JPH04204272A - Semiconductor characteristic measuring device - Google Patents

Abstract

PURPOSE:To respectively independently control relays which exceed the number of relay bits in a test by controlling a highly precise power source set in a test in accordance with a program and inputting arbitrary voltage into an A/D convertor set on a test head to control its output data. CONSTITUTION:A plurality of output terminals of an A/D convertor 10 are connected to relays 5a to pair and a plurality of the relays 5a are driven respectively independently. A power source 7 and an oscillator in a tester 2 are controlled in accordance with a program to input specified input into a semiconductor element 4. Next, the output values from the semiconductor element 4 are read in a measuring device 8 in the ester 2 and it is judged whether the read values are within a specified range in accordance with the program to complete measurement operation of an item. Measurement items determining the operation from the changing-over of the relays 5, 5a to discrimination are performed and the operation of characteristic measurement of the semiconductor element 4 is completed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a semiconductor device characteristic measuring device that has a small number of relays in a tester compared to the number of relays that must be independently controlled.

[Conventional technology]

A conventional example of this type of semiconductor device characteristic measuring apparatus is schematically shown in FIG. This measuring device is composed of a test head 1, a tester 2, and a cable 3 connecting these.

The semiconductor element 4 whose characteristics are to be measured is held on a fixed stand (not shown). On the test head 1, a large number of relays 5 and various active and passive elements (not shown) necessary for constructing a measurement circuit for measuring the characteristics of the semiconductor element 4 are arranged near the semiconductor element 4. has been done. The tester 2 includes a relay bit 6 for controlling the relay 5, various power supplies 7, various oscillators (not shown), and a plurality of measuring devices such as a voltmeter and an ammeter for measuring the pressure value of the semiconductor element 4. There are 8 containers installed.

In principle, a relay 5 installed on the test head 1 is connected to each relay bit 6 of the tester 2 one to one via a cable 3.
connected with.

Next, the operation of this semiconductor device characteristic measuring apparatus will be explained using FIG. First, a program controls the relay bit 6 in the tester 2, switches the relay 5 on the test head 1, and sets a measuring circuit for measuring the characteristics of the semiconductor element 4. After setting the measurement circuit, the power supply 7 and oscillator (not shown) in the tester 2 are controlled by a program, and predetermined inputs are input to the semiconductor element 4. Then, the output value from the semiconductor element 4 is read by the measuring device 8 in the tester 2, and it is determined whether the read value is within a specified range in the program.

Thereafter, operations from switching to determination of the relay 5 are performed for a predetermined number of measurement items, and the operation of measuring the characteristics of one semiconductor element 4 is completed.

[Problem to be solved by the invention]

Since the conventional semiconductor device characteristic apparatus is constructed as described above, the number of independently controllable relays 5 is equal to the number of relay bits 6 possessed by the tester 2.

Therefore, it is not possible to use relays that exceed the number of relay bits that the tester possesses, which limits the number of test items and test content, making it difficult to conduct sufficient tests to guarantee product quality. There was a problem with that.

This invention was made to solve the above-mentioned problems, and it is possible to independently control the relays 5 arranged on the test head l, which exceed the number of relay bits 6 possessed by the tester 2. The purpose of this invention is to obtain a semiconductor device characteristic measuring device that is possible.

[Means to solve the problem]

A semiconductor device characteristic measuring device according to the present invention includes a test head that is placed near a semiconductor device whose characteristics are to be measured, and is provided with a peripheral circuit for setting measurement conditions, and a test head that measures an output value from the semiconductor device. In a semiconductor device characteristic measuring device comprising a tester equipped with a measuring instrument for measurement and a cable connecting the tester and the test head, a programmably controllable high-precision power source is provided in the tester, The test head is characterized in that an A/D converter is provided on each of the test heads.

[Effect]

The semiconductor device characteristic measuring device according to the present invention programmatically controls a high-precision power supply disposed in a tester, inputs an arbitrary voltage to an A/D converter disposed on a test head, and outputs the output data. By controlling the tester, it is possible to independently control each of the relays arranged on the test head, which exceeds the number of relay bits possessed by the tester.

〔Example〕

Hereinafter, one embodiment of the present invention will be described based on the drawings.

FIG. 1 is an explanatory diagram schematically showing the configuration of a semiconductor device characteristic measuring apparatus as an embodiment of the present invention. This figure corresponds to FIG. 2 shown in the conventional example, and parts and portions in FIG. 1 that are the same or corresponding to those in FIG. 2 are given the same reference numerals.

As shown in FIG. 1, this measuring device is placed in the vicinity of a semiconductor element 4 whose characteristics are to be measured, and includes a large number of relays 5 necessary for configuring a peripheral circuit for setting measurement conditions.
and a test head 1 equipped with various active and passive elements (not shown), a relay bit 6 for programmatically controlling the relay 5, various power supplies 7 that can be programmatically controlled in the same way, and various oscillators ( (not shown) and a tester 2 equipped with a plurality of measuring instruments 8 such as voltmeters and ammeters for measuring output values from the semiconductor element 4, and the test head l and the tester 2 are connected. It is equipped with a cable 3 for The relay 5 corresponds to the relay bit 6 via the cable 3 in one-to-one correspondence.

Furthermore, relays 5a which are necessary for configuring a peripheral circuit for measuring the characteristics of the semiconductor element 4 and which exceed the number of relay bits 6, and an A/D converter 1O are arranged on the test head 1. A high-precision power source 9 that can be controlled programmatically is disposed inside the power source 2 . Said relay 5
a is the output of the AID converter 10! The input of the A/D comparator 10 is connected to a high precision power source 9 in the tester 2 via a cable 3.

Next, the operation of this semiconductor device characteristic measuring apparatus will be explained using FIG. Here, the number of relays 5a arranged on the test head l is set to 16, which exceeds the number of relay pits 6 in the tester 2, and the A/D converter 10 arranged on the test head l is set to 16. An explanation will be given based on an example of an A/D converter that outputs 16-bit parallel data.

First, a measuring circuit for measuring the characteristics of the semiconductor element 4 is set by switching the relay 5.5a on the test head l. The relay 5 is switched by controlling the relay pit 6 in the tester 2 using a program.

To switch the relay 5a, first control the high-precision power supply 9 in the tester 2 using a program to set an arbitrary voltage value, and then use the A/D converter 10 (here, a 16-bit one) installed on the test head l. A/D converter). A
The /D converter IO outputs 65,536 parallel output digital patterns from 16 output terminals depending on the magnitude of the input voltage value.

Output digital pattern or Low level OvHigh
If it is a digital pattern with h level 5V, A/
By connecting the 16 output terminals of the D converter IO to the relays 5a on a one-to-one basis, the 16 relays 5a can be driven independently. Here, it is assumed that the current drive capability of the output terminal of the A/D converter 10 is sufficiently high, or if the drive capability is insufficient, a buffer is inserted between the A/D converter IO and the relay 5a.

After setting up the measurement circuit as described above, the power supply 7 and oscillator (not shown) in the tester 2 are controlled by a program, and predetermined inputs are input to the semiconductor element 4. Then, the output value from the semiconductor element 4 is read by the measuring device 8 in the tester 2, and it is determined in the program whether the read value is within a specified range, and the measurement operation for one item is completed. Thereafter, operations from switching of the relay 5.5a to determination are performed for a predetermined number of measurement items, and the operation of measuring the characteristics of one semiconductor element 4 is completed.

〔Effect of the invention〕

As described above, according to the present invention, by disposing a high-precision power supply in the tester and an A/D converter on the test head, the tester can be independently operated by more than the number of relay pits it has. Since it is now possible to control the number of test items and test contents due to a lack of relay pits, there is no longer a restriction on the number of test items and test contents, which has the effect of making it possible to further guarantee the high quality of the product. .

[Brief explanation of the drawing]

FIG. 4 is an explanatory diagram schematically showing the configuration of a semiconductor device characteristic measuring device according to an embodiment of the present invention, and FIG. 2 is an explanatory diagram schematically showing the configuration of a conventional semiconductor device characteristic measuring device. In the figure, l is a test head, 2 is a tester, 3 is a cable, 4 is a semiconductor element, 5 is a relay, 6 is a relay pit,
7 is a power supply, 8 is a measuring device, 9 is a high precision power supply, 10 is an A/
It is a D converter. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

[Claims] A test head is provided near a semiconductor element whose characteristics are to be measured, and a test head is provided with a large number of relays and various passive and active elements necessary for setting up a measurement circuit for measuring the characteristics of the semiconductor element, and a test head that controls the relays. In a semiconductor device characteristic measuring device comprising a relay bit, a measuring device for measuring the output value of the semiconductor device, a tester equipped with various power sources and oscillators, and a cable connecting the test head and the tester, the relay In order to independently control relays exceeding the number of bits, a programmably controllable high-precision power source is provided in the tester, and an A/D converter is provided on the test head, respectively. Device characteristic measurement device.