JPH0429562Y2 - - Google Patents

Info

Publication number
JPH0429562Y2
JPH0429562Y2 JP1983051404U JP5140483U JPH0429562Y2 JP H0429562 Y2 JPH0429562 Y2 JP H0429562Y2 JP 1983051404 U JP1983051404 U JP 1983051404U JP 5140483 U JP5140483 U JP 5140483U JP H0429562 Y2 JPH0429562 Y2 JP H0429562Y2
Authority
JP
Japan
Prior art keywords
wafer cassette
cassette
wafers
wafer
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983051404U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59158330U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5140483U priority Critical patent/JPS59158330U/ja
Publication of JPS59158330U publication Critical patent/JPS59158330U/ja
Application granted granted Critical
Publication of JPH0429562Y2 publication Critical patent/JPH0429562Y2/ja
Granted legal-status Critical Current

Links

JP5140483U 1983-04-07 1983-04-07 ウエハカセツト治具の支持装置 Granted JPS59158330U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5140483U JPS59158330U (ja) 1983-04-07 1983-04-07 ウエハカセツト治具の支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5140483U JPS59158330U (ja) 1983-04-07 1983-04-07 ウエハカセツト治具の支持装置

Publications (2)

Publication Number Publication Date
JPS59158330U JPS59158330U (ja) 1984-10-24
JPH0429562Y2 true JPH0429562Y2 (en:Method) 1992-07-17

Family

ID=30181812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5140483U Granted JPS59158330U (ja) 1983-04-07 1983-04-07 ウエハカセツト治具の支持装置

Country Status (1)

Country Link
JP (1) JPS59158330U (en:Method)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759345A (en) * 1980-09-26 1982-04-09 Mitsubishi Electric Corp Feeder for semiconductor substrate

Also Published As

Publication number Publication date
JPS59158330U (ja) 1984-10-24

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