JPH042856B2 - - Google Patents
Info
- Publication number
- JPH042856B2 JPH042856B2 JP59239002A JP23900284A JPH042856B2 JP H042856 B2 JPH042856 B2 JP H042856B2 JP 59239002 A JP59239002 A JP 59239002A JP 23900284 A JP23900284 A JP 23900284A JP H042856 B2 JPH042856 B2 JP H042856B2
- Authority
- JP
- Japan
- Prior art keywords
- air supply
- ceiling
- clean
- supply unit
- supply units
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59239002A JPS61116233A (ja) | 1984-11-12 | 1984-11-12 | 天井可変式クリ−ンル−ム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59239002A JPS61116233A (ja) | 1984-11-12 | 1984-11-12 | 天井可変式クリ−ンル−ム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61116233A JPS61116233A (ja) | 1986-06-03 |
JPH042856B2 true JPH042856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-01-21 |
Family
ID=17038432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59239002A Granted JPS61116233A (ja) | 1984-11-12 | 1984-11-12 | 天井可変式クリ−ンル−ム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61116233A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06347070A (ja) * | 1993-06-03 | 1994-12-20 | Shinryo Corp | 空調ユニット吊下式クリーンルーム |
JP2006186193A (ja) * | 2004-12-28 | 2006-07-13 | Nec Electronics Corp | 搬送室ユニット |
KR101214736B1 (ko) * | 2007-10-26 | 2012-12-21 | 파나소닉 주식회사 | 클린 룸 |
-
1984
- 1984-11-12 JP JP59239002A patent/JPS61116233A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61116233A (ja) | 1986-06-03 |