JPH04229827A - Liquid crystal display device - Google Patents

Liquid crystal display device

Info

Publication number
JPH04229827A
JPH04229827A JP3095731A JP9573191A JPH04229827A JP H04229827 A JPH04229827 A JP H04229827A JP 3095731 A JP3095731 A JP 3095731A JP 9573191 A JP9573191 A JP 9573191A JP H04229827 A JPH04229827 A JP H04229827A
Authority
JP
Japan
Prior art keywords
electrode
liquid crystal
light
shielding film
crystal display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3095731A
Other languages
Japanese (ja)
Inventor
Koji Anada
幸治 穴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP3095731A priority Critical patent/JPH04229827A/en
Publication of JPH04229827A publication Critical patent/JPH04229827A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve the opening rate of a liquid crystal display for a thin-film transistor. CONSTITUTION:This liquid crystal display is a matrix circuit network made up of setting up plural thin-film transistors(TFT) and a display electrode 35 connected to this TFT on an insulating substrate, and it is superposed on a peripheral edge of the display electrode 35 at an interval between a drain line or a wiring electrode for the said TFT and this display electrode 35, then a shade film 32 is installed in a layer different from the drain line.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、液晶表示装置に関し、
特に遮光膜を有した液晶表示装置に関するものである。
[Industrial Application Field] The present invention relates to a liquid crystal display device.
In particular, the present invention relates to a liquid crystal display device having a light shielding film.

【0002】0002

【従来の技術】近年、薄膜トランジスタを用いたアクテ
ィブマトリックス型の液晶表示装置が実用化され、また
この研究が盛んに行われている。遮光膜は、対向電極基
板に形成されるのが一般的である。しかし液晶表示装置
を斜めから見た場合、視差を生じて透過光が目視され、
遮光膜本来の効果、所謂ブラックマトリックス効果(色
画素間の分離を行うことによる混色の回避)が失われる
ことがある。
2. Description of the Related Art In recent years, active matrix type liquid crystal display devices using thin film transistors have been put into practical use, and research on this device has been actively conducted. The light shielding film is generally formed on the counter electrode substrate. However, when viewing a liquid crystal display device from an angle, parallax occurs and the transmitted light is visible.
The original effect of the light shielding film, the so-called black matrix effect (avoiding color mixture by separating color pixels), may be lost.

【0003】この問題を解決するために、前述した構成
と逆に遮光膜をTFT基板上に形成する構成がある。例
えば図3、図4が遮光膜をTFT基板上に構成したもの
であり、図3は液晶表示装置の平面図であり、図4は図
3のA−A線による断面図である。図3からも明らかな
ように、半導体素子(10)アレーおよび表示電極(1
1)は、複数の信号線(12)………と複数の走査線(
13)……との交差部に配置され、画像信号を表示電極
(11)に印加するためのドレイン電極(14)および
ソース電極(15)、走査線と連続したゲート電極(1
6)が設けられている。
In order to solve this problem, there is a structure in which a light-shielding film is formed on the TFT substrate, which is the opposite of the above-described structure. For example, FIGS. 3 and 4 show a structure in which a light-shielding film is formed on a TFT substrate, FIG. 3 is a plan view of a liquid crystal display device, and FIG. 4 is a cross-sectional view taken along line A--A in FIG. 3. As is clear from FIG. 3, the semiconductor element (10) array and the display electrode (10)
1) consists of multiple signal lines (12) and multiple scanning lines (
13)..., a drain electrode (14) and a source electrode (15) for applying an image signal to the display electrode (11), and a gate electrode (15) that is continuous with the scanning line.
6) is provided.

【0004】また図4からも明らかなように、光を透過
する基板、例えばガラス基板(17)に、まず前記ゲー
ト電極(16)が設けられ、この基板全面に設けられた
ゲート絶縁膜(18)上に半導体活性層(19)が設け
られ、更に表示電極(11)と半導体層(19)を接続
するソース電極(15)、信号線と接続されるドレイン
電極(14)が形成され、絶縁膜上に図3の斜線領域で
示された遮光膜(20)が形成されている。
Further, as is clear from FIG. 4, the gate electrode (16) is first provided on a light-transmitting substrate, for example, a glass substrate (17), and the gate insulating film (18) is provided on the entire surface of the substrate. ) is provided with a semiconductor active layer (19), and furthermore, a source electrode (15) that connects the display electrode (11) and the semiconductor layer (19), and a drain electrode (14) that is connected to the signal line are formed. A light shielding film (20) shown in the shaded area in FIG. 3 is formed on the film.

【0005】[0005]

【発明が解決しようとする課題】前述の構成によれば、
TFT(10)上に遮光膜(20)を形成するため、こ
のTFTの特性変化等を配慮から、前記遮光膜の選定を
しなければならない問題があった。また遮光膜(20)
下に設けられる絶縁膜は、短絡や容量形成のために厚く
設ける必要があるが、この絶縁膜の下層に表示電極が設
けられているために、液晶に印加される電圧の低下を招
いてしまう問題があった。
[Problem to be Solved by the Invention] According to the above configuration,
Since the light-shielding film (20) is formed on the TFT (10), there is a problem in that the light-shielding film must be selected in consideration of changes in the characteristics of the TFT. Also, light shielding film (20)
The insulating film provided below needs to be thick to prevent short circuits and form capacitance, but since the display electrodes are provided below this insulating film, this causes a drop in the voltage applied to the liquid crystal. There was a problem.

【0006】更に、従来の遮光構造では、対向電極側の
ガラス基板に設けられた遮光膜を確実にTFT領域およ
びドレインライン、ゲートラインと重畳させる必要性か
ら、遮光膜の幅を太く設計し、少々の位置合せズレが発
生しても遮光できるように考慮するために開口率が低下
する問題がある。
Furthermore, in the conventional light-shielding structure, the width of the light-shielding film is designed to be large because it is necessary to ensure that the light-shielding film provided on the glass substrate on the counter electrode side overlaps with the TFT region, the drain line, and the gate line. There is a problem in that the aperture ratio decreases because consideration is given to blocking light even if a slight misalignment occurs.

【0007】[0007]

【課題を解決するための手段】本発明は上述した課題に
鑑みて為されたものであり、絶縁基板上に複数のTFT
(薄膜トランジスタ)および前記TFTと接続された表
示電極がマトリックス配置された液晶表示装置において
、前記TFTの配線電極であるドレインラインと表示電
極間に前記表示電極の周端部と重畳させ、前記ドレイン
ラインと異なる層に遮光膜を設けたことを特徴とする。
[Means for Solving the Problems] The present invention has been made in view of the above-mentioned problems, and includes a plurality of TFTs on an insulating substrate.
In a liquid crystal display device in which a display electrode (thin film transistor) and a display electrode connected to the TFT is arranged in a matrix, a drain line, which is a wiring electrode of the TFT, and a display electrode are overlapped with a peripheral edge of the display electrode, and the drain line It is characterized by providing a light-shielding film in a layer different from that of the light-shielding film.

【0008】[0008]

【作用】前記遮光膜(32)は、TFTを形成予定の一
方の基板、例えばガラス基板(31)上に直接形成でき
るため、遮光膜の材料、形成温度等によるTFTの特性
変化を全く考慮しないで形成できる。また遮光膜上に形
成される絶縁膜(33)は、表示電極の下層となるので
、この絶縁膜による液晶印加電圧の低下は生じない。
[Operation] Since the light-shielding film (32) can be formed directly on one of the substrates on which the TFT is to be formed, for example, the glass substrate (31), changes in TFT characteristics due to the material of the light-shielding film, the formation temperature, etc. are not considered at all. It can be formed by Further, since the insulating film (33) formed on the light shielding film becomes the lower layer of the display electrode, the voltage applied to the liquid crystal does not decrease due to this insulating film.

【0009】更に、ドレインラインと表示電極間に表示
電極を重畳させ、ドレインラインと異なる層に遮光膜を
設けているために開口率を向上させることができる。
Furthermore, since the display electrode is overlapped between the drain line and the display electrode, and the light shielding film is provided in a layer different from that of the drain line, the aperture ratio can be improved.

【0010】0010

【実施例】以下に本発明の実施例を図面を参照しながら
説明する。まず図2に示されているように、絶縁性を有
し光を透過する基板、例えばガラス基板(31)があり
、このガラス基板上(31)には、本発明の特徴とする
遮光膜(32)が形成されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Examples of the present invention will be described below with reference to the drawings. First, as shown in FIG. 2, there is an insulating and light-transmitting substrate, for example, a glass substrate (31), and on this glass substrate (31) there is a light-shielding film ( 32) is formed.

【0011】この遮光膜(32)およびガラス基板上に
は、例えばシリコン酸化膜またはシリコン窒化膜等の絶
縁膜(33)が形成され、この絶縁膜(33)上にはC
rのスパッタリングにより形成されたゲート電極(34
)(ゲートラインGも含む)が、図1の1点破線の如く
、表示電極(35)の間に左右に延在されて設けられて
いる。
[0011] An insulating film (33) such as a silicon oxide film or a silicon nitride film is formed on the light shielding film (32) and the glass substrate.
The gate electrode (34
) (including the gate line G) are provided extending left and right between the display electrodes (35) as indicated by the dotted line in FIG.

【0012】また図2の如く、ゲート電極を含む基板(
31)全面にシリコン窒化膜よりなるゲート絶縁膜(3
6)が被覆されている。また図1の一点破線の如く、N
型のアモルファス・シリコンよりなる半導体活性層(3
7)が設けられている。またこの半導体活性層(37)
の両端には、N+型のアモルファス・シリコンより成る
コンタクト層(38)が、図2のように形成されている
。ここで図面の都合上、図1には前記コンタクト層(3
8)は図示せず。また両端に形成されたコンタクト層(
38)の間には、このコンタクト層(38)のエッチン
グの時に発生する半導体活性層のエッチングを防止する
ために、点で示した領域の絶縁層(39)、シリコン窒
化膜が形成されている。
Furthermore, as shown in FIG. 2, a substrate including a gate electrode (
31) Gate insulating film made of silicon nitride film on the entire surface (3
6) is coated. Also, as shown in the dashed line in Figure 1, N
A semiconductor active layer (3
7) is provided. Also, this semiconductor active layer (37)
Contact layers (38) made of N+ type amorphous silicon are formed at both ends of the contact layer 38, as shown in FIG. For convenience of drawing, FIG. 1 does not show the contact layer (3).
8) is not shown. Also, a contact layer (
38), an insulating layer (39) and a silicon nitride film are formed in the area indicated by dots in order to prevent etching of the semiconductor active layer that occurs when etching the contact layer (38). .

【0013】またゲート絶縁膜(36)上には、図1の
実線で示した領域にITOより成る表示電極(35)が
形成されている。更には、ソース領域に対応するコンタ
クト層と表示電極間には、図1の実線のようにソース電
極(40)が形成され、ドレイン領域に対応するコンタ
クト層には、図1の実線で示したドレインライン(41
)と一体となってドレイン電極(42)が形成されてい
る。またセルはカラー対応のために2つの表示電極(3
5)、(35)と下段の表示電極(35)がトライアン
グル構造になっている。また上段の表示電極もトライア
ングル構造になっている。そのため実際は、ドレインラ
インは縦方向にジクザクに延在されている。
Further, on the gate insulating film (36), a display electrode (35) made of ITO is formed in the region shown by the solid line in FIG. Furthermore, a source electrode (40) is formed between the contact layer corresponding to the source region and the display electrode, as shown by the solid line in FIG. 1, and a source electrode (40) is formed in the contact layer corresponding to the drain region, as shown by the solid line in FIG. Drain line (41
) is formed integrally with the drain electrode (42). The cell also has two display electrodes (3
5), (35) and the lower display electrode (35) have a triangular structure. The upper display electrode also has a triangular structure. Therefore, in reality, the drain line extends in a staggered manner in the vertical direction.

【0014】更に、前記表示電極、ソース電極、ドレイ
ン電極、ドレインライン及びトランジスタ上を被覆した
配向膜が形成され、他方のガラス基板の下層には共通電
極、配向膜が形成され、前記一方の基板と他方の基板は
相対向して設けられ、間には液晶が封入されている。本
発明の特徴は、前記遮光膜にある。説明からも明らかな
ように、遮光膜(32)はガラス基板(31)上に直接
形成してあり、この形成時にはTFTが形成されていな
いので、遮光膜の材料を考慮する必要はない。ここでは
Cr、Ni、Al等が考えられる。
Further, an alignment film is formed to cover the display electrode, source electrode, drain electrode, drain line and transistor, a common electrode and an alignment film are formed on the lower layer of the other glass substrate, and the one glass substrate is covered with an alignment film. and the other substrate are provided facing each other, and a liquid crystal is sealed between them. The feature of the present invention lies in the light shielding film. As is clear from the description, the light shielding film (32) is formed directly on the glass substrate (31) and no TFT is formed at the time of this formation, so there is no need to consider the material of the light shielding film. Here, Cr, Ni, Al, etc. can be considered.

【0015】また遮光膜(32)上を覆う絶縁膜(33
)も、TFTが形成されていないので、材料の選定、熱
処理温度を考慮する必要がない。また遮光膜(32)は
上記したNi等の金属がガラス基板(31)の全面に付
着形成された後、所定のエッチング技術により、ガラス
基板(31)上に形成される。遮光膜(32)は図から
明らかな如く、表示電極(35)の周端領域と重畳する
ように形成する。又、遮光膜(32)は図2からは明ら
かにされないが表示電極(35)とドレインライン間に
のみ選択的に形成される。このとき、遮光膜(32)は
ドレインラインと異なる層領域に形成される。
[0015] Furthermore, an insulating film (33) covering the light shielding film (32) is provided.
) also does not have a TFT formed therein, so there is no need to consider material selection or heat treatment temperature. The light shielding film (32) is formed on the glass substrate (31) by a predetermined etching technique after the metal such as Ni mentioned above is deposited on the entire surface of the glass substrate (31). As is clear from the figure, the light shielding film (32) is formed so as to overlap the peripheral edge region of the display electrode (35). Further, although it is not clear from FIG. 2, the light shielding film (32) is selectively formed only between the display electrode (35) and the drain line. At this time, the light shielding film (32) is formed in a layer region different from the drain line.

【0016】更には、従来(図4)では、絶縁膜を通し
ての短絡や容量値を考慮して、この絶縁膜を厚く設ける
必要があり、表示電極と対向電極間の電圧低下の問題を
生じるが、本願は、図4の如く厚い前記絶縁膜が、遮光
膜の形成位置により表示電極の下層となるので、従来例
で述べた電圧低下が生じない。また遮光膜材料を導電材
料で形成した場合、TFTのソース電極やドレイン電極
と前記遮光膜間で容量が発生するため、このソース電極
やドレイン電極下には実質的に遮光膜を形成しないこと
が好ましい。
Furthermore, in the conventional method (FIG. 4), it is necessary to provide a thick insulating film in consideration of short circuits and capacitance through the insulating film, which causes the problem of voltage drop between the display electrode and the counter electrode. In the present application, as shown in FIG. 4, the thick insulating film becomes the lower layer of the display electrode depending on the position where the light shielding film is formed, so that the voltage drop described in the conventional example does not occur. Furthermore, when the light-shielding film material is formed of a conductive material, capacitance is generated between the source electrode or drain electrode of the TFT and the light-shielding film. preferable.

【0017】TFTおよび遮光膜が形成された一方のガ
ラス基板(31)と対向電極、カラーフィルタ層および
カラーフィルタ層間に形成された遮光膜を有した他方の
ガラス基板(図示しない)とを貼合せする場合、従来の
遮光構造では、対向電極側の他方のガラス基板側に設け
られた遮光層と表示電極との境界部には両者の位置合せ
精度(位置ズレを防止するため)を考慮するため重畳部
を大きく取る必要があり、開口率を低下させる問題があ
ったが、本発明の構造によれば、TFTが形成される基
板上に表示電極と異なる層でその周端部で重畳するよう
に遮光膜が形成されているために、他方の基板に設けた
遮光層の幅を最小限に小さくすることができ、開口率を
向上させることができる。
One glass substrate (31) on which a TFT and a light-shielding film are formed is bonded to the other glass substrate (not shown) having a counter electrode, a color filter layer, and a light-shielding film formed between the color filter layers. In this case, in the conventional light-shielding structure, the boundary between the light-shielding layer provided on the other glass substrate side on the counter electrode side and the display electrode is designed to take into account alignment accuracy (to prevent misalignment) between the two. However, according to the structure of the present invention, a layer different from that of the display electrode is formed on the substrate on which the TFT is formed, so that the overlapped portion is overlapped at the peripheral edge of the substrate. Since the light shielding film is formed on the other substrate, the width of the light shielding layer provided on the other substrate can be minimized, and the aperture ratio can be improved.

【0018】[0018]

【発明の効果】以上に詳述した如く、本発明に依れば、
表示電極の周端辺と重畳する遮光膜をTFT側の基板上
に形成することにより、貼り合せる対向基板側に形成す
るマトリックス状の遮光膜幅を最小限に設定することが
できる。その結果、表示画素の開口率を最大限向上させ
ることができる。
[Effects of the Invention] As detailed above, according to the present invention,
By forming a light-shielding film overlapping the peripheral edge of the display electrode on the TFT-side substrate, the width of the matrix-shaped light-shielding film formed on the opposing substrate to be bonded can be set to the minimum. As a result, the aperture ratio of display pixels can be improved to the maximum.

【0019】また、位置合せ時に位置ズレがあったとし
ても表示電極下にも本発明の遮光膜があるために光もれ
等の問題は発生しない。
Furthermore, even if there is a positional shift during alignment, problems such as light leakage will not occur because the light-shielding film of the present invention is also provided under the display electrode.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】図1は本液晶表示装置の平面図である。FIG. 1 is a plan view of the present liquid crystal display device.

【図2】図2は図1のA−A線断面図である。FIG. 2 is a cross-sectional view taken along line AA in FIG. 1;

【図3】図3は従来の液晶表示装置の平面図である。FIG. 3 is a plan view of a conventional liquid crystal display device.

【図4】図4は図3のA−A線断面図である。FIG. 4 is a cross-sectional view taken along line AA in FIG. 3;

【符号の説明】[Explanation of symbols]

31    ガラス基板 32    遮光膜 33    絶縁膜 35    表示電極 31 Glass substrate 32 Light shielding film 33 Insulating film 35 Display electrode

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  絶縁基板上に複数のTFT(薄膜トラ
ンジスタ)および前記TFTと接続された表示電極がマ
トリックス配置された液晶表示装置において、前記TF
Tの配線電極であるドレインラインと表示電極間に前記
表示電極の周端部と重畳させ、前記ドレインラインと異
なる層に遮光膜を設けたことを特徴とする液晶表示装置
1. A liquid crystal display device in which a plurality of TFTs (thin film transistors) and display electrodes connected to the TFTs are arranged in a matrix on an insulating substrate, wherein the TFTs
A liquid crystal display device characterized in that a light shielding film is provided between a drain line, which is a wiring electrode of T, and a display electrode, overlapping a peripheral edge of the display electrode, and in a layer different from the drain line.
【請求項2】  前記絶縁基板はガラス基板を用いたこ
とを特徴とする請求項1記載の液晶表示装置。
2. The liquid crystal display device according to claim 1, wherein the insulating substrate is a glass substrate.
JP3095731A 1991-04-25 1991-04-25 Liquid crystal display device Pending JPH04229827A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3095731A JPH04229827A (en) 1991-04-25 1991-04-25 Liquid crystal display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3095731A JPH04229827A (en) 1991-04-25 1991-04-25 Liquid crystal display device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2311910A Division JPH04181918A (en) 1990-11-16 1990-11-16 Liquid crystal display device

Publications (1)

Publication Number Publication Date
JPH04229827A true JPH04229827A (en) 1992-08-19

Family

ID=14145625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3095731A Pending JPH04229827A (en) 1991-04-25 1991-04-25 Liquid crystal display device

Country Status (1)

Country Link
JP (1) JPH04229827A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0519245A (en) * 1991-07-10 1993-01-29 Nec Corp Liquid crystal element
CN102914916A (en) * 2011-08-05 2013-02-06 株式会社日本显示器中部 Liquid crystal display device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0519245A (en) * 1991-07-10 1993-01-29 Nec Corp Liquid crystal element
CN102914916A (en) * 2011-08-05 2013-02-06 株式会社日本显示器中部 Liquid crystal display device
CN102914916B (en) * 2011-08-05 2015-06-24 株式会社日本显示器 Liquid crystal display device
US9244322B2 (en) 2011-08-05 2016-01-26 Japan Display Inc. Liquid crystal display device

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