JPS6029629A - 半導体容量形圧力センサ - Google Patents
半導体容量形圧力センサInfo
- Publication number
- JPS6029629A JPS6029629A JP13694283A JP13694283A JPS6029629A JP S6029629 A JPS6029629 A JP S6029629A JP 13694283 A JP13694283 A JP 13694283A JP 13694283 A JP13694283 A JP 13694283A JP S6029629 A JPS6029629 A JP S6029629A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- layer
- epitaxial growth
- moving
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 239000012535 impurity Substances 0.000 claims abstract description 4
- 238000009413 insulation Methods 0.000 claims description 5
- 230000005074 turgor pressure Effects 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 9
- 229910052710 silicon Inorganic materials 0.000 abstract description 9
- 239000010703 silicon Substances 0.000 abstract description 9
- 239000013078 crystal Substances 0.000 abstract description 7
- 230000005684 electric field Effects 0.000 abstract description 2
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13694283A JPS6029629A (ja) | 1983-07-27 | 1983-07-27 | 半導体容量形圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13694283A JPS6029629A (ja) | 1983-07-27 | 1983-07-27 | 半導体容量形圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6029629A true JPS6029629A (ja) | 1985-02-15 |
| JPH0420131B2 JPH0420131B2 (enrdf_load_stackoverflow) | 1992-03-31 |
Family
ID=15187132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13694283A Granted JPS6029629A (ja) | 1983-07-27 | 1983-07-27 | 半導体容量形圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6029629A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62156879A (ja) * | 1985-12-28 | 1987-07-11 | Nec Corp | 半導体圧力検知装置の製造方法 |
| JPS645138U (enrdf_load_stackoverflow) * | 1987-06-29 | 1989-01-12 | ||
| JPS6478830A (en) * | 1987-09-22 | 1989-03-24 | Nippon Samikon Kk | Composite of fiber-reinforced plastic and concrete or the like |
| JP2002531822A (ja) * | 1998-12-02 | 2002-09-24 | インペラ カーディオテヒニック アクチェンゲゼルシャフト | 圧力センサ |
| USRE40347E1 (en) | 1992-04-27 | 2008-06-03 | Denso Corporation | Acceleration sensor and process for the production thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5187858B2 (ja) | 2009-01-22 | 2013-04-24 | 日本碍子株式会社 | 積層型インダクタ |
-
1983
- 1983-07-27 JP JP13694283A patent/JPS6029629A/ja active Granted
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62156879A (ja) * | 1985-12-28 | 1987-07-11 | Nec Corp | 半導体圧力検知装置の製造方法 |
| JPS645138U (enrdf_load_stackoverflow) * | 1987-06-29 | 1989-01-12 | ||
| JPS6478830A (en) * | 1987-09-22 | 1989-03-24 | Nippon Samikon Kk | Composite of fiber-reinforced plastic and concrete or the like |
| USRE40347E1 (en) | 1992-04-27 | 2008-06-03 | Denso Corporation | Acceleration sensor and process for the production thereof |
| USRE40561E1 (en) | 1992-04-27 | 2008-11-04 | Denso Corporation | Acceleration sensor and process for the production thereof |
| USRE41047E1 (en) | 1992-04-27 | 2009-12-22 | Denso Corporation | Acceleration sensor and process for the production thereof |
| USRE41213E1 (en) | 1992-04-27 | 2010-04-13 | Denso Corporation | Dynamic amount sensor and process for the production thereof |
| USRE42083E1 (en) | 1992-04-27 | 2011-02-01 | Denso Corporation | Acceleration sensor and process for the production thereof |
| JP2002531822A (ja) * | 1998-12-02 | 2002-09-24 | インペラ カーディオテヒニック アクチェンゲゼルシャフト | 圧力センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0420131B2 (enrdf_load_stackoverflow) | 1992-03-31 |
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