JPH0417321Y2 - - Google Patents

Description

[Detailed Description of the Invention] (Industrial Application Field) This invention relates to a polishing device such as a polishing device.

(Prior art) Generally, a polishing device has a rotating surface plate, the surface of the surface plate and the surface of the workpiece to be polished are brought into pressure contact with each other by a retaining ring, and polishing liquid (slurry) is supplied between the two. This is a device that performs polishing processing.

FIG. 4 shows a perspective view of a conventional example of this type of polishing device. A center roller 2 is provided at the center of the surface plate 1, and four guide roller devices 3 are provided on the outer periphery of the surface plate 1. A retaining ring 6 is held on the circumferential surface of each guide roller 5 and the center roller 2, and rotation of the surface plate 1 causes the retaining ring 6 to rotate. Further, a weight 6a is added to the retaining ring 6 from above as necessary.

Therefore, by rotating the surface plate 1 while holding the workpiece in each holding ring 6, the workpiece is rotated together with the holding ring 6, and the workpiece is brought into pressure contact with the surface plate 1 for polishing.

In the polishing apparatus described above, the position of the guide roller is fixed, making it difficult to automate the polishing apparatus. For this reason, the applicant has devised a polishing device with movable guide rollers (Jikkosho).
No. 62-28363, this invention, as shown in Figure 5,
A cylinder 8 is provided at the tip of the arm 7, and a guide roller 9 is connected to the tip of a drive shaft 8a of the cylinder 8. In this invention, by driving the cylinder 8, the guide roller 9 can be raised and the workpiece can be moved together with the surface plate.

(Problems to be Solved by the Invention) However, the above conventional polishing apparatus has the following problems.

Since the tip of the arm 7 on which the cylinder 8 is installed is located above the surface plate, when the guide roller 9 is moved up and down, the drive shaft 8a slides and generates minute dust, causing the surface plate to fall. This can cause machining defects. Further, slurry as a polishing liquid adheres to the movable parts of the cylinder, causing malfunction.

Further, since the cylinder 8 is provided at the tip of the arm 7, the tip of the arm 7 becomes heavy, and a large burden is placed not only on the arm 7 but also on the pivot and the like.

Therefore, this invention is intended to solve the above-mentioned problems, and aims to provide a polishing device that prevents dirt and the like from falling onto the surface plate.

(Means for Solving the Problems) This invention has the following configuration in order to solve the above problems.

That is, a center roller is arranged at the center of the surface plate, a guide roller device having a guide roller located near the periphery of the surface plate is arranged, and a holding ring holding the workpiece is placed on the surface plate, By rotating the surface plate, the holding ring is brought into contact with the peripheral surfaces of the center roller and guide roller at a predetermined position on the surface plate, and the holding ring is rotated by rotation of the surface plate to polish the workpiece. In the apparatus, the guide roller device has an arm whose tip is located above the periphery of the surface plate and whose base side extends above the base outside the surface plate, and the guide roller is provided at the tip of the arm. , a cylinder device for an arm that moves the arm together with a guide roller in a direction toward and away from the surface of the surface plate is provided on the base side, and a position where the guide roller abuts the retaining ring by the cylinder device for the arm; It is characterized by being movable between a non-contact position and a non-contact position.

(effect) Next, we will discuss the effect.

During polishing, the retaining ring is held by a center roller and a guide roller located above the surface plate.

When the retaining ring is taken out, the guide roller is moved upward together with the arm by the vertical moving means provided on the base side, so that the retaining ring can be moved together with the surface plate.

(Embodiments) Hereinafter, preferred embodiments of this invention will be described in detail based on the accompanying drawings.

FIG. 1 is a partially sectional side view showing the guide roller device. FIG. 2 is a plan view of the guide roller device.

A surface plate 10 is arranged at the center of the base of the polishing device, and a guide roller device 12 is provided facing the outer periphery of this surface plate 10.

A guide roller unit 18 having a guide roller 16 that rotates and holds the retaining ring 14 in contact with the side surface of the retaining ring 14 disposed on the surface plate 10 is rotatably supported at the tip of the arm 20.

The rear end of the arm 20 is pivotably mounted on a slide base 32 that slides on the upper surface of a fixed base 30 fixed to the upper surface of the main body 22 around the surface plate 10. Further, the fixed base 30 and the slide base 32 are slidably provided by dovetail and dovetail groove engagement. Furthermore, fixed base 3
0 is fixed by a bolt 31, and this bolt 31
The head 31a of the slide base 32 has a through hole 32a.
The position of the slide base 32 can be fixed with a bolt 31 through a washer 33.

A regulating plate 36 having an L-shaped side surface is fixed to the rear end of the fixed base 30, and this regulating plate 36 is fixed to the rear end of the fixed base 30.
A screw 38 is screwed into the upper end of the screw 6, and the tip of the screw 38 is in contact with the slide base 30. Therefore, by rotating the screw 38, the screw 38
The tip of the slide base 32 pushes the slide base 32 and moves the slide base 32 back and forth. Along with this, the arm 20 and the guide roller unit 18 move back and forth.

Two walls 2 are provided on the sides of the slide base 30.
6a, 26a stand up, and this wall body 26a, 26a
A shaft 28 is installed on the shaft 28, and the rear end of the arm 20 is fixed to the shaft as described above. Further, a bolt 21 passing vertically is screwed into the middle part of the arm 20, and the lower end of the bolt 21 is in contact with the upper surface of the fixed base 30. Then, by adjusting the bolt 21, the arm 2
The horizontal level of 0 can be adjusted.

Furthermore, the arm 20 is moved up and down by the up and down movement means. That is, a shaft 34 protrudes from inside the main body 22 at the front part of the fixed base 30, and a shaft cap 34 provided at the tip of the shaft 34
They are in contact via a. Further, the rear end of the shaft 34 is connected to a cylinder 25 inside the main body 22. Further, the shaft 34 is supported via a pin bush 37a and an O-ring 37b provided on the fixed base 30. Therefore, the cylinder 2
When the shaft 34 is driven, the shaft 34 is raised, and the arm 20 is accordingly rotated in a vertical plane via the shaft 28.

Further, a hole 20b is bored at the tip of the arm 20, a shaft 40 passes through this hole 20b, and the upper end of this shaft 40 is connected to the cap screw 5 through a washer 52.
4 are screwed together, and the shaft 40 is firmly fixed. A ball bearing 42 is fitted to the lower end of this shaft 40,
This ball bearing 42 is covered from below by a lower bearing case 44 and from above by a bearing cap 46. Connect this bearing cap 46 and lower bearing case 44 with bolts 4.
5 are integrally formed to constitute a bearing case. A step portion 44a is formed at the lower part of the lower bearing case 44, and the guide roller 16
The inner peripheral surface of the guide roller 16 follows the outer peripheral surface of the lower bearing case 44, and the guide roller 16 is fitted into the lower bearing case 44. In addition, the guide roller 16
is fixed by a bearing cap 46. Furthermore, a cap 50 that protects the guide roller 16 is fitted to the midway portion of the shaft 40.

FIG. 3 shows a partial plan view of the polishing device. The distal end of the fixed base 30 is formed into a planar triangular shape, and an auxiliary arm 59 extends from the side thereof.
A limit switch (not shown) is provided on this lower surface. This limit switch senses the passage of the retaining ring 14 on the surface plate 10.

Next, the operation of the above polishing apparatus will be described.

A rotatable center roller 6 in the center of the surface plate 10
0 is arranged, and the guide roller device 12 is arranged around the surface plate 10 as described above. The surface plate 10 rotates in the counterclockwise direction, and a guide roller 16 is positioned to prevent the retaining ring 14 placed on the surface plate 10 from moving together with the surface plate 10. Therefore, the retaining ring 14 is pressed into contact with the center roller 60 and the guide roller 16 so as to be embedded, and rotates due to the frictional force. During this rotation, the surface of the surface plate 10 comes into contact with the processing surface of the workpiece with the polishing liquid interposed therebetween, and polishing is performed.

After finishing machining the workpiece, the cylinder 25
is driven to push up the arm 20 via the shaft 34, the holding ring 14 is movable on the surface plate 10, and the holding ring 14 and the workpiece can be taken out from the side. Further, the holding ring 14 and the workpiece are supplied to the surface plate 10 from a certain position,
Set the rollers in sequence starting from the guide roller device 12 at the back.
The supplied retaining ring 14 may be retained. In this case, by using a limit switch provided on the auxiliary arm 59, the retaining ring 14
This makes automatic supply even easier. That is, the limit switch confirms whether or not the retaining ring 14 has passed, and the cylinder is driven in conjunction with this, thereby realizing automatic supply of the retaining ring 14.

In addition, in the above embodiment, the limit switch of the guide roller device is not necessarily required. In addition, in the above embodiment, the arm is rotatable at one end, and the shaft is pushed up from below to move the guide roller. Of course, many modifications may be made without departing from the spirit of the invention.

(Effects of the invention) This invention is constructed as described above, and has the following effects.

Since a vertical movement means is provided on the base at the rear end of the arm, there is no possibility that minute dust will be generated and fall onto the surface plate, causing machining defects, as in the conventional case.

Further, slurry as a polishing liquid does not adhere to the movable parts of the cylinder and cause malfunction.

Furthermore, since no cylinder is provided at the tip of the arm, no large burden is placed on the tip of the arm.

[Brief explanation of the drawing]

Fig. 1 is a cross-sectional side view of the guide roller device of the polishing device of this invention, Fig. 2 is a plan view of the guide roller device, Fig. 3 is a partial plan view of the polishing device, and Fig. 4 is a perspective view of the conventional polishing device. , FIG. 5 shows a partially sectional side view of the guide roller. 10...Surface plate, 12...Guide roller device, 1
4... Retaining ring, 16... Guide roller, 18
...Guide roller unit, 20...Arm, 2
2...Frame, 25...Cylinder.

Claims (1)

[Claim for Utility Model Registration] A center roller is arranged at the center of the surface plate, and a guide roller device having guide rollers located near the periphery of the surface plate is arranged, and a retaining ring holding the workpiece is attached to the surface plate. By rotating the surface plate, the retaining ring is brought into contact with the circumferential surfaces of the center roller and guide roller at a predetermined position on the surface plate, and the retaining ring is rotated by the rotation of the surface plate, so that the retaining ring is rotated. In a polishing device for polishing a workpiece, the guide roller device has an arm whose tip is located above the periphery of the surface plate and whose base side extends above the base outside the surface plate, and at the tip of the arm. The guide roller is provided, and a cylinder device for an arm that moves the arm together with the guide roller in a direction toward and away from the surface of the surface plate is provided on the base side, and the cylinder device for the arm allows the guide roller to move toward the retaining ring. A polishing device characterized in that it is movable between a contact position and a non-contact position.