JPH0416431Y2 - - Google Patents
Info
- Publication number
- JPH0416431Y2 JPH0416431Y2 JP7060986U JP7060986U JPH0416431Y2 JP H0416431 Y2 JPH0416431 Y2 JP H0416431Y2 JP 7060986 U JP7060986 U JP 7060986U JP 7060986 U JP7060986 U JP 7060986U JP H0416431 Y2 JPH0416431 Y2 JP H0416431Y2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- sulfuric acid
- duct
- waste liquid
- storage tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 34
- 238000001816 cooling Methods 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000002699 waste material Substances 0.000 claims description 16
- 238000009423 ventilation Methods 0.000 claims description 12
- 238000000605 extraction Methods 0.000 claims description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 60
- 238000004090 dissolution Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000004063 acid-resistant material Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7060986U JPH0416431Y2 (US06826419-20041130-M00005.png) | 1986-05-13 | 1986-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7060986U JPH0416431Y2 (US06826419-20041130-M00005.png) | 1986-05-13 | 1986-05-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62182547U JPS62182547U (US06826419-20041130-M00005.png) | 1987-11-19 |
| JPH0416431Y2 true JPH0416431Y2 (US06826419-20041130-M00005.png) | 1992-04-13 |
Family
ID=30912401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7060986U Expired JPH0416431Y2 (US06826419-20041130-M00005.png) | 1986-05-13 | 1986-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416431Y2 (US06826419-20041130-M00005.png) |
-
1986
- 1986-05-13 JP JP7060986U patent/JPH0416431Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62182547U (US06826419-20041130-M00005.png) | 1987-11-19 |
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