JPH04203956A - Appearance inspection method and device - Google Patents
Appearance inspection method and deviceInfo
- Publication number
- JPH04203956A JPH04203956A JP2336293A JP33629390A JPH04203956A JP H04203956 A JPH04203956 A JP H04203956A JP 2336293 A JP2336293 A JP 2336293A JP 33629390 A JP33629390 A JP 33629390A JP H04203956 A JPH04203956 A JP H04203956A
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspected
- diffusion
- inspection
- transmitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title claims description 40
- 238000000034 method Methods 0.000 title claims description 13
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 238000011179 visual inspection Methods 0.000 claims description 7
- 230000007547 defect Effects 0.000 abstract description 16
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 238000009792 diffusion process Methods 0.000 abstract 8
- 230000005540 biological transmission Effects 0.000 abstract 7
- 239000000470 constituent Substances 0.000 abstract 1
- 238000001514 detection method Methods 0.000 description 5
- 239000000835 fiber Substances 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001953 sensory effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N2021/556—Measuring separately scattering and specular
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
- G01N21/532—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke with measurement of scattering and transmission
Landscapes
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Dry Development In Electrophotography (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野二
この発明は、被検査物の外観（不透明な物については表
面の粗さや凹凸、汚れなと、透明ま１こは半透明なもの
については、さらに内部の気泡や異物の有無なと）を光
の照射によって検査する方法と、その装置に関するしの
である。Detailed Description of the Invention [Industrial Application Field 2] This invention is applicable to the appearance of objects to be inspected (for opaque objects, surface roughness, irregularities, and dirt; for transparent or translucent objects, This paper describes a method and apparatus for inspecting the presence of air bubbles and foreign matter inside the device by irradiating light.
［従来の技術］
複写機においてトナーをドラムにのせるために使用され
る現像プレートの外観検査は、従来、目視検前で行い、
良否の判定は人の判断に頼っていた。人による官能検査
を行うには熟練を要し、新しい検査員を育成するｆ二め
には多大な時間と費用を要する。また、こうした官能検
査では安定した品質が確保し難く、検査時間のバラツキ
か大きく作業の標準化がむつかしい。[Prior Art] Conventionally, the appearance of a developing plate used to place toner on a drum in a copying machine is performed before visual inspection.
Judging whether something is good or bad relies on human judgment. Performing sensory tests by humans requires skill, and training new testers requires a great deal of time and money. Furthermore, it is difficult to ensure stable quality with such sensory tests, and the inspection time is highly variable, making it difficult to standardize the work.
そこで、これまでにいくつかの検査技術が提案され、実
用に供されている。Therefore, several inspection techniques have been proposed and put into practical use.
（ａ）画像処理による検査装置（従来例１）検査対象を
ＴＶカメラで捉え、コンピュータによる画像処理技術を
用いて検査を行い、良否の判定を出す。(a) Inspection device using image processing (Conventional example 1) The object to be inspected is captured by a TV camera, inspected using image processing technology by a computer, and a pass/fail judgment is made.
（ｂ）レーザ光線による検査装置（従来例２）透過光、
透過拡散光、正反射光、拡散反射光等による検査方式が
知られており、その内いずれか単一の方式による検査装
置が商品化されている。(b) Inspection device using laser beam (conventional example 2) transmitted light,
Inspection methods using transmitted diffused light, specularly reflected light, diffusely reflected light, etc. are known, and inspection devices using only one of these methods have been commercialized.
［発明が解決しようとする課題］
従来例１では、多項目の欠点を検査する１こめには、照
明の方法、撮影の方向を多く設定しなければならず、大
型で高価な設備となる。また、小さな欠点を検査しよう
とすれば、小さな検査工□リアとなるため、ブレードの
全面を検査する場合には所要時間が長くなる。[Problems to be Solved by the Invention] In Conventional Example 1, many lighting methods and photographing directions must be set in one inspection for multiple defects, resulting in large and expensive equipment. In addition, if a small defect is to be inspected, a small inspection process is required, so it takes a long time to inspect the entire surface of the blade.
従来例２のうち、既に商品化されている検査装置では、
多項目の欠点を有効に検出するためには多数の装置を設
置しなければならない。なぜなら、ブレードの外観検査
項目としては吸光性のある異物、繊維くず等の異物、汚
れ、凹凸、気泡、あばた等があり、単一の検査光ではこ
れら多項目の欠点が検出できないからである。例えば、
透過光では異物（吸光性）や汚れが検査できるだけであ
り、透過拡散光では異物（繊維くず等）と凹凸が検査で
きるだけである。Of conventional example 2, the inspection device that has already been commercialized is
In order to effectively detect multiple defects, a large number of devices must be installed. This is because blade appearance inspection items include light-absorbing foreign matter, foreign matter such as fiber waste, dirt, unevenness, air bubbles, pockmarks, etc., and these multiple defects cannot be detected with a single inspection light. for example,
Transmitted light can only detect foreign matter (light absorption) and dirt, while transmitted diffused light can only detect foreign matter (fiber waste, etc.) and irregularities.
さらに、商品化されている装置は大型のものばかりで、
前述ブレードのような小物を高精度で検査するには不適
である。また、非常に高価となり取り扱いも煩雑である
。Furthermore, most of the commercialized devices are large.
It is unsuitable for inspecting small items such as the blades mentioned above with high precision. Moreover, it is very expensive and difficult to handle.
本発明の目的は、被検査物の外観検査を機械化・自動化
するとともに、１台の簡単な装置によって、同時に多項
目の外観検査を可能ならしめることである。An object of the present invention is to mechanize and automate the visual inspection of an object to be inspected, and to enable visual inspection of multiple items at the same time using one simple device.
「課題を解決するｒこめの手段］
本発明の外観検査方法は、ａ）、一条の光を被検査物に
照射し、ｂ）被検査物を透過した光または被検査物の表
面で反射した光を、ハーフミラ−（ま１こはハーフプリ
ズム）によって二方向に分け、Ｃ）−方の光については
、拡散成分を除去して照射光軸上の透過光または正反射
光のみの強度を検知し、ｄ）他方の光については、照射
光軸上の透過光や正反射光を除去して拡散成分のみの強
度を検知するーものである。"Complete Means to Solve the Problems" The visual inspection method of the present invention includes a) irradiating a line of light onto an object to be inspected, and b) irradiating the object with light that has passed through the object or reflected on the surface of the object. The light is divided into two directions by a half mirror (half prism), and the diffused component of the light in the - direction is removed and the intensity of only the transmitted light or specularly reflected light on the irradiation optical axis is detected. and d) As for the other light, transmitted light and specularly reflected light on the irradiation optical axis are removed and the intensity of only the diffused component is detected.
また本発明の外観検査装置は、Ａ）、一条の光を走査し
ながら照射する光発生手段と、Ｂ）被検査物か取り付け
られる支持手段と、Ｃ）被検査物を透過した光または被
検査物の表面で反射した光を二方向に分けるハーフミラ
−（またはハーフプリズム）とを設け、Ｄ）ハーフミラ
−からの一方の光路上には、光の拡散成分を除去するス
リットとともに受光センサーを配置し、Ｅ）他方の光路
上には、照射先軸上の透過光または正反射光を除去する
マスクととらに受光センサーを配置したー〇のである。Further, the appearance inspection apparatus of the present invention comprises: A) a light generating means that scans and irradiates a line of light; B) a support means attached to the object to be inspected; and C) light transmitted through the object or the object to be inspected. D) A half mirror (or half prism) that separates the light reflected from the surface of an object into two directions is provided, and a light receiving sensor is placed along with a slit to remove the diffuse component of the light on one optical path from the half mirror. , E) On the other optical path, a light-receiving sensor is placed between a mask and a tab for removing transmitted light or specularly reflected light on the irradiation target axis.
さらにこの装置には請求項３のように、Ｆ）光発生手段
による光の走査方向と直角な方向に上記支持手段を移動
する移動手段、を付設するとよい。Further, it is preferable that this device is provided with F) moving means for moving the supporting means in a direction perpendicular to the scanning direction of the light by the light generating means.
［作用］
本発明の外観検査方法によれば、上記ａ）のとおり単一
の検査光を被検査物（にとえば前記の現像ブレード）に
照射するだけでありなから、二種類の検査光による多項
目の外観検査を同時に行うことができる。すなわち、照
射光を透明または半透明の被検査物に透過させる場合に
ついて述べると、透過光が上記ｂ）のように二方向に分
けられ、一方の光に基づいて、Ｃ）のように照射先軸上
の透過光（拡散成分のないもの）による検査（たとえば
、吸光性のある異物や汚れの検査）がなされ、他方の光
に基づき、ｄ）のように拡散成分（拡散光）による検査
（たとえば、繊維くず等の異物や凹凸の検査）が行われ
る。Ｃ）・ｄ）のそれぞれにおいては、被検査物の欠点
が光の強度の異常となって検出されるのである。[Function] According to the appearance inspection method of the present invention, as described in a) above, the object to be inspected (for example, the developing blade) is only irradiated with a single inspection light, but two types of inspection light are used. Visual inspection of multiple items can be performed simultaneously. In other words, in the case where irradiation light is transmitted through a transparent or semi-transparent object to be inspected, the transmitted light is divided into two directions as in b) above, and based on one light, the irradiation destination is divided as in c). Inspection using on-axis transmitted light (no diffuse component) is performed (for example, inspection for light-absorbing foreign objects or dirt), and based on the other light, inspection using diffuse component (diffuse light) as shown in d) is performed. For example, inspection for foreign matter such as fiber waste and irregularities) is performed. In each of C) and d), defects in the object to be inspected are detected as an abnormality in the intensity of light.
また、反射光を利用する場合については、被検査物の表
面に照射されて反射する光がｂ）のように分けられ、一
方の光に基ついてＣ）のように正反射光（拡散成分のな
いもの）による検査がなされ、他方の光に基づいてｄ）
のように拡散成分（拡散反射光）による検査がなされる
。透過光を利用する場合と同様、反射光の場合にも、Ｃ
）・ｄ）の各検知が並行して同時に行われるので、多項
目にわたる欠点が能率的に検出される。In addition, when using reflected light, the light that is irradiated onto the surface of the object to be inspected and reflected is divided into two parts as shown in b), and based on one light, the specularly reflected light (diffuse component) is d) based on the light of the other.
Inspection is performed using the diffuse component (diffuse reflected light) as shown in FIG. As in the case of using transmitted light, in the case of reflected light, C
Since the detections of ) and d) are performed in parallel and at the same time, defects over many items can be detected efficiently.
本発明の外観検査装置によると、被検査物における所定
長さの部分に対して上記の検査方法が円滑に実現される
。すなわち、まずＡ）の光発生手段は、Ｂ）の支持手段
に取り付けられた被検査物に向けて、所定長さにわたり
走査しながら光を照射する。そして、被検査物を透過し
た光または表面で反射した光は、Ｃ）のハーフミラ−に
よって二方向に分けられる。これら二方向の光のうち一
方については、スリットによって拡散成分が除去され、
照射光軸上の透過光または正反射光のみがＤ）の受光セ
ンサーに達する。他方の光については、マスクによって
照射光軸上の透過光または正反射光が除去され、拡散成
分のみがＥ）の受光センサーに達する。各受光センサー
は、並行してそれぞれの光の強度を検知し、その強度の
異常すなわち被検査物の欠点を検出しうる信号を出力す
るので、多項目にわたる検査が能率的に行われる。According to the appearance inspection apparatus of the present invention, the above-described inspection method can be smoothly implemented for a portion of a predetermined length on an object to be inspected. That is, first, the light generating means A) irradiates light toward the object to be inspected attached to the supporting means B) while scanning over a predetermined length. The light that has passed through the object to be inspected or the light that has been reflected on the surface is divided into two directions by the half mirror shown in C). For one of these two directions of light, the diffused component is removed by the slit,
Only the transmitted light or specularly reflected light on the irradiation optical axis reaches the light receiving sensor in D). Regarding the other light, the transmitted light or specularly reflected light on the irradiation optical axis is removed by the mask, and only the diffused component reaches the light receiving sensor in E). Each light-receiving sensor detects the intensity of each light in parallel and outputs a signal capable of detecting an abnormality in the intensity, that is, a defect in the object to be inspected, so that a multi-item inspection can be performed efficiently.
さらに請求項３の外観検査装置では、上記Ｆ）の移動手
段によって、Ｂ）の支持手段ごと被検査物か移動させら
れる。したがって、被検査物か長尺な場合でも、長平方
向を移動の方向に合わせて被検査物を取り付ければ、そ
の全長に及ぶ検査か可能である。また、この移動方向は
前記Ａ）の光発生手段による光の走査方向と直角なので
、被検査物の所定の面積に対して外観検査が行えること
になる。Furthermore, in the appearance inspection apparatus of the third aspect, the object to be inspected is moved together with the support means of B) by the moving means of F). Therefore, even if the object to be inspected is long, it is possible to inspect the entire length of the object by attaching the object with its elongated direction aligned with the direction of movement. Furthermore, since this direction of movement is perpendicular to the scanning direction of light by the light generating means in A), the visual inspection can be performed on a predetermined area of the object to be inspected.
なお、Ａ）・Ｃ）・Ｄ）・Ｅ）の各機器・手段に対して
Ｂ）の支持手段が相対移動すればよいので、Ｂ）の支持
手段か絶対的には固定されていて、他か移動する場合に
も以上と差異はない。Note that since it is only necessary for the support means in B) to move relative to each device/means in A), C), D), and E), the support means in B) must be absolutely fixed, and the other There is no difference from the above when moving.
［実施例］ 以下、本発明の実施例を図面を参照しながら説明する。[Example] Embodiments of the present invention will be described below with reference to the drawings.
この例における被検査物は、複写機用の現像ブレードで
あって、表面の平滑面が複写機の現像ドラムに押しつけ
られて使用される透明なポリウレタン成形品である。第
１図は検査装置を原理的に示し１こものであって、同図
（ａ）は正面図、同図（ｂ）は側面図、また第２図はブ
ロック図である。The object to be inspected in this example is a developing blade for a copying machine, which is a transparent polyurethane molded product whose smooth surface is pressed against the developing drum of the copying machine. FIG. 1 shows the principle of the inspection device, and FIG. 1(a) is a front view, FIG. 1(b) is a side view, and FIG. 2 is a block diagram.
第１図において、Ｇは走査光発生手段であって、レーザ
光源ｌより射出したレーザビーム２は６面鏡のポリゴン
回転ミラー３により下方に反射されると同時に走査かが
けられ、この走査のかけられたレーザビーム２は投光レ
ンズ４より平行走査光５となり、同図（ｂ）の左方から
走査されていく。In FIG. 1, G is a scanning light generating means, in which a laser beam 2 emitted from a laser light source 1 is reflected downward by a six-sided polygon rotating mirror 3, and at the same time is scanned. The emitted laser beam 2 becomes parallel scanning light 5 from the projection lens 4, and is scanned from the left side of the figure (b).
走査幅は、現像ブレード６の幅より少し広くして検査の
信頼性を高める。平行走査光５はブレード６に照射され
、異物等７のない場合には、拡散光９は生ぜず（吸収も
ない）、透過光８、すなわち照射された光の軸線（光軸
）に沿って真っすぐに進む光のみとなる。プレート６に
異物等７がある場合には、異物等７により光の吸収と拡
散が起こり、透過光８と拡散光９か生じる。透過光８と
拡散光９は、ハーフミラ−１Ｏにより二方向への光、す
なわち図のように透過光１１と拡散光１３、および透過
光１２と拡散光１４に分割される。分割された透過光１
１及び拡散光１３は下方に進むが、スリブ１−１５によ
って拡散光１３は遮断され、透過光１１のみが直進し、
受光レンズ１６により集束されて受光器（受光センサー
）１７に入るようになっている。この場合の透過光１１
の強さは減衰している。透過光１２および拡散光１４は
、同図（ａ）において右方向に進むか、マスク１８によ
って透過光１２は遮断され、拡散光１４のみか直進し、
受光レンズ１９により集束されて受光器（受光センサー
）２０に入るようになっている。The scanning width is made slightly wider than the width of the developing blade 6 to increase the reliability of inspection. The parallel scanning light 5 is irradiated onto the blade 6, and if there is no foreign object 7, no diffused light 9 is generated (there is no absorption), and transmitted light 8, that is, along the axis (optical axis) of the irradiated light, is generated. Only light travels straight. If there is a foreign substance 7 on the plate 6, the foreign substance 7 absorbs and diffuses light, and transmitted light 8 and diffused light 9 are generated. The transmitted light 8 and the diffused light 9 are split into two directions by the half mirror 1O, that is, transmitted light 11 and diffused light 13, and transmitted light 12 and diffused light 14 as shown in the figure. Split transmitted light 1
1 and the diffused light 13 travel downward, but the diffused light 13 is blocked by the sleeve 1-15, and only the transmitted light 11 travels straight.
The light is focused by a light receiving lens 16 and enters a light receiver (light receiving sensor) 17. Transmitted light 11 in this case
strength is decreasing. The transmitted light 12 and the diffused light 14 either proceed to the right in FIG.
The light is focused by a light receiving lens 19 and enters a light receiver (light receiving sensor) 20.
そのほか、被検査物にクレータ状のあばたや気泡なとの
欠点が存在する場合には、拡散光１４が大部分（吸収は
殆どなし）となる。また異物かある場合には、光は吸収
されたり反射されたりするので、透過光１１の強度が減
少する。このような光の性質により被検査物（プレート
６）の欠点か確実に検出されるわけだが、本実施例では
、透過光および拡散光を２方向に分割して両方を同時測
定することによって多項目の欠点の同時検出ができるよ
うになっている。In addition, if the object to be inspected has defects such as crater-like pockmarks or bubbles, the diffused light 14 will be the majority (almost no absorption). Further, if there is a foreign object, the light is absorbed or reflected, and the intensity of the transmitted light 11 decreases. Due to these properties of light, defects in the object to be inspected (plate 6) can be reliably detected, but in this example, the transmitted light and the diffused light are divided into two directions and both are measured simultaneously. It is now possible to simultaneously detect defects in items.
第２図に示すように受光器１７．２０に入った透過光１
１、拡散光１４は、各々その強度により電気信号に変換
され、さらにヘッドアンプ２１．２２により増幅され、
欠点検出基板２３に送られる。欠点検出基板２３内で２
値化信号に変換され、タイミングの判断を加えて、良品
又は不良品の信号がシーケンスコントローラ２４へ送ら
れるようになっている。このノーケンスコントローラ２
４は操作盤２５、モータドライバー２６と接続されてお
り、ブレート６の移動の制御および警報器（異物等の検
出時にアラームを出す）２７の制御等を行うようになっ
ている。Transmitted light 1 entering the receiver 17.20 as shown in Figure 2
1. The diffused light 14 is converted into an electric signal depending on its intensity, and further amplified by head amplifiers 21 and 22,
It is sent to the defect detection board 23. 2 in the defect detection board 23
The signal is converted into a value signal, a timing judgment is added, and a signal indicating whether the product is good or defective is sent to the sequence controller 24. This noken controller 2
4 is connected to an operation panel 25 and a motor driver 26, and controls the movement of the plate 6 and an alarm device 27 (which issues an alarm when a foreign object is detected).
ブレード６は、後述するようにモータ２８と送りねし２
９等の働きにより左右へ移動させられるようになってい
る。電源３０．３１はそれぞれレーザ光源ｌおよびヘッ
ドアンプ２１．２２、欠点検出基板２３へ必要な電力を
供給するものである。The blade 6 is connected to a motor 28 and a feeder 2 as described later.
It can be moved left and right by the action of 9 etc. Power supplies 30 and 31 supply necessary power to the laser light source 1, head amplifiers 21 and 22, and defect detection board 23, respectively.
第３図は本検査装置のうち移動手段について示すもので
、同図（ａ）はその平面図、同図（ｂ）は立面図、同図
（ｃ）は側面図を示す。図示するように、長方形のベー
スプレート３２の上に配置されに駆動モータ２８の駆動
軸２８ａには送りねじ２９が連結され、送りねじ２９に
はこれと螺合する移動子３４ａが設けられている。この
移動子３４ａには矩形状の移動台３４か固着されている
。移動台３４は、ベースプレート３２の上に配置された
ガイドレール３３に載せられており、駆動モータ２８を
駆動することによって送りねじ２９が回転し、移動子３
４ａかスクリュー作用により送りねじ２９に螺合しつつ
移動し、これと−緒に移動台３４が図上左右にガイドレ
ール３３に案内されて移動するようになっており、これ
らが移動手段を構成している。一方、移動台３４上には
アクリル板のような透明板３５か支持手段として設けら
れ、この透明板３５上に被検査物たるプレート６を載せ
られるようになっている。ベースプレート３２に設けｆ
コ孔３６は、透過光８および拡散光９が通過するｆ二め
のものである。FIG. 3 shows the moving means of the present inspection apparatus; FIG. 3(a) is a plan view thereof, FIG. 3(b) is an elevational view thereof, and FIG. 3(c) is a side view thereof. As shown in the figure, a feed screw 29 is connected to a drive shaft 28a of a drive motor 28 disposed on a rectangular base plate 32, and a slider 34a screwed thereto is provided on the feed screw 29. A rectangular moving table 34 is fixed to this moving element 34a. The movable table 34 is placed on a guide rail 33 arranged on the base plate 32, and the feed screw 29 is rotated by driving the drive motor 28, and the movable table 34 is mounted on a guide rail 33 disposed on the base plate 32.
4a moves while being screwed into the feed screw 29 by screw action, and the moving table 34 moves along with it while being guided by a guide rail 33 from side to side in the figure, and these constitute a moving means. are doing. On the other hand, a transparent plate 35 such as an acrylic plate is provided as a support means on the movable table 34, and a plate 6 as an object to be inspected can be placed on this transparent plate 35. Provided on the base plate 32 f
The hole 36 is the second hole through which the transmitted light 8 and the diffused light 9 pass.
上記実施例における検査時間は、ブレードの大きさが２
４０ｍｍ長さＸ１４ｍｍ幅の場合で約４５秒であり、従
来の検査装置より数段迅速化される。なおこのとき、走
査回数は７００回／秒、レーザビームの太さはφ０．Ｉ
ｍｍ、走査問隔は約０．０５ｍｍであるから、検査の精
度かよく信頼性が高いといえる。The inspection time in the above example is as follows:
In the case of 40 mm length x 14 mm width, it takes about 45 seconds, which is several steps faster than conventional inspection equipment. At this time, the number of scans was 700 times/second, and the thickness of the laser beam was φ0. I
mm, and the scanning interval is about 0.05 mm, so it can be said that the inspection accuracy is good and reliable.
以上には、透過光及び拡散光による検査方法と装置につ
いて説明したか、反射光により検査を行う場合において
も、透過光８を正反射光とおき、拡散光９を拡散反射光
とすることにより、同時に検査を行うことができる。In the above, the inspection method and apparatus using transmitted light and diffused light have been explained, and even when inspecting using reflected light, the transmitted light 8 is set as regular reflected light and the diffused light 9 is set as diffused reflected light. , inspection can be done at the same time.
そのほか、被検査物の移動手段としては、実施例に紹介
した送りねじによるもののほか、流体圧シリンダによる
ものや、ロール間に巻き掛けられたベルト等によるもの
なと、各種か適用できる。In addition, various means for moving the object to be inspected may be used, such as a feed screw introduced in the embodiment, a fluid pressure cylinder, a belt wound between rolls, or the like.
また支持手段としても、透明板以外に各種のものが考え
られる。Moreover, various types of support means other than the transparent plate can be considered.
［発明の効果］
以上説明したように、本発明の検査方法及び装置によれ
ば、次のような効果が得られる。[Effects of the Invention] As explained above, according to the inspection method and apparatus of the present invention, the following effects can be obtained.
（ａ）簡素かつ安価な設備で、被検査物の多項目の欠点
の同時検出が可能となる。したかって、検査の能率か向
上する。(a) With simple and inexpensive equipment, it is possible to simultaneously detect multiple defects in the object to be inspected. Therefore, the efficiency of inspection will improve.
（ｂ）複数の光源を設ける必要がなし）ので、装置か小
型化し低コストとなるうえ、取り扱いら容易となる。(b) There is no need to provide a plurality of light sources), so the device can be made smaller, lower in cost, and easier to handle.
なお請求項３の装置によると、上記に加え、（ｃ）被検
査物全面の検査をする場合でも、能率的に検査ができる
。According to the apparatus of claim 3, in addition to the above, even when (c) the entire surface of the object to be inspected is inspected, the inspection can be carried out efficiently.
第１図は、本発明の実施例である検査装置を原理的に示
したしのであって、同図（ａ）は正面図、同図（ｂ）は
側面図である。第２図はその検査装置のブロック図であ
る。また第３図は、同装置のうち移動手段を示すもので
、同図（ａ）は平面図、同図上（ｂ）は立面図、同図（
ｃ）は側面図である。
Ｇ・・光発生手段、６・・ブレード（被検査物）、７・
・異物等、８．１１．１２ 透過光、９．１３．１４
・拡散光、ＩＯ・ハーフミラ−１１５−スリット、１８
・・マスク、１７．２０・・受光器（受光センサー）、
２３・・欠点検出基板、２８・・駆動モータ、２９、・
送りねし、３２・・ベースプレート、３４・・移動台、
３５・透明板（支持手段）。FIG. 1 shows the principle of an inspection apparatus according to an embodiment of the present invention, with FIG. 1(a) being a front view and FIG. 1(b) being a side view. FIG. 2 is a block diagram of the inspection device. Fig. 3 shows the moving means of the device; Fig. 3(a) is a plan view, Fig. 3(b) is an elevation view, and Fig. 3(b) is a plan view.
c) is a side view. G..Light generating means, 6..Blade (object to be inspected), 7..
・Foreign objects, etc., 8.11.12 Transmitted light, 9.13.14
・Diffuse light, IO ・Half mirror-115-slit, 18
... Mask, 17.20 ... Light receiver (light receiving sensor),
23... Defect detection board, 28... Drive motor, 29...
Feed screw, 32...Base plate, 34...Movement base,
35. Transparent plate (supporting means).
Claims (1)
光を、ハーフミラーによって二方向に分け、 一方の光については、拡散成分を除去して照射光軸上の
透過光または正反射光のみの強度を検知し、 他方の光については、照射光軸上の透過光や正反射光を
除去して拡散成分のみの強度を検知することを特徴とす
る外観検査方法。 ２、一条の光を走査しながら照射する光発生手段と、 被検査物が取り付けられる支持手段と、 被検査物を透過した光または被検査物の表面で反射した
光を二方向に分けるハーフミラーとを備え、 ハーフミラーからの一方の光路上には、光の拡散成分を
除去するスリットとともに受光センサーが配置され、 他方の光路上には、照射光軸上の透過光または正反射光
を除去するマスクとともに受光センサーが配置された ことを特徴とする外観検査装置。 ３、光発生手段による光の走査方向と直角な方向に上記
支持手段を移動する移動手段が付設された請求項２に記
載の外観検査装置。[Claims] 1. A line of light is irradiated onto the object to be inspected, and the light that has passed through the object to be inspected or the light that has been reflected on the surface of the object to be inspected is divided into two directions by a half mirror; removes the diffuse component and detects the intensity of only the transmitted light or specularly reflected light on the irradiation optical axis; for the other light, removes the transmitted light or specularly reflected light on the irradiation optical axis and detects only the diffuse component. An appearance inspection method characterized by detecting the strength of. 2. A light generating means that scans and irradiates a single line of light, a support means to which the object to be inspected is attached, and a half mirror that divides the light that has passed through the object to be inspected or the light that has been reflected on the surface of the object to be inspected into two directions. On one optical path from the half mirror, a light receiving sensor is placed along with a slit that removes the diffuse component of the light, and on the other optical path, the transmitted light or specularly reflected light on the irradiation optical axis is removed. An appearance inspection device characterized in that a light-receiving sensor is arranged along with a mask. 3. The visual inspection apparatus according to claim 2, further comprising a moving means for moving the supporting means in a direction perpendicular to the scanning direction of the light by the light generating means.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2336293A JPH04203956A (en) | 1990-11-29 | 1990-11-29 | Appearance inspection method and device |
| DE19914137141 DE4137141A1 (en) | 1990-11-29 | 1991-11-12 | Automated visual testing of objects - measuring diffuse and uniform light transmitted or reflected by object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2336293A JPH04203956A (en) | 1990-11-29 | 1990-11-29 | Appearance inspection method and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04203956A true JPH04203956A (en) | 1992-07-24 |
Family
ID=18297607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2336293A Pending JPH04203956A (en) | 1990-11-29 | 1990-11-29 | Appearance inspection method and device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH04203956A (en) |
| DE (1) | DE4137141A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19510535A1 (en) * | 1995-03-23 | 1996-09-26 | Siemens Ag | Defect detection method for glass or plastic body |
| EP2905605B1 (en) | 2014-02-06 | 2023-05-10 | Fundació Institut de Ciències Fotòniques | Apparatus for measuring light scattering |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5711417A (en) * | 1980-06-25 | 1982-01-21 | Fujikura Ltd | Refractory insulated wire |
| JPS5862543A (en) * | 1981-10-09 | 1983-04-14 | Nippon Kogaku Kk <Nikon> | Device for checking foreign matter |
| JPS59220636A (en) * | 1983-05-30 | 1984-12-12 | Konishiroku Photo Ind Co Ltd | Detector for defect of sheet-shaped product |
| JPS60222756A (en) * | 1984-04-19 | 1985-11-07 | Hitachi Ltd | Foreign matter inspector |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53135654A (en) * | 1977-05-01 | 1978-11-27 | Canon Inc | Photoelectric detecting device |
| DE3037622A1 (en) * | 1980-10-04 | 1982-04-22 | Theodor Prof. Dr.-Ing. 1000 Berlin Gast | OPTOELECTRONIC MEASURING METHOD AND DEVICES FOR DETERMINING THE SURFACE QUALITY REFLECTIVELY REFLECTING SURFACES |
| DE3637477A1 (en) * | 1986-11-04 | 1988-05-11 | Wacker Chemitronic | METHOD AND DEVICE FOR DETERMINING THE QUALITY OF SURFACES, IN PARTICULAR OF SEMICONDUCTOR DISC |
-
1990
- 1990-11-29 JP JP2336293A patent/JPH04203956A/en active Pending
-
1991
- 1991-11-12 DE DE19914137141 patent/DE4137141A1/en not_active Ceased
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5711417A (en) * | 1980-06-25 | 1982-01-21 | Fujikura Ltd | Refractory insulated wire |
| JPS5862543A (en) * | 1981-10-09 | 1983-04-14 | Nippon Kogaku Kk <Nikon> | Device for checking foreign matter |
| JPS59220636A (en) * | 1983-05-30 | 1984-12-12 | Konishiroku Photo Ind Co Ltd | Detector for defect of sheet-shaped product |
| JPS60222756A (en) * | 1984-04-19 | 1985-11-07 | Hitachi Ltd | Foreign matter inspector |
Also Published As
| Publication number | Publication date |
|---|---|
| DE4137141A1 (en) | 1992-06-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5355213A (en) | Inspection system for detecting surface flaws | |
| JP2851058B2 (en) | Inspection method of cigarette end | |
| US8072593B2 (en) | Method and apparatus for illuminating material for automated inspection | |
| KR20040086764A (en) | Method And Apparatus For Detecting Faults In Transparent Material | |
| JPH03267745A (en) | Surface property detecting method | |
| KR930010527A (en) | Surface condition inspection method using irradiation and its device | |
| WO2008100703A1 (en) | Method and apparatus for illuminating film for automated inspection | |
| CN210847221U (en) | Glass defect on-line measuring equipment | |
| JPH04203956A (en) | Appearance inspection method and device | |
| JP2008008689A (en) | Surface inspection device and surface inspection method | |
| JPH11248643A (en) | Detection device for foreign matter in transparent film | |
| JPS57161642A (en) | Inspecting device for defect of surface | |
| JPH0518900A (en) | Method and device for inspecting defect of lens | |
| JP2000314707A (en) | Device and method for inspecting surface | |
| JPS6312241B2 (en) | ||
| JP2603078B2 (en) | Defect inspection equipment | |
| JPH10185828A (en) | Method and device for inspecting defect of transparent flat body surface | |
| KR200250993Y1 (en) | Non-uniformity Inspection Device in Transmissive Objects | |
| JP2003075355A (en) | Device for inspecting defect | |
| JPS6310778B2 (en) | ||
| KR100207637B1 (en) | Inspection apparatus for defects in the panel of crt | |
| JPH03152447A (en) | Inspecting apparatus for flaw | |
| JPH03264851A (en) | Method and apparatus for inspecting defect in edge of plate material | |
| JPH046448A (en) | Laminated-plate inspecting method | |
| JPH08136473A (en) | Adjusting method and adjusting apparatus for defect detecting apparatus and reference plate therefor |