JPH0420131B2 - - Google Patents

Info

Publication number
JPH0420131B2
JPH0420131B2 JP13694283A JP13694283A JPH0420131B2 JP H0420131 B2 JPH0420131 B2 JP H0420131B2 JP 13694283 A JP13694283 A JP 13694283A JP 13694283 A JP13694283 A JP 13694283A JP H0420131 B2 JPH0420131 B2 JP H0420131B2
Authority
JP
Japan
Prior art keywords
electrode
movable electrode
layer
movable
epitaxial growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13694283A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6029629A (ja
Inventor
Tokuji Saegusa
Eiki Yukitake
Nobuo Myaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP13694283A priority Critical patent/JPS6029629A/ja
Publication of JPS6029629A publication Critical patent/JPS6029629A/ja
Publication of JPH0420131B2 publication Critical patent/JPH0420131B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP13694283A 1983-07-27 1983-07-27 半導体容量形圧力センサ Granted JPS6029629A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13694283A JPS6029629A (ja) 1983-07-27 1983-07-27 半導体容量形圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13694283A JPS6029629A (ja) 1983-07-27 1983-07-27 半導体容量形圧力センサ

Publications (2)

Publication Number Publication Date
JPS6029629A JPS6029629A (ja) 1985-02-15
JPH0420131B2 true JPH0420131B2 (enrdf_load_stackoverflow) 1992-03-31

Family

ID=15187132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13694283A Granted JPS6029629A (ja) 1983-07-27 1983-07-27 半導体容量形圧力センサ

Country Status (1)

Country Link
JP (1) JPS6029629A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2211359A2 (en) 2009-01-22 2010-07-28 NGK Insulators, Ltd. A layered inductor

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62156879A (ja) * 1985-12-28 1987-07-11 Nec Corp 半導体圧力検知装置の製造方法
JP2514067Y2 (ja) * 1987-06-29 1996-10-16 京セラ株式会社 セラミック製トランスデュ−サ
JPS6478830A (en) * 1987-09-22 1989-03-24 Nippon Samikon Kk Composite of fiber-reinforced plastic and concrete or the like
JP3367113B2 (ja) 1992-04-27 2003-01-14 株式会社デンソー 加速度センサ
DE29821563U1 (de) * 1998-12-02 2000-07-13 Impella Cardiotechnik AG, 52074 Aachen Drucksensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2211359A2 (en) 2009-01-22 2010-07-28 NGK Insulators, Ltd. A layered inductor

Also Published As

Publication number Publication date
JPS6029629A (ja) 1985-02-15

Similar Documents

Publication Publication Date Title
KR930003148B1 (ko) 반도체 압력 감지장치
US5381299A (en) Capacitive pressure sensor having a substrate with a curved mesa
US6051853A (en) Semiconductor pressure sensor including reference capacitor on the same substrate
US6877383B2 (en) Capacitive type pressure sensor
US4445384A (en) Piezoelectric pressure sensor
US5936164A (en) All-silicon capacitive pressure sensor
US4531267A (en) Method for forming a pressure sensor
US7448278B2 (en) Semiconductor piezoresistive sensor and operation method thereof
US7560788B2 (en) Microelectromechanical system pressure sensor and method for making and using
JP3344138B2 (ja) 半導体複合センサ
JPS5855732A (ja) 静電容量型圧力センサ
JPS6313356B2 (enrdf_load_stackoverflow)
US5095349A (en) Semiconductor pressure sensor and method of manufacturing same
USRE34893E (en) Semiconductor pressure sensor and method of manufacturing same
US5412993A (en) Pressure detection gage for semiconductor pressure sensor
US4459855A (en) Semiconductor pressure sensor
JPH0420131B2 (enrdf_load_stackoverflow)
JPH0258789B2 (enrdf_load_stackoverflow)
JPH0420130B2 (enrdf_load_stackoverflow)
JPS6154266B2 (enrdf_load_stackoverflow)
US5440931A (en) Reference element for high accuracy silicon capacitive pressure sensor
JPH0420132B2 (enrdf_load_stackoverflow)
JPH0134106Y2 (enrdf_load_stackoverflow)
GB2034970A (en) Semiconductor pressure transducer
JPH04162779A (ja) 半導体圧力センサ