JPH0423551Y2 - - Google Patents
Info
- Publication number
- JPH0423551Y2 JPH0423551Y2 JP1987135349U JP13534987U JPH0423551Y2 JP H0423551 Y2 JPH0423551 Y2 JP H0423551Y2 JP 1987135349 U JP1987135349 U JP 1987135349U JP 13534987 U JP13534987 U JP 13534987U JP H0423551 Y2 JPH0423551 Y2 JP H0423551Y2
- Authority
- JP
- Japan
- Prior art keywords
- water
- pipe
- branch pipe
- tip
- human body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Massaging Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135349U JPH0423551Y2 (enrdf_load_stackoverflow) | 1987-09-04 | 1987-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135349U JPH0423551Y2 (enrdf_load_stackoverflow) | 1987-09-04 | 1987-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6439728U JPS6439728U (enrdf_load_stackoverflow) | 1989-03-09 |
| JPH0423551Y2 true JPH0423551Y2 (enrdf_load_stackoverflow) | 1992-06-02 |
Family
ID=31394893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987135349U Expired JPH0423551Y2 (enrdf_load_stackoverflow) | 1987-09-04 | 1987-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0423551Y2 (enrdf_load_stackoverflow) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2563920Y2 (ja) * | 1992-03-30 | 1998-03-04 | 株式会社イナックス | 浴槽用ノズル |
| JP3510993B2 (ja) | 1999-12-10 | 2004-03-29 | トーカロ株式会社 | プラズマ処理容器内部材およびその製造方法 |
| US6798519B2 (en) | 2002-09-30 | 2004-09-28 | Tokyo Electron Limited | Method and apparatus for an improved optical window deposition shield in a plasma processing system |
| US6837966B2 (en) | 2002-09-30 | 2005-01-04 | Tokyo Electron Limeted | Method and apparatus for an improved baffle plate in a plasma processing system |
| US7166200B2 (en) | 2002-09-30 | 2007-01-23 | Tokyo Electron Limited | Method and apparatus for an improved upper electrode plate in a plasma processing system |
| US7147749B2 (en) | 2002-09-30 | 2006-12-12 | Tokyo Electron Limited | Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system |
| US7137353B2 (en) | 2002-09-30 | 2006-11-21 | Tokyo Electron Limited | Method and apparatus for an improved deposition shield in a plasma processing system |
| US7204912B2 (en) | 2002-09-30 | 2007-04-17 | Tokyo Electron Limited | Method and apparatus for an improved bellows shield in a plasma processing system |
| US7166166B2 (en) | 2002-09-30 | 2007-01-23 | Tokyo Electron Limited | Method and apparatus for an improved baffle plate in a plasma processing system |
| US7780786B2 (en) | 2002-11-28 | 2010-08-24 | Tokyo Electron Limited | Internal member of a plasma processing vessel |
| JP4597972B2 (ja) | 2003-03-31 | 2010-12-15 | 東京エレクトロン株式会社 | 処理部材上に隣接するコーティングを接合する方法。 |
| KR101016913B1 (ko) | 2003-03-31 | 2011-02-22 | 도쿄엘렉트론가부시키가이샤 | 처리요소용 배리어층 및 그의 형성방법 |
| US7552521B2 (en) | 2004-12-08 | 2009-06-30 | Tokyo Electron Limited | Method and apparatus for improved baffle plate |
| US7601242B2 (en) | 2005-01-11 | 2009-10-13 | Tokyo Electron Limited | Plasma processing system and baffle assembly for use in plasma processing system |
| WO2007013184A1 (ja) | 2005-07-29 | 2007-02-01 | Tocalo Co., Ltd. | Y2o3溶射皮膜被覆部材およびその製造方法 |
| JP4571561B2 (ja) | 2005-09-08 | 2010-10-27 | トーカロ株式会社 | 耐プラズマエロージョン性に優れる溶射皮膜被覆部材およびその製造方法 |
| US7850864B2 (en) | 2006-03-20 | 2010-12-14 | Tokyo Electron Limited | Plasma treating apparatus and plasma treating method |
| US7648782B2 (en) | 2006-03-20 | 2010-01-19 | Tokyo Electron Limited | Ceramic coating member for semiconductor processing apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6180026U (enrdf_load_stackoverflow) * | 1984-10-30 | 1986-05-28 | ||
| JPS624329U (enrdf_load_stackoverflow) * | 1985-06-25 | 1987-01-12 |
-
1987
- 1987-09-04 JP JP1987135349U patent/JPH0423551Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6439728U (enrdf_load_stackoverflow) | 1989-03-09 |
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