JPH0425706Y2 - - Google Patents
Info
- Publication number
- JPH0425706Y2 JPH0425706Y2 JP17021088U JP17021088U JPH0425706Y2 JP H0425706 Y2 JPH0425706 Y2 JP H0425706Y2 JP 17021088 U JP17021088 U JP 17021088U JP 17021088 U JP17021088 U JP 17021088U JP H0425706 Y2 JPH0425706 Y2 JP H0425706Y2
- Authority
- JP
- Japan
- Prior art keywords
- cup
- cleaning
- vacuum chuck
- developed
- cleaning liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 12
- 239000000126 substance Substances 0.000 description 6
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17021088U JPH0425706Y2 (US06826419-20041130-M00005.png) | 1988-12-30 | 1988-12-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17021088U JPH0425706Y2 (US06826419-20041130-M00005.png) | 1988-12-30 | 1988-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0290846U JPH0290846U (US06826419-20041130-M00005.png) | 1990-07-18 |
| JPH0425706Y2 true JPH0425706Y2 (US06826419-20041130-M00005.png) | 1992-06-19 |
Family
ID=31460958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17021088U Expired JPH0425706Y2 (US06826419-20041130-M00005.png) | 1988-12-30 | 1988-12-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425706Y2 (US06826419-20041130-M00005.png) |
-
1988
- 1988-12-30 JP JP17021088U patent/JPH0425706Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0290846U (US06826419-20041130-M00005.png) | 1990-07-18 |
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