JPH0429904Y2 - - Google Patents
Info
- Publication number
- JPH0429904Y2 JPH0429904Y2 JP15385188U JP15385188U JPH0429904Y2 JP H0429904 Y2 JPH0429904 Y2 JP H0429904Y2 JP 15385188 U JP15385188 U JP 15385188U JP 15385188 U JP15385188 U JP 15385188U JP H0429904 Y2 JPH0429904 Y2 JP H0429904Y2
- Authority
- JP
- Japan
- Prior art keywords
- fluorocarbon
- gas
- tank
- air pump
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 69
- 238000004140 cleaning Methods 0.000 claims description 24
- 238000011084 recovery Methods 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 16
- 239000002904 solvent Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000003507 refrigerant Substances 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000012046 mixed solvent Substances 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000013020 steam cleaning Methods 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15385188U JPH0429904Y2 (fr) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15385188U JPH0429904Y2 (fr) | 1988-11-25 | 1988-11-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0275188U JPH0275188U (fr) | 1990-06-08 |
| JPH0429904Y2 true JPH0429904Y2 (fr) | 1992-07-20 |
Family
ID=31430056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15385188U Expired JPH0429904Y2 (fr) | 1988-11-25 | 1988-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429904Y2 (fr) |
-
1988
- 1988-11-25 JP JP15385188U patent/JPH0429904Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0275188U (fr) | 1990-06-08 |
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