JPH042035U - - Google Patents
Info
- Publication number
- JPH042035U JPH042035U JP4178490U JP4178490U JPH042035U JP H042035 U JPH042035 U JP H042035U JP 4178490 U JP4178490 U JP 4178490U JP 4178490 U JP4178490 U JP 4178490U JP H042035 U JPH042035 U JP H042035U
- Authority
- JP
- Japan
- Prior art keywords
- self
- carrier
- during
- propulsion
- recognizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Description
第１図は本考案の自走台車の実施例を示す概略
図、第２図は従来の自走台車の概略図、第３図は
本考案の自走台車によるキヤリア識別の実施例を
示す概略図、第４図は本考案の自走台車によるキ
ヤリア識別の実施例を示す概略図。
１１，２１……自走部、１２，２２……キヤリ
ア用置き台、１４，２４，３４，４４……半導体
ウエハ、１５，２５，３５，４５……キヤリア、
１６，３６，４６……キヤリア識別記号、１７，
３７，４７……キヤリア認識装置。
FIG. 1 is a schematic diagram showing an embodiment of the self-propelled trolley of the present invention, FIG. 2 is a schematic diagram of a conventional self-propelled trolley, and FIG. 3 is a schematic diagram showing an embodiment of carrier identification using the self-propelled trolley of the present invention. 4 are schematic diagrams showing an embodiment of carrier identification using a self-propelled trolley according to the present invention. 11, 21... Self-propelled part, 12, 22... Carrier stand, 14, 24, 34, 44... Semiconductor wafer, 15, 25, 35, 45... Carrier,
16, 36, 46...Carrier identification symbol, 17,
37, 47...Carrier recognition device.
Claims (1)
用キヤリアの識別記号を認識する機能を持つこと
を特徴とする自走台車。 A self-propelled cart characterized by having a function of recognizing the identification symbol of a carrier for semiconductor wafers during self-propulsion or during carrier delivery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4178490U JPH042035U (en) | 1990-04-19 | 1990-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4178490U JPH042035U (en) | 1990-04-19 | 1990-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH042035U true JPH042035U (en) | 1992-01-09 |
Family
ID=31552751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4178490U Pending JPH042035U (en) | 1990-04-19 | 1990-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH042035U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10289939A (en) * | 1997-04-14 | 1998-10-27 | Shinko Electric Co Ltd | Unmanned conveying truck |
| JP2020523780A (en) * | 2017-05-31 | 2020-08-06 | シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド | Handling device and handling method for handling device |
-
1990
- 1990-04-19 JP JP4178490U patent/JPH042035U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10289939A (en) * | 1997-04-14 | 1998-10-27 | Shinko Electric Co Ltd | Unmanned conveying truck |
| JP2020523780A (en) * | 2017-05-31 | 2020-08-06 | シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド | Handling device and handling method for handling device |