JPH0426234B2 - - Google Patents
Info
- Publication number
- JPH0426234B2 JPH0426234B2 JP59051991A JP5199184A JPH0426234B2 JP H0426234 B2 JPH0426234 B2 JP H0426234B2 JP 59051991 A JP59051991 A JP 59051991A JP 5199184 A JP5199184 A JP 5199184A JP H0426234 B2 JPH0426234 B2 JP H0426234B2
- Authority
- JP
- Japan
- Prior art keywords
- optical
- thin film
- light
- amorphous silicon
- silicon thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 65
- 239000010409 thin film Substances 0.000 claims description 32
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 description 33
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000615 nonconductor Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000005676 thermoelectric effect Effects 0.000 description 2
- 229910019942 S—Ge Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/023—Mount members, e.g. sub-mount members
- H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59051991A JPS60195985A (ja) | 1984-03-16 | 1984-03-16 | 光電変換器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59051991A JPS60195985A (ja) | 1984-03-16 | 1984-03-16 | 光電変換器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60195985A JPS60195985A (ja) | 1985-10-04 |
| JPH0426234B2 true JPH0426234B2 (ko) | 1992-05-06 |
Family
ID=12902318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59051991A Granted JPS60195985A (ja) | 1984-03-16 | 1984-03-16 | 光電変換器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60195985A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62251707A (ja) * | 1986-04-24 | 1987-11-02 | Fujitsu Ltd | 光受動部品 |
| JP2572050B2 (ja) * | 1986-11-05 | 1997-01-16 | シャープ株式会社 | 導波路型光ヘツド |
| JP3470016B2 (ja) * | 1997-07-31 | 2003-11-25 | 京セラ株式会社 | 光集積回路基板の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5749288A (en) * | 1980-09-09 | 1982-03-23 | Toshiba Corp | Photo hybrid integrated circuit |
-
1984
- 1984-03-16 JP JP59051991A patent/JPS60195985A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5749288A (en) * | 1980-09-09 | 1982-03-23 | Toshiba Corp | Photo hybrid integrated circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60195985A (ja) | 1985-10-04 |
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