JPH0423317Y2 - - Google Patents

Info

Publication number
JPH0423317Y2
JPH0423317Y2 JP1983104847U JP10484783U JPH0423317Y2 JP H0423317 Y2 JPH0423317 Y2 JP H0423317Y2 JP 1983104847 U JP1983104847 U JP 1983104847U JP 10484783 U JP10484783 U JP 10484783U JP H0423317 Y2 JPH0423317 Y2 JP H0423317Y2
Authority
JP
Japan
Prior art keywords
wafer
cassette
clamper
reference protrusion
notch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983104847U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6013738U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10484783U priority Critical patent/JPS6013738U/ja
Publication of JPS6013738U publication Critical patent/JPS6013738U/ja
Application granted granted Critical
Publication of JPH0423317Y2 publication Critical patent/JPH0423317Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP10484783U 1983-07-06 1983-07-06 ウエハカセツト Granted JPS6013738U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10484783U JPS6013738U (ja) 1983-07-06 1983-07-06 ウエハカセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10484783U JPS6013738U (ja) 1983-07-06 1983-07-06 ウエハカセツト

Publications (2)

Publication Number Publication Date
JPS6013738U JPS6013738U (ja) 1985-01-30
JPH0423317Y2 true JPH0423317Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-29

Family

ID=30246015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10484783U Granted JPS6013738U (ja) 1983-07-06 1983-07-06 ウエハカセツト

Country Status (1)

Country Link
JP (1) JPS6013738U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1399371A (en) * 1972-03-15 1975-07-02 Int Computers Ltd Image display apparatus
JPS5472477U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-10-31 1979-05-23

Also Published As

Publication number Publication date
JPS6013738U (ja) 1985-01-30

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