JPH0417321Y2 - - Google Patents
Info
- Publication number
- JPH0417321Y2 JPH0417321Y2 JP1987121969U JP12196987U JPH0417321Y2 JP H0417321 Y2 JPH0417321 Y2 JP H0417321Y2 JP 1987121969 U JP1987121969 U JP 1987121969U JP 12196987 U JP12196987 U JP 12196987U JP H0417321 Y2 JPH0417321 Y2 JP H0417321Y2
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- guide roller
- arm
- retaining ring
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 26
- 230000000694 effects Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 241001397809 Hakea leucoptera Species 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121969U JPH0417321Y2 (ru) | 1987-08-07 | 1987-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121969U JPH0417321Y2 (ru) | 1987-08-07 | 1987-08-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6426146U JPS6426146U (ru) | 1989-02-14 |
| JPH0417321Y2 true JPH0417321Y2 (ru) | 1992-04-17 |
Family
ID=31369465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987121969U Expired JPH0417321Y2 (ru) | 1987-08-07 | 1987-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417321Y2 (ru) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4934094A (ru) * | 1972-07-31 | 1974-03-29 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6067848U (ja) * | 1983-10-18 | 1985-05-14 | 不二越機械工業株式会社 | 研磨装置 |
-
1987
- 1987-08-07 JP JP1987121969U patent/JPH0417321Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4934094A (ru) * | 1972-07-31 | 1974-03-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6426146U (ru) | 1989-02-14 |
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