JPH0418434U - - Google Patents

Info

Publication number
JPH0418434U
JPH0418434U JP1990058570U JP5857090U JPH0418434U JP H0418434 U JPH0418434 U JP H0418434U JP 1990058570 U JP1990058570 U JP 1990058570U JP 5857090 U JP5857090 U JP 5857090U JP H0418434 U JPH0418434 U JP H0418434U
Authority
JP
Japan
Prior art keywords
substrate
processing liquid
discharging
nozzles
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1990058570U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0720914Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990058570U priority Critical patent/JPH0720914Y2/ja
Publication of JPH0418434U publication Critical patent/JPH0418434U/ja
Application granted granted Critical
Publication of JPH0720914Y2 publication Critical patent/JPH0720914Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)
JP1990058570U 1990-06-01 1990-06-01 基板の表面処理装置 Expired - Lifetime JPH0720914Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990058570U JPH0720914Y2 (ja) 1990-06-01 1990-06-01 基板の表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990058570U JPH0720914Y2 (ja) 1990-06-01 1990-06-01 基板の表面処理装置

Publications (2)

Publication Number Publication Date
JPH0418434U true JPH0418434U (US07534539-20090519-C00280.png) 1992-02-17
JPH0720914Y2 JPH0720914Y2 (ja) 1995-05-15

Family

ID=31584304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990058570U Expired - Lifetime JPH0720914Y2 (ja) 1990-06-01 1990-06-01 基板の表面処理装置

Country Status (1)

Country Link
JP (1) JPH0720914Y2 (US07534539-20090519-C00280.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06196859A (ja) * 1992-12-24 1994-07-15 Tokyo Kakoki Kk 化学処理装置および電着装置
JP2002239485A (ja) * 2000-12-15 2002-08-27 Shibaura Mechatronics Corp 基板の洗浄装置及び洗浄方法
WO2003100842A1 (fr) * 2002-05-23 2003-12-04 Sumitomo Precision Products Co., Ltd Dispositif de traitement de substrats equipe d'un mecanisme de transport
JP2008219043A (ja) * 2001-07-05 2008-09-18 Tokyo Electron Ltd 液処理装置および液処理方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06196859A (ja) * 1992-12-24 1994-07-15 Tokyo Kakoki Kk 化学処理装置および電着装置
JP2002239485A (ja) * 2000-12-15 2002-08-27 Shibaura Mechatronics Corp 基板の洗浄装置及び洗浄方法
JP4602567B2 (ja) * 2000-12-15 2010-12-22 芝浦メカトロニクス株式会社 基板の洗浄装置
JP2008219043A (ja) * 2001-07-05 2008-09-18 Tokyo Electron Ltd 液処理装置および液処理方法
JP4643684B2 (ja) * 2001-07-05 2011-03-02 東京エレクトロン株式会社 液処理装置および液処理方法
WO2003100842A1 (fr) * 2002-05-23 2003-12-04 Sumitomo Precision Products Co., Ltd Dispositif de traitement de substrats equipe d'un mecanisme de transport

Also Published As

Publication number Publication date
JPH0720914Y2 (ja) 1995-05-15

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