JPH0424312B2 - - Google Patents
Info
- Publication number
- JPH0424312B2 JPH0424312B2 JP57112402A JP11240282A JPH0424312B2 JP H0424312 B2 JPH0424312 B2 JP H0424312B2 JP 57112402 A JP57112402 A JP 57112402A JP 11240282 A JP11240282 A JP 11240282A JP H0424312 B2 JPH0424312 B2 JP H0424312B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- oxide
- ceramic member
- oxygen
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052751 metal Inorganic materials 0.000 claims description 44
- 239000002184 metal Substances 0.000 claims description 44
- 239000000919 ceramic Substances 0.000 claims description 34
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 22
- 239000001301 oxygen Substances 0.000 claims description 22
- 229910052760 oxygen Inorganic materials 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 19
- 229910052575 non-oxide ceramic Inorganic materials 0.000 claims description 16
- 239000011225 non-oxide ceramic Substances 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 9
- 230000005496 eutectics Effects 0.000 claims description 7
- 150000004706 metal oxides Chemical class 0.000 claims description 7
- 239000006023 eutectic alloy Substances 0.000 claims description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims description 6
- 238000005304 joining Methods 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 239000011230 binding agent Substances 0.000 description 18
- 239000010410 layer Substances 0.000 description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OMSFUHVZHUZHAW-UHFFFAOYSA-N [Ag].[Mo] Chemical compound [Ag].[Mo] OMSFUHVZHUZHAW-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(i) oxide Chemical compound [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 description 1
- -1 etc. alone Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
Landscapes
- Pressure Welding/Diffusion-Bonding (AREA)
- Ceramic Products (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11240282A JPS593077A (ja) | 1982-06-29 | 1982-06-29 | セラミツク部材と金属との接合方法 |
| EP83106245A EP0097944B1 (fr) | 1982-06-29 | 1983-06-27 | Procédé pour la liaison directe des pièces céramiques et métalliques et produits stratifiés ainsi obtenus |
| DE8383106245T DE3376829D1 (en) | 1982-06-29 | 1983-06-27 | Method for directly bonding ceramic and metal members and laminated body of the same |
| US06/697,874 US4693409A (en) | 1982-06-29 | 1985-02-04 | Method for directly bonding ceramic and metal members and laminated body of the same |
| US07/041,335 US4849292A (en) | 1982-06-29 | 1987-04-22 | Method for directly bonding ceramic and metal members and laminated body of the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11240282A JPS593077A (ja) | 1982-06-29 | 1982-06-29 | セラミツク部材と金属との接合方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32571489A Division JPH02199075A (ja) | 1989-12-15 | 1989-12-15 | セラミックス―金属接合体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS593077A JPS593077A (ja) | 1984-01-09 |
| JPH0424312B2 true JPH0424312B2 (fr) | 1992-04-24 |
Family
ID=14585753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11240282A Granted JPS593077A (ja) | 1982-06-29 | 1982-06-29 | セラミツク部材と金属との接合方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS593077A (fr) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59190279A (ja) * | 1983-04-13 | 1984-10-29 | 株式会社東芝 | セラミツクス構造体及びその製造方法 |
| JPS60171277A (ja) * | 1984-02-17 | 1985-09-04 | 株式会社東芝 | 金属−セラミツクス接合体 |
| JPS6132752A (ja) * | 1984-07-25 | 1986-02-15 | 松下電工株式会社 | セラミツクス回路板の製法 |
| JPS61291463A (ja) * | 1985-06-17 | 1986-12-22 | 日本特殊陶業株式会社 | 高靭性セラミツク工具用材料 |
| JP3011433B2 (ja) * | 1990-05-25 | 2000-02-21 | 株式会社東芝 | セラミックス回路基板の製造方法 |
| US5863113A (en) * | 1993-06-22 | 1999-01-26 | Mitsubishi Rayon Co., Ltd. | Plane light source unit |
| JP2764711B2 (ja) * | 1996-07-10 | 1998-06-11 | 株式会社オーデン | 空気清浄機 |
| JP2001168250A (ja) * | 1999-12-10 | 2001-06-22 | Sumitomo Electric Ind Ltd | 半導体用絶縁基板およびそれを用いた半導体装置並びに該基板の製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5075208A (fr) * | 1973-11-07 | 1975-06-20 | ||
| JPS5237914A (en) * | 1975-07-30 | 1977-03-24 | Gen Electric | Method of directly combining metal to ceramics and metal |
| JPS58145669A (ja) * | 1982-02-18 | 1983-08-30 | 株式会社明電舎 | セラミツクスと銅の接合方法 |
-
1982
- 1982-06-29 JP JP11240282A patent/JPS593077A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5075208A (fr) * | 1973-11-07 | 1975-06-20 | ||
| JPS5237914A (en) * | 1975-07-30 | 1977-03-24 | Gen Electric | Method of directly combining metal to ceramics and metal |
| JPS58145669A (ja) * | 1982-02-18 | 1983-08-30 | 株式会社明電舎 | セラミツクスと銅の接合方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS593077A (ja) | 1984-01-09 |
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