JPS62166627U - - Google Patents

Info

Publication number
JPS62166627U
JPS62166627U JP5507486U JP5507486U JPS62166627U JP S62166627 U JPS62166627 U JP S62166627U JP 5507486 U JP5507486 U JP 5507486U JP 5507486 U JP5507486 U JP 5507486U JP S62166627 U JPS62166627 U JP S62166627U
Authority
JP
Japan
Prior art keywords
plasma
vacuum
ions
gas inlet
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5507486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5507486U priority Critical patent/JPS62166627U/ja
Publication of JPS62166627U publication Critical patent/JPS62166627U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Drying Of Semiconductors (AREA)
JP5507486U 1986-04-11 1986-04-11 Pending JPS62166627U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5507486U JPS62166627U (enrdf_load_stackoverflow) 1986-04-11 1986-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5507486U JPS62166627U (enrdf_load_stackoverflow) 1986-04-11 1986-04-11

Publications (1)

Publication Number Publication Date
JPS62166627U true JPS62166627U (enrdf_load_stackoverflow) 1987-10-22

Family

ID=30882649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5507486U Pending JPS62166627U (enrdf_load_stackoverflow) 1986-04-11 1986-04-11

Country Status (1)

Country Link
JP (1) JPS62166627U (enrdf_load_stackoverflow)

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