JPH0420132B2 - - Google Patents

Info

Publication number
JPH0420132B2
JPH0420132B2 JP13893483A JP13893483A JPH0420132B2 JP H0420132 B2 JPH0420132 B2 JP H0420132B2 JP 13893483 A JP13893483 A JP 13893483A JP 13893483 A JP13893483 A JP 13893483A JP H0420132 B2 JPH0420132 B2 JP H0420132B2
Authority
JP
Japan
Prior art keywords
electrode
movable electrode
semiconductor substrate
layer
fixed electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13893483A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6031032A (ja
Inventor
Tokuji Saegusa
Eiki Yukitake
Nobuo Myaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP13893483A priority Critical patent/JPS6031032A/ja
Publication of JPS6031032A publication Critical patent/JPS6031032A/ja
Publication of JPH0420132B2 publication Critical patent/JPH0420132B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP13893483A 1983-07-29 1983-07-29 半導体容量形圧力センサ Granted JPS6031032A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13893483A JPS6031032A (ja) 1983-07-29 1983-07-29 半導体容量形圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13893483A JPS6031032A (ja) 1983-07-29 1983-07-29 半導体容量形圧力センサ

Publications (2)

Publication Number Publication Date
JPS6031032A JPS6031032A (ja) 1985-02-16
JPH0420132B2 true JPH0420132B2 (enrdf_load_stackoverflow) 1992-03-31

Family

ID=15233556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13893483A Granted JPS6031032A (ja) 1983-07-29 1983-07-29 半導体容量形圧力センサ

Country Status (1)

Country Link
JP (1) JPS6031032A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4716492A (en) * 1986-05-05 1987-12-29 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US4774626A (en) * 1986-05-05 1988-09-27 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
JP2514067Y2 (ja) * 1987-06-29 1996-10-16 京セラ株式会社 セラミック製トランスデュ−サ
JP2005214735A (ja) * 2004-01-28 2005-08-11 Kyocera Corp 圧力検出装置用パッケージ
CN104395721A (zh) * 2012-03-16 2015-03-04 维塔尔传感器控股有限公司 介电常数屏蔽

Also Published As

Publication number Publication date
JPS6031032A (ja) 1985-02-16

Similar Documents

Publication Publication Date Title
KR930003148B1 (ko) 반도체 압력 감지장치
US6051853A (en) Semiconductor pressure sensor including reference capacitor on the same substrate
US7219554B2 (en) Semiconductor pressure sensor
JPS5855732A (ja) 静電容量型圧力センサ
JP3567089B2 (ja) 静電容量式圧力センサ
US4445384A (en) Piezoelectric pressure sensor
US4612599A (en) Capacitive pressure sensor
US4531267A (en) Method for forming a pressure sensor
JP3344138B2 (ja) 半導体複合センサ
JPS6313356B2 (enrdf_load_stackoverflow)
JPH08136577A (ja) 導電性キャップおよび基板を含む電子素子エンクロージャ
JPH049727A (ja) 容量型圧力センサ
US4459855A (en) Semiconductor pressure sensor
JPH0258789B2 (enrdf_load_stackoverflow)
JPH0420130B2 (enrdf_load_stackoverflow)
JPH0420132B2 (enrdf_load_stackoverflow)
JP7485045B2 (ja) 圧力センサ構造、圧力センサ装置および圧力センサ構造の製造方法
JPH0420131B2 (enrdf_load_stackoverflow)
JPS6154266B2 (enrdf_load_stackoverflow)
US5440931A (en) Reference element for high accuracy silicon capacitive pressure sensor
US11156520B2 (en) Physical quantity sensor having a wall including first and second protrusion arrangements
GB2034970A (en) Semiconductor pressure transducer
JPH0134106Y2 (enrdf_load_stackoverflow)
JPS61155831A (ja) 半導体容量形圧力センサ
JP2715738B2 (ja) 半導体応力検出装置