JPH04236365A - Board inspecting apparatus - Google Patents
Board inspecting apparatusInfo
- Publication number
- JPH04236365A JPH04236365A JP3004924A JP492491A JPH04236365A JP H04236365 A JPH04236365 A JP H04236365A JP 3004924 A JP3004924 A JP 3004924A JP 492491 A JP492491 A JP 492491A JP H04236365 A JPH04236365 A JP H04236365A
- Authority
- JP
- Japan
- Prior art keywords
- electric field
- pattern
- probe
- wiring pattern
- field sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005684 electric field Effects 0.000 claims abstract description 30
- 239000000523 sample Substances 0.000 claims abstract description 26
- 239000013307 optical fiber Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 10
- 238000007689 inspection Methods 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は基板検査装置に関し、特
に、絶縁基板に形成される配線パターンの導通絶縁検査
において使用される基板検査装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a board inspection apparatus, and more particularly to a board inspection apparatus used for testing continuity and insulation of wiring patterns formed on an insulating substrate.
【0002】0002
【従来の技術】従来の基板検査装置は図2に示すように
、配線パターン9の配線パターン端130,131にそ
れぞれ接触するプローブ41,42を有する抵抗計8と
、プローブ41,42の位置決めをそれぞれ行なう位置
決め部20,21と、抵抗計8、位置決め部20,21
を制御する制御部1から構成されている。2. Description of the Related Art As shown in FIG. 2, a conventional circuit board inspection apparatus includes a resistance meter 8 having probes 41 and 42 that contact wiring pattern ends 130 and 131 of a wiring pattern 9, respectively, and the positioning of the probes 41 and 42. Positioning sections 20 and 21, resistance meter 8, and positioning sections 20 and 21, respectively.
It is composed of a control section 1 that controls.
【0003】一般に、基板検査ではプローブを同時に同
一、あるいは隣接の配線パターンに接触させ、プローブ
相互の導通、非導通を測定する。ここに示す従来の装置
では任意の配線パターン9の配線パターン端132,1
33の間の抵抗を抵抗計8で測定し導通,非導通を測定
している。このとき制御部1にあらかじめ記憶された手
順に従いプローブ41,42を位置決め部20,21に
より移動させ基板11に形成された全ての配線パターン
の導通,非導通の検査を行う。このとき、導通検査を実
現するためには確実なプローブと配線パターン端間の確
実な接触を実現することが重要である。しかし、まだ十
分な強度をもたない製造プロセス中の配線パターン端や
、プローブの傷をつけることが許されないコネクタ端子
で、従来の検査装置の適用は困難である。Generally, in board inspection, probes are brought into contact with the same or adjacent wiring patterns at the same time, and conduction or non-conduction between the probes is measured. In the conventional device shown here, the wiring pattern ends 132, 1 of any wiring pattern 9
The resistance between 33 and 33 is measured with a resistance meter 8 to determine continuity or non-continuity. At this time, the probes 41 and 42 are moved by the positioning sections 20 and 21 in accordance with a procedure stored in advance in the control section 1, and all wiring patterns formed on the substrate 11 are inspected for continuity or non-continuity. At this time, in order to perform a continuity test, it is important to achieve reliable contact between the probe and the end of the wiring pattern. However, it is difficult to apply conventional inspection equipment to the ends of wiring patterns that are still in the manufacturing process and do not have sufficient strength, or to connector terminals that cannot be damaged by probes.
【0004】0004
【発明が解決しようとする課題】上述した従来の基板検
査は確実な配線パターン端とプローブ間の接触を保証す
るため鋭利なプローブを使用する必要があり、配線パタ
ーン端を傷つけるという欠点がある。The conventional board inspection described above requires the use of a sharp probe to ensure reliable contact between the wiring pattern ends and the probes, which has the disadvantage of damaging the wiring pattern ends.
【0005】[0005]
【課題を解決するための手段】本発明の基板検査装置は
、被検査基板に形成された配線パターンの一方に接触す
るプローブと、前記プローブの位置決めを行う第一の位
置決め手段と、前記被検査基板に隣接して配置される電
極板と、前記プローブと電極板間に電圧を加える手段と
、前記配線パターンの他端の近傍に配置される電界セン
サと、前記電界センサの位置決めを行う第二の位置決め
手段と、前記電界センサに光ファイバを介してレーザ光
を供給する手段と、前記電界センサよりレーザ光を受光
する受光器とを具備することを特徴とする。[Means for Solving the Problems] A board inspection apparatus of the present invention comprises: a probe that contacts one side of a wiring pattern formed on a board to be inspected; a first positioning means for positioning the probe; and a first positioning means for positioning the probe; an electrode plate disposed adjacent to the substrate; means for applying voltage between the probe and the electrode plate; an electric field sensor disposed near the other end of the wiring pattern; and a second electrode plate for positioning the electric field sensor. The electric field sensor is characterized by comprising a positioning means, a means for supplying laser light to the electric field sensor via an optical fiber, and a light receiver for receiving the laser light from the electric field sensor.
【0006】[0006]
【実施例】次に、本発明の実施例について、図面を参照
して詳細に説明する。図1は本発明の一実施例を示すブ
ロック図である。Embodiments Next, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a block diagram showing one embodiment of the present invention.
【0007】被検査基板11に形成された配線パターン
9の配線パターン端131に制御部1の指示に従って、
位置決め部21によりプローブ40を接触させる。被検
査基板11に隣接して配置されている電極板10との間
に電圧源5により電圧を加える。この結果、配線パター
ン9さらには配線パターン端130との間に電界(電気
力線)が生じる。ここで、電界センサ3を制御部1の指
示に従い位置決め部20により配線パターン端130に
隣接して位置決めする。電界センサ3としては例えば、
センサ応用技術便覧(工学技術センタ発行)の231ペ
ージに記載されているものがある。電界センサ3には光
ファイバ122を介してレーザ装置7よりレーザ光が供
給されている。電界センサ3は電界中に配置されると供
給されたレーザ光を偏光させ、さらに強度変化を生じさ
せる。電界の大きさに応じた強度変化を受けたレーザ光
は光ファイバ121を介して受光器6に導かれる。受光
器6ではレーザ光の強度変化、つまり配線パターン端1
30での電界の存在を捕らえることができる。もし、配
線パターン9に断線があれば配線パターン端130に電
界は届かず、電界センサ3は電界中にはなく、受光器6
は変化を捕らえない。電界センサ3は配線パターン端1
30に接触させる必要はなく、言い替えれば脆弱な配線
パターン130に損傷を与えることはない。According to the instructions from the control section 1, the wiring pattern end 131 of the wiring pattern 9 formed on the substrate to be inspected 11 is
The probe 40 is brought into contact with the positioning portion 21 . A voltage source 5 applies a voltage between the substrate 11 to be inspected and an electrode plate 10 disposed adjacent to the substrate 11 to be inspected. As a result, an electric field (lines of electric force) is generated between the wiring pattern 9 and the wiring pattern end 130. Here, the electric field sensor 3 is positioned adjacent to the wiring pattern end 130 by the positioning section 20 according to instructions from the control section 1. For example, as the electric field sensor 3,
There is one described on page 231 of the Sensor Application Technology Handbook (published by the Engineering Technology Center). Laser light is supplied to the electric field sensor 3 from a laser device 7 via an optical fiber 122. When the electric field sensor 3 is placed in an electric field, it polarizes the supplied laser light and further causes an intensity change. The laser light whose intensity has been changed according to the magnitude of the electric field is guided to the light receiver 6 via the optical fiber 121. The light receiver 6 detects changes in the intensity of the laser beam, that is, the wiring pattern end 1.
The presence of an electric field at 30 can be captured. If there is a break in the wiring pattern 9, the electric field will not reach the wiring pattern end 130, the electric field sensor 3 will not be in the electric field, and the light receiver 6
does not capture change. Electric field sensor 3 is connected to wiring pattern end 1
30, in other words, the fragile wiring pattern 130 will not be damaged.
【0008】[0008]
【発明の効果】本発明の基板検査装置は、鋭利なプロー
ブを接続させ抵抗を測定する替わりに配線パターン端に
生じる電界を電界センサにより検出し、その導通を確認
することが出来るので配線パターン端にプローブを接触
する必要がなくなるので、脆弱な配線パターン端も損傷
を与えることなく検査できるという効果を奏する。[Effects of the Invention] Instead of connecting a sharp probe and measuring resistance, the board inspection device of the present invention detects the electric field generated at the end of the wiring pattern using an electric field sensor, and can confirm continuity. Since it is no longer necessary to touch the probe with the probe, the end of the wiring pattern, which is fragile, can be inspected without being damaged.
【図1】本発明の一実施例を示すブロック図である。FIG. 1 is a block diagram showing one embodiment of the present invention.
【図2】従来の一例を示すブロック図である。FIG. 2 is a block diagram showing a conventional example.
1 制御部 20 位置決め部 21 位置決め部 3 電界センサ 40 プローブ 41 プローブ 42 プローブ 5 電圧源 6 受光器 7 レーザ装置 8 抵抗計 9 配線パターン 10 電極板 11 基板 121 光ファイバ 122 光ファイバ 130 脆弱な配線パターン端 131 配線パターン端 132 配線パターン端 133 配線パターン端 1 Control section 20 Positioning part 21 Positioning part 3 Electric field sensor 40 Probe 41 Probe 42 Probe 5 Voltage source 6 Photo receiver 7 Laser device 8 Resistance meter 9 Wiring pattern 10 Electrode plate 11 Substrate 121 Optical fiber 122 Optical fiber 130 Weak wiring pattern edge 131 Wiring pattern end 132 Wiring pattern end 133 Wiring pattern end
Claims (1)
の一方に接触するプローブと、前記プローブの位置決め
を行う第一の位置決め手段と、前記被検査基板に隣接し
て配置される電極板と、前記プローブと電極板間に電圧
を加える手段と、前記配線パターンの他端の近傍に配置
される電界センサと、前記電界センサの位置決めを行う
第二の位置決め手段と、前記電界センサに光ファイバを
介してレーザ光を供給する手段と、前記電界センサより
レーザ光を受光する受光器とを具備することを特徴とす
る基板検査装置。1. A probe that contacts one side of a wiring pattern formed on a substrate to be inspected, first positioning means for positioning the probe, and an electrode plate disposed adjacent to the substrate to be inspected. means for applying a voltage between the probe and the electrode plate; an electric field sensor disposed near the other end of the wiring pattern; a second positioning means for positioning the electric field sensor; and an optical fiber connected to the electric field sensor. 1. A substrate inspection apparatus comprising: means for supplying laser light through the electric field sensor; and a light receiver that receives the laser light from the electric field sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3004924A JPH04236365A (en) | 1991-01-21 | 1991-01-21 | Board inspecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3004924A JPH04236365A (en) | 1991-01-21 | 1991-01-21 | Board inspecting apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04236365A true JPH04236365A (en) | 1992-08-25 |
Family
ID=11597157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3004924A Pending JPH04236365A (en) | 1991-01-21 | 1991-01-21 | Board inspecting apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04236365A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6201398B1 (en) | 1996-03-28 | 2001-03-13 | Oht Inc. | Non-contact board inspection probe |
US7239127B2 (en) * | 1998-08-07 | 2007-07-03 | Oht Inc. | Apparatus and method for inspecting electronic circuits |
-
1991
- 1991-01-21 JP JP3004924A patent/JPH04236365A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6201398B1 (en) | 1996-03-28 | 2001-03-13 | Oht Inc. | Non-contact board inspection probe |
US6373258B2 (en) | 1996-03-28 | 2002-04-16 | Naoya Takada | Non-contact board inspection probe |
US7239127B2 (en) * | 1998-08-07 | 2007-07-03 | Oht Inc. | Apparatus and method for inspecting electronic circuits |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2994259B2 (en) | Substrate inspection method and substrate inspection device | |
US5969530A (en) | Circuit board inspection apparatus and method employing a rapidly changing electrical parameter signal | |
JPH04236365A (en) | Board inspecting apparatus | |
JP2005315775A (en) | Four-terminal inspection method and four-terminal inspection jig using single-sided transfer probe | |
JP2019056578A (en) | Circuit board inspection device | |
JP2865046B2 (en) | Method and apparatus for inspecting solder connection of electronic components | |
JP2735048B2 (en) | Method and apparatus for inspecting solder connection of electronic components | |
JPH1164428A (en) | Component inspection device | |
DE60107881D1 (en) | DEVICE AND METHOD FOR TESTING UNPROCESSED PRINTED CIRCUITS | |
JP2767291B2 (en) | Inspection device | |
JPS6119142A (en) | Testing device for semiconductor device | |
SU1691786A1 (en) | Pcbs testing method | |
JP2000097983A (en) | Method for inspecting wiring part in wiring integrated type suspension | |
JPH0815361A (en) | Inspection method for printed wiring board | |
JP3524049B2 (en) | Wiring pattern inspection method | |
JPH05347335A (en) | Probe card | |
JPH10190181A (en) | Printed board and its inspecting method | |
JP2002014131A (en) | Method and device for inspecting circuit board | |
JPH0772209A (en) | Probe for detecting component on circuit board | |
JPH1090359A (en) | Waveform probe apparatus and inspection method using it | |
JPH04355378A (en) | Confirmation of contact probe | |
JPS59206776A (en) | Method and apparatus for testing printed circuit board | |
JP2004144759A (en) | Inspection device and inspection method | |
JPH0474972A (en) | Optical inspection method and apparatus for printed circuit board | |
JPH04125475A (en) | Method and device for optical inspection of printed wiring board |