JPS6426146U

JPS6426146U -

Info

Publication number: JPS6426146U
Application number: JP1987121969U
Authority: JP
Priority date: 1987-08-07
Filing date: 1987-08-07
Publication date: 1989-02-14
Also published as: JPH0417321Y2

Description

[Brief explanation of drawings]

第１図はこの考案の研磨装置のガイドローラ装
置の断面側面図、第２図ガイドローラ装置の平面
図、第３図は研磨装置の部分平面図、第４図は従
来の研磨装置の斜視図、第５図はガイドローラの
部分断面側面図を示す。１０……定盤、１２……ガイドローラ装置、１
４……保持リング、１６……ガイドローラ、１８
……ガイドローラユニツト、２０……アーム、２
２……フレーム、２５……シリンダ。 Fig. 1 is a cross-sectional side view of the guide roller device of the polishing device of this invention, Fig. 2 is a plan view of the guide roller device, Fig. 3 is a partial plan view of the polishing device, and Fig. 4 is a perspective view of the conventional polishing device. , FIG. 5 shows a partially sectional side view of the guide roller. 10...Surface plate, 12...Guide roller device, 1
4...Retaining ring, 16...Guide roller, 18
...Guide roller unit, 20...Arm, 2
2...Frame, 25...Cylinder.

Claims

[Claim for Utility Model Registration] A center roller is arranged at the center of the surface plate, and a guide roller device having guide rollers located near the periphery of the surface plate is arranged, and a retaining ring holding the workpiece is attached to the surface plate. By placing the retaining ring on the surface plate and rotating the surface plate, the retaining ring is brought into contact with the circumferential surfaces of the center roller and the guide roller at a predetermined position on the surface plate, and the retaining ring is rotated by rotation of the surface plate. In a polishing device for polishing a workpiece, an arm is provided with one end protruding outside the surface plate and the other end located inside and above the surface plate, and the guide roller is provided on the other end of the arm, A polishing apparatus characterized in that a vertical movement means for vertically moving the arm in conjunction with a portion of the arm located outside the surface plate is disposed outside the surface plate.