JPS6173671U - - Google Patents

Info

Publication number
JPS6173671U
JPS6173671U JP15887684U JP15887684U JPS6173671U JP S6173671 U JPS6173671 U JP S6173671U JP 15887684 U JP15887684 U JP 15887684U JP 15887684 U JP15887684 U JP 15887684U JP S6173671 U JPS6173671 U JP S6173671U
Authority
JP
Japan
Prior art keywords
ion implantation
vacuum
communication path
detection signal
opening degree
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15887684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0426456Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15887684U priority Critical patent/JPH0426456Y2/ja
Publication of JPS6173671U publication Critical patent/JPS6173671U/ja
Application granted granted Critical
Publication of JPH0426456Y2 publication Critical patent/JPH0426456Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP15887684U 1984-10-19 1984-10-19 Expired JPH0426456Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15887684U JPH0426456Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15887684U JPH0426456Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Publications (2)

Publication Number Publication Date
JPS6173671U true JPS6173671U (enrdf_load_stackoverflow) 1986-05-19
JPH0426456Y2 JPH0426456Y2 (enrdf_load_stackoverflow) 1992-06-25

Family

ID=30716843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15887684U Expired JPH0426456Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Country Status (1)

Country Link
JP (1) JPH0426456Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61271739A (ja) * 1985-05-22 1986-12-02 バリアン・アソシエイツ・インコ−ポレイテツド イオンド−ズ量の精度を改善するための方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61271739A (ja) * 1985-05-22 1986-12-02 バリアン・アソシエイツ・インコ−ポレイテツド イオンド−ズ量の精度を改善するための方法および装置

Also Published As

Publication number Publication date
JPH0426456Y2 (enrdf_load_stackoverflow) 1992-06-25

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