JPH0427299B2 - - Google Patents
Info
- Publication number
- JPH0427299B2 JPH0427299B2 JP8809882A JP8809882A JPH0427299B2 JP H0427299 B2 JPH0427299 B2 JP H0427299B2 JP 8809882 A JP8809882 A JP 8809882A JP 8809882 A JP8809882 A JP 8809882A JP H0427299 B2 JPH0427299 B2 JP H0427299B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- electron beam
- plate
- etching step
- photosensitive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 56
- 239000000463 material Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 16
- 238000010894 electron beam technology Methods 0.000 claims description 15
- 229910001374 Invar Inorganic materials 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 7
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 11
- 238000005096 rolling process Methods 0.000 description 9
- 229910052742 iron Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 229910003271 Ni-Fe Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N ferric oxide Chemical compound O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8809882A JPS58207373A (ja) | 1982-05-26 | 1982-05-26 | エツチング方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8809882A JPS58207373A (ja) | 1982-05-26 | 1982-05-26 | エツチング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58207373A JPS58207373A (ja) | 1983-12-02 |
| JPH0427299B2 true JPH0427299B2 (cs) | 1992-05-11 |
Family
ID=13933386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8809882A Granted JPS58207373A (ja) | 1982-05-26 | 1982-05-26 | エツチング方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58207373A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0696786B2 (ja) * | 1989-08-11 | 1994-11-30 | 松下電工株式会社 | 配線回路形成装置 |
-
1982
- 1982-05-26 JP JP8809882A patent/JPS58207373A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58207373A (ja) | 1983-12-02 |
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