JP2994778B2 - Method for manufacturing porous piezoelectric element - Google Patents
Method for manufacturing porous piezoelectric elementInfo
- Publication number
- JP2994778B2 JP2994778B2 JP6283091A JP6283091A JP2994778B2 JP 2994778 B2 JP2994778 B2 JP 2994778B2 JP 6283091 A JP6283091 A JP 6283091A JP 6283091 A JP6283091 A JP 6283091A JP 2994778 B2 JP2994778 B2 JP 2994778B2
- Authority
- JP
- Japan
- Prior art keywords
- pore
- forming material
- piezoelectric element
- powder
- porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 238000000034 method Methods 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims description 61
- 239000000843 powder Substances 0.000 claims description 43
- 239000002131 composite material Substances 0.000 claims description 23
- 239000002245 particle Substances 0.000 claims description 13
- 239000011230 binding agent Substances 0.000 claims description 12
- 238000009834 vaporization Methods 0.000 claims description 10
- 230000008016 vaporization Effects 0.000 claims description 10
- 238000001035 drying Methods 0.000 claims description 9
- 239000007864 aqueous solution Substances 0.000 claims description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 4
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 239000011148 porous material Substances 0.000 description 18
- 239000002002 slurry Substances 0.000 description 11
- 238000010304 firing Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000011812 mixed powder Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000001354 calcination Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば超音波圧電素子
に使用する多孔質圧電素子の製造に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the manufacture of a porous piezoelectric element used for, for example, an ultrasonic piezoelectric element.
【０００２】[0002]
【従来の技術】圧電素子は、例えば超音波センサ、マイ
クロフォン、ピックアップのような機械的なひずみを電
気信号に変換する変換器として広く用いられている。電
気信号を入力して機械的な出力を得る逆の変換作用も、
音波や超音波のトランスデューサ、ヘッドフォンなどに
利用されている。この圧電素子は、例えばPb(Zr,Ti)O3
のような圧電材料からなり、内部に無数の微細な空孔が
形成された多孔質形状になっている。2. Description of the Related Art Piezoelectric elements are widely used as transducers for converting mechanical strain into electric signals, such as ultrasonic sensors, microphones, and pickups. The reverse conversion function, which takes an electric signal and obtains a mechanical output,
It is used for sound and ultrasonic transducers and headphones. This piezoelectric element is, for example, Pb (Zr, Ti) O 3
And a porous shape in which countless fine holes are formed inside.
【０００３】この多孔質圧電素子は、図４に示すよう
に、圧電材料粉と、焼成熱により気化する空孔形成材と
をボールミルで混合し、得られた混合粉を加圧成形した
ものを焼成して製造される。空孔形成材には、例えば平
均粒径が５μｍ程度のポリメチルメタクリレート樹脂球
が用いられ、焼成熱により気化するとその部分に空孔が
形成される。製造された多孔質圧電素子には用途に応じ
て切削加工や研磨加工が施される。As shown in FIG. 4, this porous piezoelectric element is obtained by mixing a piezoelectric material powder and a pore-forming material which is vaporized by heat of sintering with a ball mill, and pressing the obtained mixed powder under pressure. It is manufactured by firing. As the pore forming material, for example, polymethyl methacrylate resin spheres having an average particle size of about 5 μm are used, and when vaporized by heat of calcination, pores are formed in that portion. The manufactured porous piezoelectric element is subjected to cutting or polishing depending on the application.
【０００４】多孔質圧電素子は上記のように製造されて
きたが、ボールミルを用いて圧電材料粉と空孔形成材と
を混合すると空孔形成材が帯電し、空孔形成材同士が連
結したり凝集することがある。図５にボールミルを用い
て混合された混合粉を示す。このような混合粉を加圧成
形して焼成すると、凝集した空孔形成材３が気化した跡
には連続した空孔や大きな空孔が形成されてしまう。大
きな空孔がある多孔質圧電素子は機械強度が低く、微細
な加工に適していない。The porous piezoelectric element has been manufactured as described above. However, when the piezoelectric material powder and the pore-forming material are mixed using a ball mill, the pore-forming material is charged, and the pore-forming materials are connected to each other. And may agglomerate. FIG. 5 shows a mixed powder mixed using a ball mill. When such a mixed powder is pressed and fired, continuous pores and large pores are formed at the trace where the aggregated pore forming material 3 is vaporized. A porous piezoelectric element having large pores has low mechanical strength and is not suitable for fine processing.
【０００５】[0005]
【発明が解決しようとする課題】本発明は前記の課題を
解決するためなされたもので、微細な空孔が均一に分布
し、機械強度が高く、微細加工性が優れた多孔質圧電素
子が得られる多孔質圧電素子の製造方法を提供すること
を目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and a porous piezoelectric element having fine pores uniformly distributed, high mechanical strength, and excellent fine workability is provided. It is an object of the present invention to provide a method for manufacturing the obtained porous piezoelectric element.
【０００６】[0006]
【課題を解決するための手段】前記の目的を達成するた
めになされた本発明の多孔質圧電素子の製造方法を、実
施例に対応する図面を用いて説明する。A method for manufacturing a porous piezoelectric element according to the present invention, which has been made to achieve the above object, will be described with reference to the drawings corresponding to the embodiments.
【０００７】図１に示すように本発明の多孔質圧電素子
の製造方法は、圧電材料粉２と粘結材４と加熱気化性の
空孔形成材３とを混合した混合液５を、空孔形成材２の
気化温度以下に温度設定された熱風１４中に圧搾空気１
３とともに噴霧して乾燥させ、空孔形成材３の表面を圧
電材料粉２で被覆した複合粉体７を造粒する。得られた
複合粉体７を成形した成形体を空孔形成材３の気化温度
以上の温度で焼成する。As shown in FIG. 1, in the method for manufacturing a porous piezoelectric element according to the present invention, a mixed liquid 5 in which a piezoelectric material powder 2, a binder 4 and a heat-vaporizable pore-forming material 3 are mixed is used. Compressed air 1 in hot air 14 set at a temperature equal to or lower than the vaporization temperature of pore forming material 2
The composite powder 7 in which the surface of the pore forming material 3 is coated with the piezoelectric material powder 2 is granulated by spraying and drying together with the powder. The molded body obtained by molding the obtained composite powder 7 is fired at a temperature equal to or higher than the vaporization temperature of the pore-forming material 3.
【０００８】圧電材料粉２は、例えば、Pb(Zr,Ti)O3 で
ある。The piezoelectric material powder 2 is, for example, Pb (Zr, Ti) O 3 .
【０００９】圧電材料粉２は最大粒径が１μｍ以下のも
のを使用する。最大粒径が１μｍを越えるものは、空孔
形成材３を密に被覆することが困難である。The piezoelectric material powder 2 has a maximum particle size of 1 μm or less. If the maximum particle size exceeds 1 μm, it is difficult to cover the pore forming material 3 densely.
【００１０】空孔形成材３は加熱気化性で、気化温度が
２００〜１０００℃である材料、例えば、ポリメチルメ
タクリレート樹脂を使用する。気化温度が２００℃以下
の場合には、造粒された複合粉体７中の空孔形成材３が
熱風１４で溶融したり気化する恐れがある。一方、１０
００℃以上になると、焼成の際に空孔形成材３が完全に
気化しないことがあり、所望の特性が得られなくなる。The pore forming material 3 is made of a material which is heat-vaporizable and has a vaporization temperature of 200 to 1000 ° C., for example, a polymethyl methacrylate resin. If the vaporization temperature is 200 ° C. or lower, the pore forming material 3 in the granulated composite powder 7 may be melted or vaporized by the hot air 14. On the other hand, 10
If the temperature is higher than 00 ° C., the pore-forming material 3 may not completely evaporate during firing, and desired characteristics cannot be obtained.
【００１１】空孔形成材３の平均粒径は２〜３０μｍの
ものが好ましい。平均粒径が２μｍ以下のときは圧電材
料粉２と空孔形成材３との粒径が近接するため、複合粉
体化が困難になる。平均粒径が３０μｍ以上のときは焼
成体の空孔径が大きくなり、圧電素子の機械強度や微細
加工性が低下する。The average particle diameter of the pore-forming material 3 is preferably 2 to 30 μm. When the average particle diameter is 2 μm or less, the particle diameters of the piezoelectric material powder 2 and the pore-forming material 3 are close to each other, so that it is difficult to form a composite powder. When the average particle size is 30 μm or more, the pore diameter of the fired body becomes large, and the mechanical strength and the fine workability of the piezoelectric element decrease.
【００１２】粘結材４としては、例えば１〜５％のポリ
ビニルアルコール水溶液が好適である。As the binder 4, for example, a 1 to 5% aqueous solution of polyvinyl alcohol is preferable.
【００１３】なお、熱風１４の温度は空孔形成材３の気
化温度以下に設定しておく。熱風１４の温度が空孔形成
材３の気化温度よりも高くなると、空孔形成材３が熱風
１４で溶融したり気化して所望の複合粉体７が得られな
くなる。The temperature of the hot air 14 is set to be equal to or lower than the vaporization temperature of the pore-forming material 3. When the temperature of the hot air 14 is higher than the vaporization temperature of the pore-forming material 3, the pore-forming material 3 is melted or vaporized by the hot air 14, and the desired composite powder 7 cannot be obtained.
【００１４】[0014]
【作用】圧電材料粉２、空孔形成材および粘結材４の混
合液５を圧搾空気とともに熱風中に噴霧すると、個々の
空孔形成材３は圧電材料粉２および粘結材４で別々に覆
われた状態で乾燥し、複合粉体７が造粒される。造粒さ
れた複合粉体７を加圧成形した場合でも空孔形成材３同
士は接触しないため、空孔形成材３が連結したり凝集す
ることはない。得られた複合粉体７の成形物を焼成する
と、空孔形成材３は焼成熱で気化し、その部分には微細
な独立した空孔が形成される。When the mixture 5 of the piezoelectric material powder 2, the pore-forming material and the binder 4 is sprayed into hot air together with the compressed air, the individual pore-forming materials 3 are separated by the piezoelectric material powder 2 and the binder 4. Then, the composite powder 7 is granulated while being dried. Even when the granulated composite powder 7 is pressed, the pore-forming materials 3 do not come into contact with each other, so that the pore-forming materials 3 are not connected or aggregated. When the molded product of the obtained composite powder 7 is fired, the pore-forming material 3 is vaporized by the heat of firing, and fine independent pores are formed in that portion.
【００１５】[0015]
【実施例】以下、本発明の実施例を説明する。先ず、図
１を用いて本発明の多孔質圧電素子の製造方法に用いる
造粒装置の概略を説明する。Embodiments of the present invention will be described below. First, an outline of a granulating apparatus used in the method for manufacturing a porous piezoelectric element of the present invention will be described with reference to FIG.
【００１６】この造粒装置は、圧電材料粉２、空孔形成
材３および粘結材４が混合されたスラリー５を収容した
スラリー容器１１と、スラリー５を乾燥して複合粉体７
を造粒する乾燥チャンバ１０と、乾燥した複合粉体７を
分離するサイクロン１６とをこの順に連結したものであ
る。スラリー容器１１は送液ポンプ１２を介し、乾燥チ
ャンバ１０の内部に取付けられたノズル１５に連結して
いる。ノズル１５は二重構造になっており、スラリー容
器１１はその内側ノズル(1.2mmφ）に接続される。外側
ノズル(1.7mmφ）は乾燥チャンバ１０外部の圧搾空気源
１３に接続している。乾燥チャンバ１０の内部には１８
０℃の熱風１４が毎分0.45m3の速度で送気されている。
乾燥チャンバ１０の排出側にはサイクロン１６が連結さ
れ、その後段には排気ポンプ１８が接続されている。The granulating apparatus comprises a slurry container 11 containing a slurry 5 in which a piezoelectric material powder 2, a pore-forming material 3 and a binder 4 are mixed, and a composite powder 7
And a cyclone 16 for separating the dried composite powder 7 in this order. The slurry container 11 is connected to a nozzle 15 mounted inside the drying chamber 10 via a liquid sending pump 12. The nozzle 15 has a double structure, and the slurry container 11 is connected to its inner nozzle (1.2 mmφ). The outer nozzle (1.7 mmφ) is connected to a compressed air source 13 outside the drying chamber 10. 18 inside the drying chamber 10
Hot air 14 at 0 ° C. is supplied at a rate of 0.45 m 3 per minute.
A cyclone 16 is connected to the discharge side of the drying chamber 10, and an exhaust pump 18 is connected to the subsequent stage.
【００１７】複合粉体の造粒は以下のように行なう。送
液ポンプ１２を駆動してノズル１５の内側ノズルからス
ラリー５を噴出する。同時に外側ノズルから１kg/cm2の
圧搾空気を噴出し、乾燥チャンバ１０の内部にスラリー
５を噴霧する。霧化したスラリー粒６は空孔形成材３が
完全に独立しており、夫々の空孔形成材３の粒子表面が
圧電材料粉２と粘結材４とで覆われたまま熱風１４中で
乾燥され、複合粉体７が造粒される。造粒された複合粉
体７は熱風１４の流れとともにサイクロン１６に流入し
て分離される。熱風１４は排気ポンプ１８を経て放出さ
れる。The granulation of the composite powder is performed as follows. The liquid feed pump 12 is driven to eject the slurry 5 from the inner nozzle of the nozzle 15. Simultaneously, compressed air of 1 kg / cm 2 is jetted from the outer nozzle to spray the slurry 5 into the drying chamber 10. In the atomized slurry particles 6, the pore-forming material 3 is completely independent, and the surface of each pore-forming material 3 is covered with the piezoelectric material powder 2 and the binder 4 in the hot air 14. After drying, the composite powder 7 is granulated. The granulated composite powder 7 flows into the cyclone 16 together with the flow of the hot air 14 and is separated. Hot air 14 is discharged via an exhaust pump 18.
【００１８】図２に得られた複合粉体７を示す。夫々の
複合粉体７は一個の空孔形成材３を核とし、その全表面
が圧電材料粉２と粘結材４とで被覆されている。この複
合粉体７を加圧成形すると空孔形成材３は均一に分布し
た状態で成形され、空孔形成材３同士が接触することは
ない。所望の形状に成形した成形体を常法に従って焼成
すれば多孔質圧電素子が得られる（図３参照）。複合粉
体７を加圧成形した場合でも空孔形成材３同士は接触し
ないため、空孔形成材３が連結したり凝集することはな
い。得られた複合粉体の成形物を焼成すると、空孔形成
材３は焼成熱で気化し、微細な空孔が均一に分布した多
孔質圧電素子が製造される。FIG. 2 shows the obtained composite powder 7. Each composite powder 7 has one vacancy forming material 3 as a nucleus, and its entire surface is covered with the piezoelectric material powder 2 and the binder 4. When the composite powder 7 is molded under pressure, the pore-forming materials 3 are molded in a uniformly distributed state, and the pore-forming materials 3 do not come into contact with each other. If the formed body formed into a desired shape is fired according to a conventional method, a porous piezoelectric element can be obtained (see FIG. 3). Even when the composite powder 7 is molded under pressure, the pore-forming materials 3 do not contact each other, so that the pore-forming materials 3 are not connected or aggregated. When the molded product of the obtained composite powder is fired, the pore forming material 3 is vaporized by the heat of firing, and a porous piezoelectric element in which fine pores are uniformly distributed is manufactured.
【００１９】空孔形成材３として平均粒径が５μｍ、気
化温度２４０℃のポリメチルメタクリレート樹脂球５重
量部、圧電材料粉２として最大粒径が１μｍのPb(Zr,T
i)O3粉４５重量部、粘結材４としてポリビニルアルコー
ルの２．５％水溶液５０重量部を容器１１に入れ、充分
に撹拌、混合してスラリー５を調製し、上記の手順に従
って複合粉体７を得た。得られた複合粉体、約４cm3
を、成形圧1.4t/cm2で加圧成形し、1270℃で１時間焼成
したところ、得られた多孔質圧電素子は、機械強度が高
く、微細加工性が優れていた。The pore forming material 3 has an average particle size of 5 μm, 5 parts by weight of polymethyl methacrylate resin spheres having a vaporization temperature of 240 ° C., and the piezoelectric material powder 2 has a maximum particle size of Pb (Zr, T
i) 45 parts by weight of the O 3 powder and 50 parts by weight of a 2.5% aqueous solution of polyvinyl alcohol as the binder 4 are put into the container 11, and sufficiently stirred and mixed to prepare a slurry 5. Obtained body 7. The obtained composite powder, about 4 cm 3
Was molded under pressure at a molding pressure of 1.4 t / cm 2 and baked at 1270 ° C. for 1 hour. As a result, the obtained porous piezoelectric element had high mechanical strength and excellent fine workability.
【００２０】[0020]
【発明の効果】以上、詳細に説明したように本発明の多
孔質圧電素子の製造方法によれば、空孔形成材が連結し
たり凝集することがないため、微細な独立空孔を有する
多孔質圧電素子を得ることが出来る。製造された多孔質
圧電素子は、機械強度が高く、微細加工性が優れてい
る。As described above in detail, according to the method for manufacturing a porous piezoelectric element of the present invention, the pore-forming material does not connect or agglomerate. A high quality piezoelectric element can be obtained. The manufactured porous piezoelectric element has high mechanical strength and excellent fine workability.
【図１】本発明の多孔質圧電素子の製造方法に用いる造
粒装置の概略側面図である。FIG. 1 is a schematic side view of a granulating apparatus used in a method for manufacturing a porous piezoelectric element of the present invention.
【図２】本発明の多孔質圧電素子の製造方法で造粒され
た複合粉体の拡大図である。FIG. 2 is an enlarged view of a composite powder granulated by the method for manufacturing a porous piezoelectric element of the present invention.
【図３】本発明を適用する多孔質圧電素子の製造方法を
示す工程図である。FIG. 3 is a process chart showing a method for manufacturing a porous piezoelectric element to which the present invention is applied.
【図４】従来の多孔質圧電素子の製造方法を示す工程図
である。FIG. 4 is a process chart showing a conventional method for manufacturing a porous piezoelectric element.
【図５】従来の製造方法における混合粉の混合状態を示
す図である。FIG. 5 is a diagram showing a mixed state of a mixed powder in a conventional production method.
２は圧電材料粉、３は空孔形成材、４は粘結材、５はス
ラリー、６はスラリー粒、７は複合粉体、１０は乾燥チ
ャンバ、１１はスラリー容器、１２は送液ポンプ、１３
は圧搾空気源、１４は熱風、１５はノズル、１６はサイ
クロン、１８は排気ポンプである。2 is a piezoelectric material powder, 3 is a pore forming material, 4 is a binder, 5 is a slurry, 6 is a slurry particle, 7 is a composite powder, 10 is a drying chamber, 11 is a slurry container, 12 is a liquid feed pump, 13
Is a compressed air source, 14 is hot air, 15 is a nozzle, 16 is a cyclone, and 18 is an exhaust pump.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) C04B 35/64 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) C04B 35/64
Claims (6)
形成材とを混合した混合液を、前記空孔形成材の気化温
度以下に温度設定された熱風中に圧搾空気とともに噴霧
して乾燥させ、前記空孔形成材の表面を圧電材料粉で被
覆した複合粉体を造粒した後、該複合粉体を成形した成
形体を空孔形成材の気化温度以上の温度で焼成すること
を特徴とする多孔質圧電素子の製造方法。1. A mixture of a piezoelectric material powder, a binder, and a heat-vaporizable pore-forming material is sprayed together with compressed air into hot air whose temperature is set to be equal to or lower than the vaporization temperature of the pore-forming material. After drying and granulating a composite powder in which the surface of the pore-forming material is coated with the piezoelectric material powder, the molded body formed from the composite powder is fired at a temperature equal to or higher than the vaporization temperature of the pore-forming material. A method for manufacturing a porous piezoelectric element.
とを特徴とする請求項１に記載の多孔質圧電素子の製造
方法。2. The method according to claim 1, wherein the piezoelectric material powder is Pb (Zr, Ti) O 3 .
ることを特徴とする請求項１に記載の多孔質圧電素子の
製造方法。3. The method according to claim 1, wherein a maximum particle size of the piezoelectric material powder is 1 μm.
０００℃であることを特徴とする請求項１に記載の多孔
質圧電素子の製造方法。4. The vaporization temperature of the pore-forming material is 200 to 1
The method for producing a porous piezoelectric element according to claim 1, wherein the temperature is 000 ° C.
のポリメチルメタクリレート樹脂球であることを特徴と
する請求項１に記載の多孔質圧電素子の製造方法。5. The porosity forming material has an average particle size of 2 to 30 μm.
The method for producing a porous piezoelectric element according to claim 1, wherein the polymethyl methacrylate resin sphere is used.
〜５％水溶液であることを特徴とする請求項１に記載の
多孔質圧電素子の製造方法。6. The binder according to claim 1, wherein the binder is polyvinyl alcohol.
The method for producing a porous piezoelectric element according to claim 1, wherein the aqueous solution is a 5% aqueous solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6283091A JP2994778B2 (en) | 1991-03-27 | 1991-03-27 | Method for manufacturing porous piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6283091A JP2994778B2 (en) | 1991-03-27 | 1991-03-27 | Method for manufacturing porous piezoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04300253A JPH04300253A (en) | 1992-10-23 |
| JP2994778B2 true JP2994778B2 (en) | 1999-12-27 |
Family
ID=13211631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6283091A Expired - Fee Related JP2994778B2 (en) | 1991-03-27 | 1991-03-27 | Method for manufacturing porous piezoelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2994778B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3817077A4 (en) | 2018-07-17 | 2022-07-06 | Kiyoshi Nagai | Porous piezoelectric material molded body, method of manufacturing same, and probe using said molded body |
-
1991
- 1991-03-27 JP JP6283091A patent/JP2994778B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04300253A (en) | 1992-10-23 |
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