JPH0418743A - Inspecting device for flat pack ic - Google Patents

Abstract

PURPOSE:To decide go/no go of a flat pack IC on the basis of the shift of the IC in the case of reflection of a laser beam from lead terminals and the shift of the IC in the case of reflection of the laser beam from a laser beam reflective plate and to improve the accuracy of inspection by a method wherein the flat pack IC is corrected so that it is situated at a normal position and the laser beam is scanned while being spotted from an installed laser beam scanner. CONSTITUTION:A flat pack IC (B) is placed on the upper surface of a laser beam reflective plate 16 via a transparent plate 17. In the case a laser beam scanner A is moved at a constant speed along lead terminal rows while the peripheral parts of the IC, that is, the prescribed positions closer to the end parts of lead terminals a, a..., b, b..., are scanned with a laser beam L which is emitted from the scanner, a detection level of a reflected laser beam L' at the time when the beam L is reflected from the lead terminals, a detection level of a reflected laser beam L'' in the case the beam L passes through between the terminals (a) and (a) and is reflected by the plate 16 via the plate 17 and a time difference between the times when the levels are obtained are compared with design values which are previously stored in a laser displacement detecting device. Thereby, the reflection resolution of the laser beam is enhanced, the levitation of the lead terminals of the IC, the intervals between the lead terminals and the like can be grasped more accurately and a decision an go/no go of the IC becomes more correct.

Description

[Detailed description of the invention] ゛, Industrial application field〉 Pudding L (Flat pack to a predetermined position on a board <r f
This invention relates to a device for inspecting in advance whether or not a flat pack IC is in a state suitable for automatic mounting when an IC is automatically mounted.

<Conventional technology.

Conventionally, in this type of inspection apparatus, as shown in FIG. Irradiate the IC with the light 21,
The 3A camera 22 takes a picture of the state of the flap 1 to the back TC, and an image (not shown) is used to calculate the pitch of the lead terminals, the center point 1 of the component, etc., and the levitation of the flap 1 (bend a'). For detection screen 23
There is a means based on image recognition that determines whether the flange l-pack B' is short or not based on the condition of the flange l-pack B'.

In addition, as shown in FIG. 8, a flat pack IC,
Move B from the parts supply device to the position directly above the camera, 17
-Move the suction nozzle 24 in the direction
Converts the displacement of the laser reflected light into a waveform using the height of the lead terminals provided on the four sides of the flat pack IC and the moving speed of the flat pack IC.
I inspected the terminal spacing of the lead (1) and the tog (lifting and bending).

However, in the former inspection means, the measurement accuracy is determined by the resolution of the camera, and the accuracy varies depending on the size of both sides of the inspection, the size of the k-1 part, etc. Stable illumination and a constant color and reflection state of the target parts are required.Also, results may vary depending on external light, differences in the manufacturer of the target parts, etc. It gets complicated.

In addition, the inspection means is: Lee I: Reflection state of Tozabino between terminals (there is an unstable element in this, and the inspection accuracy deteriorates.

Historically, in any of the above conventional examples, if the parallelism between the suction surface of the suction nozzle and the lever is too large, the inspection results of the flat I-back IC may become inaccurate. Disadvantages 3 Therefore, the present invention addresses the above-mentioned disadvantages of the conventional example and attempts to provide an inspection device with higher measurement accuracy.

Measures to solve the problem] - X-Y that is on a pedestal and moves in two directions at right angles.
6 movable frame, and a laser beam 71 x 111 = 1 plate supported by the XY movable frame tl: transparent plate;
On the pedestal, there is a transparent plate i′L (“
A laser beam is used to check the state of the lead terminals of the flat pack IC mounted on the transparent plate at a certain interval from one side of the flat pack IC mounted on the transparent plate using a two-way positioning board. It consists of a laser beam scanner configured to scan, and a device that receives the laser beam reflected by the reflector and analyzes it to determine pass/fail.

Two actions] Furan placed on a transparent plate 1. ,1<Tsuku TC by X-Y movement of the
The two right-angled sides of the flange are brought into contact with the two positioning sides of the two-way positioning board, and the pack IC is corrected so that it is in the correct position. A laser beam from a beam scanner is applied to the outer edge of the flat pack IC: (By scanning around the four sides of the flat pack IC while aiming a spot near the end of the lead terminal, the laser beam is reflected from the lead terminal. The difference between the case where the lead wire is used and the reflection from the laser beam reflector installed below the transparent plate is determined, and the result is compared with the standard state using a quality judgment device to determine whether the condition of the lead wire is good or bad. We are trying to sort out defective parts and prepare for automatic mounting.

Embodiment] 1. J, Sewage Invention -) To explain in detail by the embodiment shown in the drawings, as shown in Figs. 1 and 2, by a rail 2 set on a pedestal 1)' In addition to supporting the sliding table 3 that is guided in the axial direction, the tip of the cylinder 12 is placed on the support plate 11 set on the side surface of the five-piece pedestal 1 in the direction in which the sliding table 3 moves. , 1: Thread the neck, and connect the ends of the screws 1 to 14 of the cylinder 12 to the side surface of the sliding table 3g) with nuts 15, and adjust the screws 1 to 14.
By protruding and retracting the lever 14, the sliding table 3 is supported so as to be able to slide freely in the direction of the rail 2.

Next, a sliding table 5 is attached to the sliding table 3+, which is guided in the X direction by a rail 4 installed orthogonally to the rail 2, and further attached to the side surface of the sliding table 3 in the direction in which the rail 4 extends. Attach the support plate 6, and attach the cylinder 7 to the support plate 6 at its tip with a nut I-8 (=J), and at the same time, attach the tip of the piston rod 9 of the cylinder 7 to the side of the slide table 5 with a nut 1-1.
0, and the slide table 5 is held freely slidable in the X direction along the rail 11 by the protrusion and retraction of the screws 1 to 9 of the cylinder 7.

A reflector plate 16 is provided on the upper surface of the slide table 5 to reflect the laser beam so that the laser beam is not refracted on its two surfaces.
- A two-way positioning plate 19 having a transparent plate 17 of constant thickness set in close contact with each other and having two reference sides 2020° perpendicular to each other that lightly touch the upper edges of two sides of the transparent plate 17 facing each cylinder 7.12. is erected at the lower end of the vertical support piece 18 on the edge of the pedestal.

Next, moving to step 1-), first, the transparent plate 17
7. When the screws 1 to 814 of both cylinders 7.12 are in the recessed IJS state, they are closest in the direction of both cylinders 7.12. : position, and the flat pack IC, B is carried onto the transparent plate 17f- by the suction of the automatic parts feeder and left standing.

Next, by operating both cylinders 7 and 12 simultaneously to cause each piston rod 9 and 14 to protrude by a cylinder 7.12, each slide table slides on each of the X-Y movement lines.

That is, by operating the cylinder 7, the screws 1 to 9 are
moves to the right in the X direction, and moves the sliding table 5 along the rail 4 in the direction of the reference side 20 of the positioning board 19.

On the other hand, like L2, the slide table 3 moves the cylinder 12 dynamically, so that the piston rod 14 is pushed in the Y direction/X direction. ,Y
- Then, by moving in the direction of the reference side 20 of the positioning plate 19 along the guide of the rail 2, the flat pack IC, B is moved diagonally as shown in Fig. 3. Glue on 2 sides of the flat I-back IC, B-1
The ends of the terminals abut on the respective reference sides 20 and 20', and their postures are corrected.

In this way, the lead ends "i'
-a, a-b, b-5c, c, d, d, - A fixed position from the tip of As shown in FIG. While scanning predetermined positions near the ends of lead terminals a, a..., b, 1] with a laser beam emitted from laser beam scanner A, the scanner A moves at a constant speed to scan the lead terminal array. When the laser beam L is reflected from the lead terminal a as shown in FIG. 5, the detection level of the reflected laser beam L is shown as T(' in FIG. 6, and 1], when the laser beam \I passes between the lead terminals a and a, passes through the transparent plate 17, and is reflected by the surface of the reflection plate 16, the detection level of the reflected L-zashi=ノ\L"' is This is shown in FIG.

Then, the re-reflected laser beam is detected.

11' and the time difference therebetween with a set Jf value (reference value) stored in advance in the laser displacement detection device, the state of the REIT end 1' is attempted to be determined.

In other words, the state in which the lead terminal is not tightly sealed against the transparent plate above the lead terminal a is detected, and the value of Beno k II' becomes small, and the value of lead n 1(
If the value of 1 is narrow compared to (value), the condition of the lead terminal will be accurately determined. Grasping Notes 9 In addition, the above-mentioned present invention (・In order to support the back TC on the reflector plate 16-L via a transparent plate) 1. When the laser beam is reflected by one end of the wire (1'), and when the laser beam is reflected by the reflector, the laser beam is reflected by the sum of the thickness of the terminal and the thickness of the transparent plate. The difference between the output levels H and 1° corresponding to I-" and L" can be increased, and the detection accuracy, that is, the resolution can be improved.

<Effects of the Invention>- As described above, the present invention has a flat pack TC mounted on the -1-plane of the laser beam reflector via a transparent plate, so that the reflection resolution of the laser beam is improved. This makes it possible to more accurately grasp the condition of the lead end j1 of the flatpack TC, and to more accurately grasp the condition of the lead end j1 of the flat pack IC, as well as the gap between the leads and the terminal spacing.・The layer becomes accurate.

In addition, compared to the conventional means of inspecting the condition of the lead terminals of a flat pack IC with a single handle, the condition of the flat pack IC is stabilized and the inspection accuracy is improved. "Kamukai" 2.

Compared to conventional image recognition means, this method has many excellent effects, such as no need for a camera device or image processing device, and the equipment cost as a whole is low and economical.

[Brief explanation of drawings]

1 to 6 show embodiments of the present invention. Figure 1 is a plan view of the main parts of the same L, Figure 2 is a partially cutaway side view of the same, Figure 3 is a plan view of the state in which Figure 1 is in use, and Figures 1 and 1 show the current running procedure. Figure 5(a) is a side view of the same 1 showing the state in which the Rayleigh heel is reflected at the terminal and Figure 5(1) is a schematic plan view of the flat pack. The laser beam is a side view of the same F without showing the reflected state ffJ. Figure () is a diagram of the growth of time material detected by a laser beam scanner. Figures 7 and 8 are examples of the Confucian Song Dynasty. Fig. 7 is a functional diagram showing the detection means used for image recognition, and Fig. 8 is a functional diagram showing the detection means using the L-the beam. 1 Pedestal, 3, 5 Sliding base, 16 ·a reflector,
17.Transparent plate, 19.2-direction positioning board, ]1 A...Laser beam scanner flat) Back IC5 a, b, c, d Lead terminals

Claims (1)

[Claims] 1. An X that is on a pedestal and can move in two directions at right angles.
- a Y movable pedestal, a transparent plate placed via a laser beam reflecting plate supported on the XY movable pedestal; a two-direction positioning board, which is mounted on the transparent plate, and a laser beam scanner configured to scan the state of the lead terminals of the flat pack IC mounted on the transparent plate at certain intervals from the four sides of the IC using a laser beam; A flat pack IC inspection device comprising a device that receives a laser beam reflected by the reflector and analyzes it to determine pass/fail.