JPS6029629A - 半導体容量形圧力センサ - Google Patents

半導体容量形圧力センサ

Info

Publication number
JPS6029629A
JPS6029629A JP13694283A JP13694283A JPS6029629A JP S6029629 A JPS6029629 A JP S6029629A JP 13694283 A JP13694283 A JP 13694283A JP 13694283 A JP13694283 A JP 13694283A JP S6029629 A JPS6029629 A JP S6029629A
Authority
JP
Japan
Prior art keywords
electrode
layer
electrode layer
movable electrode
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13694283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0420131B2 (enrdf_load_stackoverflow
Inventor
Tokuji Saegusa
三枝　徳治
Eiki Yukitake
雪竹　栄樹
Nobuo Miyaji
宣夫 宮地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP13694283A priority Critical patent/JPS6029629A/ja
Publication of JPS6029629A publication Critical patent/JPS6029629A/ja
Publication of JPH0420131B2 publication Critical patent/JPH0420131B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP13694283A 1983-07-27 1983-07-27 半導体容量形圧力センサ Granted JPS6029629A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13694283A JPS6029629A (ja) 1983-07-27 1983-07-27 半導体容量形圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13694283A JPS6029629A (ja) 1983-07-27 1983-07-27 半導体容量形圧力センサ

Publications (2)

Publication Number Publication Date
JPS6029629A true JPS6029629A (ja) 1985-02-15
JPH0420131B2 JPH0420131B2 (enrdf_load_stackoverflow) 1992-03-31

Family

ID=15187132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13694283A Granted JPS6029629A (ja) 1983-07-27 1983-07-27 半導体容量形圧力センサ

Country Status (1)

Country Link
JP (1) JPS6029629A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62156879A (ja) * 1985-12-28 1987-07-11 Nec Corp 半導体圧力検知装置の製造方法
JPS645138U (enrdf_load_stackoverflow) * 1987-06-29 1989-01-12
JPS6478830A (en) * 1987-09-22 1989-03-24 Nippon Samikon Kk Composite of fiber-reinforced plastic and concrete or the like
JP2002531822A (ja) * 1998-12-02 2002-09-24 インペラ カーディオテヒニック アクチェンゲゼルシャフト 圧力センサ
USRE40347E1 (en) 1992-04-27 2008-06-03 Denso Corporation Acceleration sensor and process for the production thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5187858B2 (ja) 2009-01-22 2013-04-24 日本碍子株式会社 積層型インダクタ

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62156879A (ja) * 1985-12-28 1987-07-11 Nec Corp 半導体圧力検知装置の製造方法
JPS645138U (enrdf_load_stackoverflow) * 1987-06-29 1989-01-12
JPS6478830A (en) * 1987-09-22 1989-03-24 Nippon Samikon Kk Composite of fiber-reinforced plastic and concrete or the like
USRE40347E1 (en) 1992-04-27 2008-06-03 Denso Corporation Acceleration sensor and process for the production thereof
USRE40561E1 (en) 1992-04-27 2008-11-04 Denso Corporation Acceleration sensor and process for the production thereof
USRE41047E1 (en) 1992-04-27 2009-12-22 Denso Corporation Acceleration sensor and process for the production thereof
USRE41213E1 (en) 1992-04-27 2010-04-13 Denso Corporation Dynamic amount sensor and process for the production thereof
USRE42083E1 (en) 1992-04-27 2011-02-01 Denso Corporation Acceleration sensor and process for the production thereof
JP2002531822A (ja) * 1998-12-02 2002-09-24 インペラ カーディオテヒニック アクチェンゲゼルシャフト 圧力センサ

Also Published As

Publication number Publication date
JPH0420131B2 (enrdf_load_stackoverflow) 1992-03-31

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