JPH0426456Y2 - - Google Patents

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Publication number
JPH0426456Y2
JPH0426456Y2 JP15887684U JP15887684U JPH0426456Y2 JP H0426456 Y2 JPH0426456 Y2 JP H0426456Y2 JP 15887684 U JP15887684 U JP 15887684U JP 15887684 U JP15887684 U JP 15887684U JP H0426456 Y2 JPH0426456 Y2 JP H0426456Y2
Authority
JP
Japan
Prior art keywords
ion implantation
vacuum
degree
implantation chamber
detection signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15887684U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6173671U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15887684U priority Critical patent/JPH0426456Y2/ja
Publication of JPS6173671U publication Critical patent/JPS6173671U/ja
Application granted granted Critical
Publication of JPH0426456Y2 publication Critical patent/JPH0426456Y2/ja
Expired legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
JP15887684U 1984-10-19 1984-10-19 Expired JPH0426456Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15887684U JPH0426456Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15887684U JPH0426456Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Publications (2)

Publication Number Publication Date
JPS6173671U JPS6173671U (enrdf_load_stackoverflow) 1986-05-19
JPH0426456Y2 true JPH0426456Y2 (enrdf_load_stackoverflow) 1992-06-25

Family

ID=30716843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15887684U Expired JPH0426456Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Country Status (1)

Country Link
JP (1) JPH0426456Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4680474A (en) * 1985-05-22 1987-07-14 Varian Associates, Inc. Method and apparatus for improved ion dose accuracy

Also Published As

Publication number Publication date
JPS6173671U (enrdf_load_stackoverflow) 1986-05-19

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