JPH0421350B2 - - Google Patents

Info

Publication number
JPH0421350B2
JPH0421350B2 JP61117252A JP11725286A JPH0421350B2 JP H0421350 B2 JPH0421350 B2 JP H0421350B2 JP 61117252 A JP61117252 A JP 61117252A JP 11725286 A JP11725286 A JP 11725286A JP H0421350 B2 JPH0421350 B2 JP H0421350B2
Authority
JP
Japan
Prior art keywords
circuit
film
region
gate
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61117252A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6271268A (ja
Inventor
Juji Tanida
Takaaki Hagiwara
Ryuji Kondo
Shinichi Minami
Yokichi Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61117252A priority Critical patent/JPS6271268A/ja
Publication of JPS6271268A publication Critical patent/JPS6271268A/ja
Publication of JPH0421350B2 publication Critical patent/JPH0421350B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP61117252A 1986-05-23 1986-05-23 半導体装置の製法 Granted JPS6271268A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61117252A JPS6271268A (ja) 1986-05-23 1986-05-23 半導体装置の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61117252A JPS6271268A (ja) 1986-05-23 1986-05-23 半導体装置の製法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP6394179A Division JPS55156370A (en) 1979-05-25 1979-05-25 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS6271268A JPS6271268A (ja) 1987-04-01
JPH0421350B2 true JPH0421350B2 (en:Method) 1992-04-09

Family

ID=14707161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61117252A Granted JPS6271268A (ja) 1986-05-23 1986-05-23 半導体装置の製法

Country Status (1)

Country Link
JP (1) JPS6271268A (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2997123B2 (ja) * 1992-04-03 2000-01-11 株式会社東芝 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6271268A (ja) 1987-04-01

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