JPH0418768B2 - - Google Patents

Info

Publication number
JPH0418768B2
JPH0418768B2 JP60080057A JP8005785A JPH0418768B2 JP H0418768 B2 JPH0418768 B2 JP H0418768B2 JP 60080057 A JP60080057 A JP 60080057A JP 8005785 A JP8005785 A JP 8005785A JP H0418768 B2 JPH0418768 B2 JP H0418768B2
Authority
JP
Japan
Prior art keywords
window
pattern
area
printed pattern
print pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60080057A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61239105A (ja
Inventor
Tatsuo Yamamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP60080057A priority Critical patent/JPS61239105A/ja
Publication of JPS61239105A publication Critical patent/JPS61239105A/ja
Publication of JPH0418768B2 publication Critical patent/JPH0418768B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Image Analysis (AREA)
JP60080057A 1985-04-17 1985-04-17 印刷パタ−ンの検査方法 Granted JPS61239105A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60080057A JPS61239105A (ja) 1985-04-17 1985-04-17 印刷パタ−ンの検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60080057A JPS61239105A (ja) 1985-04-17 1985-04-17 印刷パタ−ンの検査方法

Publications (2)

Publication Number Publication Date
JPS61239105A JPS61239105A (ja) 1986-10-24
JPH0418768B2 true JPH0418768B2 (OSRAM) 1992-03-27

Family

ID=13707603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60080057A Granted JPS61239105A (ja) 1985-04-17 1985-04-17 印刷パタ−ンの検査方法

Country Status (1)

Country Link
JP (1) JPS61239105A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2624322B2 (ja) * 1989-03-08 1997-06-25 松下電器産業株式会社 対象物の特徴部の位置の検出方法
JP6236073B2 (ja) * 2013-05-17 2017-11-22 富士機械製造株式会社 検査装置、検査方法、および、制御装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443768A (en) * 1977-09-13 1979-04-06 Dainippon Printing Co Ltd Device for measuring area ratio of net crossings
JPS5572805A (en) * 1978-11-28 1980-06-02 Fujitsu Ltd Pattern check system
JPS601505A (ja) * 1983-06-20 1985-01-07 Hitachi Ltd パタ−ン検査装置

Also Published As

Publication number Publication date
JPS61239105A (ja) 1986-10-24

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