバ、１１はスラリー容器、１２は送液ポンプ、１３
は圧搾空気源、１４は熱風、１５はノズル、１６はサイ
クロン、１８は排気ポンプである。2 is a piezoelectric material powder, 3 is a pore forming material, 4 is a binding material, 5 is a slurry, 6 is a slurry grain, 7 is a composite powder, 10 is a drying chamber, 11 is a slurry container, 12 is a liquid pump, 13
14 is a compressed air source, 14 is hot air, 15 is a nozzle, 16 is a cyclone, and 18 is an exhaust pump.
Claims (6)
孔形成材とを混合した混合液を、前記空孔形成材の気化
温度以下に温度設定された熱風中に圧搾空気とともに噴
霧して乾燥させ、前記空孔形成材の表面を圧電材料粉で
被覆した複合粉体を造粒した後、該複合粉体を成形した
成形体を空孔形成材の気化温度以上の温度で焼成するこ
とを特徴とする多孔質圧電素子の製造方法。1. Spraying a liquid mixture of a piezoelectric material powder, a caking material, and a heat-vaporizable pore-forming material together with compressed air into hot air whose temperature is set below the vaporization temperature of the pore-forming material. After drying and granulating a composite powder in which the surface of the pore-forming material is coated with piezoelectric material powder, a molded body made of the composite powder is fired at a temperature higher than the vaporization temperature of the pore-forming material. A method for manufacturing a porous piezoelectric element, characterized by:
Ｏ３ であることを特徴とする請求項１に記載の多孔質
圧電素子の製造方法。[Claim 2] The piezoelectric material powder is Pb (Zr, Ti).
The method for manufacturing a porous piezoelectric element according to claim 1, wherein the porous piezoelectric element is O3.
あることを特徴とする請求項１に記載の多孔質圧電素子
の製造方法。3. The method for manufacturing a porous piezoelectric element according to claim 1, wherein the piezoelectric material powder has a maximum particle size of 1 μm.
１０００℃であることを特徴とする請求項１に記載の多
孔質圧電素子の製造方法。4. The pore-forming material has a vaporization temperature of 200 to
The method for manufacturing a porous piezoelectric element according to claim 1, wherein the temperature is 1000°C.
ｍのポリメチルメタクリレート樹脂球であることを特徴
とする請求項１に記載の多孔質圧電素子の製造方法。5. The pore-forming material has an average particle size of 2 to 30 μm.
The method for manufacturing a porous piezoelectric element according to claim 1, wherein the porous piezoelectric element is a polymethyl methacrylate resin sphere of m.
１〜５％水溶液であることを特徴とする請求項１に記載
の多孔質圧電素子の製造方法。6. The method for manufacturing a porous piezoelectric element according to claim 1, wherein the binder is a 1 to 5% aqueous solution of polyvinyl alcohol.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6283091A JP2994778B2 (en) | 1991-03-27 | 1991-03-27 | Method for manufacturing porous piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6283091A JP2994778B2 (en) | 1991-03-27 | 1991-03-27 | Method for manufacturing porous piezoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04300253A true JPH04300253A (en) | 1992-10-23 |
| JP2994778B2 JP2994778B2 (en) | 1999-12-27 |
Family
ID=13211631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6283091A Expired - Fee Related JP2994778B2 (en) | 1991-03-27 | 1991-03-27 | Method for manufacturing porous piezoelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2994778B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020017478A1 (en) | 2018-07-17 | 2020-01-23 | 清 永井 | Porous piezoelectric material molded body, method of manufacturing same, and probe using said molded body |
-
1991
- 1991-03-27 JP JP6283091A patent/JP2994778B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020017478A1 (en) | 2018-07-17 | 2020-01-23 | 清 永井 | Porous piezoelectric material molded body, method of manufacturing same, and probe using said molded body |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2994778B2 (en) | 1999-12-27 |
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