JPH0428022Y2 - - Google Patents
Info
- Publication number
- JPH0428022Y2 JPH0428022Y2 JP6216884U JP6216884U JPH0428022Y2 JP H0428022 Y2 JPH0428022 Y2 JP H0428022Y2 JP 6216884 U JP6216884 U JP 6216884U JP 6216884 U JP6216884 U JP 6216884U JP H0428022 Y2 JPH0428022 Y2 JP H0428022Y2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- detector chip
- resistive element
- support
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000012530 fluid Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 206010057040 Temperature intolerance Diseases 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000008543 heat sensitivity Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6216884U JPS60174835U (ja) | 1984-04-28 | 1984-04-28 | 感熱抵抗型流量検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6216884U JPS60174835U (ja) | 1984-04-28 | 1984-04-28 | 感熱抵抗型流量検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60174835U JPS60174835U (ja) | 1985-11-19 |
| JPH0428022Y2 true JPH0428022Y2 (US06534493-20030318-C00184.png) | 1992-07-07 |
Family
ID=30591124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6216884U Granted JPS60174835U (ja) | 1984-04-28 | 1984-04-28 | 感熱抵抗型流量検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60174835U (US06534493-20030318-C00184.png) |
-
1984
- 1984-04-28 JP JP6216884U patent/JPS60174835U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60174835U (ja) | 1985-11-19 |
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