JPH04213417A - Method for positioning rotary curved mirror - Google Patents

Abstract

PURPOSE:To easily and accurately position a rotary curved mirror having no reference point. CONSTITUTION:As to a rotary curved type condenser 1, two pairs of holes 13 and 14 in pairs capable of seeing through each other are formed so as to be symmetrical to an optical axis L1 on a plane which is orthogonally crossed with an optical axis L1, and also includes a focus F1, and then, the position of the condenser 1 is decided so that the center of the light source of an arc lamp comes to the position of intersected points which can be seen from two pairs of the holes 13 and 14.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention focuses on adjusting the position of a so-called curved rotating mirror (a rotating half-ellipse, parabola, etc.) in, for example, an image furnace that focuses light from a light source at one focal position to another focal position. Regarding the positioning method to be determined.

0002

[Prior art] Concentrating mirrors such as semi-elliptical rotating mirrors and parabolic mirrors are
Conventionally, the focal point was determined using the flange formed on the outer periphery of the tip or the end face of the hole formed on the bottom side of the recess as a reference point, and the condenser mirror was positioned and attached so that the light source was located at this focal position.

0003

[Problems to be Solved by the Invention] However, in the above method, the distance between the reference point and the focal point becomes long, and the condensing mirror cannot be positioned with high precision. In particular, for condensing mirrors with low shape precision that have been machined, the 0.1 m required for image furnaces is
Positioning on the order of m was difficult.

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems and provide a method for positioning a curved rotating mirror that can position the curved rotating mirror with high precision.

[0005]

[Means for Solving the Problems] In order to solve the above problems, the curved rotating mirror positioning method of the present invention provides curved rotating mirrors that can be seen from each other at symmetrical positions on a plane perpendicular to the optical axis and including the focal point. Two sets of two through holes are formed, and the position of the curved rotating mirror is determined based on the intersection position that can be seen from each of the two sets of through holes.

[0006]

[Operation] In the above configuration, the intersection of two sets of through holes that can be seen through each other becomes the focal point, so by positioning the curved rotating mirror so that the light source or reference mark is located here, extremely high precision can be achieved. A curved rotating mirror can be installed.

[0007]

[Example] An example of the image furnace of the present invention is shown below in Fig. 1.
, will be explained based on FIG. In Fig. 2, 1 is the optical axis L
1 is a condensing mirror in the shape of a semi-elliptical body of revolution, which is arranged vertically upward and whose inner surface is an ellipsoid of revolution.It is placed in the storage chamber 2, and the flange 1a on the outer periphery of the tip can be finely adjusted vertically and horizontally at multiple points around it. It is attached to the side wall of the storage chamber 2 via a positioning device 3. At the first focal point F1 on the optical axis L1 of the condenser mirror 1, an arc lamp 5 is supported by an elevating frame 4 so as to be movable up and down, and a guide portion 4a at the upper end is held by a support member 6 so as to be movable up and down. is installed.

A shutter device 7 for adjusting the amount of reflected light is disposed above the arc lamp 5, and a plane mirror 8 inclined at 45 degrees with respect to the optical axis L1 is disposed between the shutter device 7 and the second focal point F2. Optical axis L reflected by this plane mirror 8
On the 2 side, there is a sample chamber 1 into which light enters through a transmission window 9.
At a third focal point F3 on the optical axis L2, a sample 11 is heated in an inert gas atmosphere or in a vacuum.
is placed. 12 is a megaphone-type guide mirror that collects light within the sample chamber 8.

As shown in FIG. 1, the condenser mirror 1 has an optical axis L.
Two sets of through holes 13 and 14 are formed at four symmetrical positions that are orthogonal to each other and intersect orthogonally on a plane that is perpendicular to the focal point and includes the focal point. Note that these through holes 13 and 14 are formed parallel to the viewing axes a and b.

In order to position the condensing mirror 1 in the above configuration, the center of the light source of the arc lamp 5 is located at a position that can be seen through the through holes 13 and 14, that is, the intersection of the line-of-sight axes a and b, and the third focal point F3 is located at the point where the sample 11 is located. This is done by moving the condensing mirror 1 using the positioning device 3 or by raising and lowering the arc lamp 5 using the elevating frame 4 so that it is in an appropriate position. In the unlikely event that the positional accuracy of the condensing mirror 1 is poor, readjustment can be easily made by making fine adjustments based on the position.

[0011]

As described above, according to the present invention, the curved rotating mirror is positioned so that the light source or reference mark is located at the intersection position that can be seen through two sets of through holes that can be seen from each other. By positioning,
Curved rotating mirrors can be easily mounted with extremely high precision.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal cross-sectional view of a condensing mirror.

FIG. 2 is a sectional view taken along the line AA shown in FIG. 1;

FIG. 3 is a longitudinal sectional view of the image furnace.

[Explanation of symbols]

1. Concentrating mirror 3 Positioning device 4 Lifting platform 5 Arc lamp 13,14 Through hole F1 1st focus F2 2nd focal point L1, L2 Optical axis a, b Line of sight axis

Claims (1)

[Claims] Claim 1: A curved rotating mirror is provided with two sets of two through holes that can be seen through each other at symmetrical positions on a plane that is perpendicular to the optical axis and includes the focal point, and an intersection point that can be seen through each of the two sets of through holes. A method for positioning a curved rotating mirror, characterized in that the position of the curved rotating mirror is determined based on .