JPH04142045A - Resin sealing method for semiconductor integrated element in surface mounting on electric wiring board - Google Patents

Resin sealing method for semiconductor integrated element in surface mounting on electric wiring board

Info

Publication number
JPH04142045A
JPH04142045A JP26583190A JP26583190A JPH04142045A JP H04142045 A JPH04142045 A JP H04142045A JP 26583190 A JP26583190 A JP 26583190A JP 26583190 A JP26583190 A JP 26583190A JP H04142045 A JPH04142045 A JP H04142045A
Authority
JP
Japan
Prior art keywords
resin
hole
sealing
stencil
squeegee
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26583190A
Other languages
Japanese (ja)
Other versions
JP2873501B2 (en
Inventor
Atsushi Okuno
敦史 奥野
Kouichirou Nagai
永井 孝一良
Tsuneichi Hashimoto
橋本 常一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON RETSUKU KK
Original Assignee
NIPPON RETSUKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON RETSUKU KK filed Critical NIPPON RETSUKU KK
Priority to JP26583190A priority Critical patent/JP2873501B2/en
Priority to US07/624,440 priority patent/US5232651A/en
Publication of JPH04142045A publication Critical patent/JPH04142045A/en
Application granted granted Critical
Publication of JP2873501B2 publication Critical patent/JP2873501B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To prevent a threading phenomenon from being caused by a method wherein a changeover operation by using a doctor blade is executed and the amount of a resin filled into a through hole is made nearly uniform on the side of the movement start point and on the side of the end point of a squeegee. CONSTITUTION:At the filling operation of a resin 5 by actuating a squeegee 7, the resin 5 inevitably has a tendency to be swollen 51 on the side of the movement end point. In succession to the filling operation, a changeover operation by using a doctor blade 8 is executed from the side of the movement end point; the resin in a part which has been swollen 51 at the changeover operation is pushed back up to the intermediate part of a movement distance. Consequently, the filling state of the resin 5 which has been pushed back becomes nearly uniform on the side of the end point and on the side of the start point. Thereby, when the resin is transcribed in this state, the resin is cut well on the side of the end point and on the side of the start point and it is possible to substantially prevent a threading phenomenon from being caused.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は電気配線基板の表面実装に於ける半導体集積素
子の樹脂封止方法に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a resin sealing method for a semiconductor integrated device in surface mounting of an electrical wiring board.

従来技術とその問題点 近時、電気配線基板例えばプリント配線基板の表面実装
に於ては、その高密度化にともない、半導体集積素子を
裸状態でプリント基板に直接搭載し、該素子とプリント
基板との電気的接続が行なわれる傾向にある。この場合
プリント基板上に裸状態で搭載された半導体集積素子は
品質維持などを目的として電気絶縁性樹脂で封止するこ
とが必要となる。
Prior art and its problems Recently, in surface mounting of electrical wiring boards, such as printed wiring boards, with the increase in density, semiconductor integrated elements are mounted directly on printed circuit boards in a bare state, and the elements and printed wiring boards are mounted directly on the printed circuit boards. There is a tendency for electrical connections to be made with In this case, the semiconductor integrated element mounted bare on the printed circuit board must be sealed with electrically insulating resin for the purpose of maintaining quality.

本出願人は先に、電気配線基板の表面実装に於て、該基
板上に裸状態で搭載された半導体集積素子を樹脂封止す
るに隙し、上記素子の搭載パターンと同一の通孔パター
ンを有する孔版を用い、該通孔と上記素子の位置合せを
行ない且つ通孔と素子間に、素子封止に必要な空隙を形
成した後、この空隙内に上記通孔を通じて、液状封止樹
脂をスキージの作動により押込み充填する電気配線基板
の表面実装に於ける半導体素子の樹脂封止方法を提案し
た(例えば特開昭64−82639号公報参照)。
The present applicant previously discovered that in surface mounting of an electrical wiring board, a semiconductor integrated element mounted in a bare state on the board was sealed with a resin, and a through-hole pattern identical to the mounting pattern of the element was found. After aligning the through hole and the element using a stencil having a stencil and forming a gap necessary for sealing the element between the through hole and the element, the liquid sealing resin is poured into the gap through the through hole. A method of resin-sealing semiconductor elements for surface mounting of electrical wiring boards was proposed, in which semiconductor elements are injected and filled by the operation of a squeegee (for example, see Japanese Patent Laid-Open No. 82639/1983).

本出願人提案の上記樹脂封止方法によれば、■ 封止樹
脂層の厚みが均一となり、安定で確実な樹脂封止効果が
得られる、 ■ 最小の樹脂封止面積での樹脂封止が可能となり、部
品搭載の高密化に対処できる、 [相] 封止樹脂層の厚みは、通孔の有効高さによって
決まるので、厚みのコントロールが容易となる、 [株] LSIなど大型のものでも一回の操作で樹脂封
止でき、素子の大型、小型の如何に拘らず安定した樹脂
封止か可能となる、 ■ 素子の搭載個数に拘らず、プリント基板を基準にし
て、1回の操作によって1枚のプリント基板を処理でき
、生産性に優れる、 などの利点が得られるが、その後の研究により、封止樹
脂層の厚みの均−性並びに生産性の点で若干の問題点が
あることが判明した。即ち先に提案の樹脂封止法によれ
ば、第5図イに示すように、スキージ(a)の移動開始
点側よりも終了点側で樹脂(b)の充填量が多くなり、
その結果第5図口の樹脂転写時に、スキージ移動終了点
側で、樹脂(b)と孔版(C)との接触面積か大きくな
り、終了点側で糸引き(d)現象を生ずる。この余りき
(d)は第5図口に示す状態で一定時間放置することに
より糸切れし、消滅するか、糸引き量が多く糸切れまで
に相当の時間がかかるので、時間的ロスが大きく生産性
が低下する。また糸切れが移動終了点側でのみ生ずるの
で、この糸切れ部分が第5図ハに示すように高くなり、
封止樹脂層の厚みか均一でなくなる。
According to the above resin sealing method proposed by the applicant, ■ the thickness of the sealing resin layer becomes uniform and a stable and reliable resin sealing effect can be obtained; ■ resin sealing with the minimum resin sealing area is possible. [Phase] The thickness of the sealing resin layer is determined by the effective height of the through hole, making it easy to control the thickness.[Co., Ltd.] Even for large devices such as LSI Resin sealing can be done in one operation, and stable resin sealing is possible regardless of whether the device is large or small. ■ Regardless of the number of devices mounted, one operation is based on the printed circuit board. However, subsequent research has revealed that there are some problems in terms of uniformity of the thickness of the sealing resin layer and productivity. It has been found. That is, according to the previously proposed resin sealing method, as shown in FIG.
As a result, when transferring the resin at the opening in FIG. 5, the contact area between the resin (b) and the stencil (C) increases on the end point side of the squeegee movement, causing the stringing phenomenon (d) on the end point side. This excess thread (d) will either break and disappear if it is left in the condition shown in Figure 5 for a certain period of time, or it will take a considerable amount of time to break due to the amount of thread being drawn, resulting in a large time loss. Productivity decreases. Furthermore, since thread breakage occurs only at the end of the movement, the thread breakage becomes high as shown in Fig. 5C.
The thickness of the sealing resin layer becomes uneven.

このような問題点を解消する一つの方策として、孔版へ
のスキージの押付は圧を高めることが考えれるが、封止
に用いる液状樹脂は粘性が高いので、押付は圧を高めて
も孔版及びスキージへのダメージが太き(なるだけで、
樹脂充填状態の不均一性解消には、あまり効果がない。
One way to solve this problem is to increase the pressure when pressing the squeegee against the stencil, but since the liquid resin used for sealing has a high viscosity, even if the pressing pressure is increased, the stencil and The damage to the squeegee will be greater (just as it becomes,
It is not very effective in eliminating non-uniformity in the resin filling state.

またスキージの移動速度を遅くすれば、樹脂充填状態の
不均一性は解消される傾向となるが、生産性を考慮し、
移動速度はあまり遅くできないので、移動速度の制御で
不均一性を解消することは実質的に困難である。
Also, if the moving speed of the squeegee is slowed down, non-uniformity in the resin filling state tends to be resolved, but considering productivity,
Since the moving speed cannot be made very slow, it is substantially difficult to eliminate non-uniformity by controlling the moving speed.

本発明はこのような従来の問題点を一掃することを目的
としてなされたものである。
The present invention has been made with the aim of eliminating such conventional problems.

問題点を解決するための手段 本発明者等は上記問題点を解消するべく鋭意研究を重ね
た結果、スキージによる樹脂充填を終えた後に、ドクタ
ナイフによる切り返しを、スキージの移動終了点側を出
発点として、移動距離の中間地点まで行うときは、上記
問題点を悉く解消し得ることを見出し、蔓に本発明を完
成するに至ったものである。
Means for Solving the Problems As a result of extensive research in order to solve the above problems, the inventors of the present invention have determined that after finishing resin filling with a squeegee, the cutting back using a doctor knife starts from the end point of the squeegee movement. The inventors have discovered that all of the above problems can be solved when moving to an intermediate point in the travel distance, and have finally completed the present invention.

即ち本発明は、電気配線基板上に裸状態で搭載された半
導体集積素子を樹脂封止するに際し、上記素子の搭載パ
ターンと同一の通孔パターンを有する孔版を用い、該通
孔と上記素子の位置合せを行ない且つ通孔と素子間に、
素子封止に必要な空隙を形成した後、この空隙内に上記
通孔を通じて液状封止樹脂をスキージの作動により押込
み充填する樹脂封止法に於て、上記スキージ作動による
液状封止樹脂の押込み充填に引続き、その移動終了点側
からドクターナイフを孔版との接触状態を保持しつつ孔
版通孔の中間部位まで移動させることにより、上記通孔
のスキージ移動開始点側と終了点側との封止樹脂充填状
態を略々均一化し、その後、孔版を基板から退去させて
封止樹脂の転写を行なうことを特徴とする電気配線基板
の表面実装に於ける半導体集積素子の樹脂封止方法に係
る。
That is, in the present invention, when resin-sealing a semiconductor integrated element mounted bare on an electric wiring board, a stencil having a through hole pattern identical to the mounting pattern of the element is used, and the through holes and the element are sealed. Perform alignment and between the through hole and the element,
In the resin sealing method, in which a gap necessary for element sealing is formed and then the liquid sealing resin is forced into the gap through the through hole and filled by the operation of a squeegee, the liquid sealing resin is forced into the gap by the operation of the squeegee. Following filling, by moving the doctor knife from the movement end point side to the middle part of the stencil hole while maintaining contact with the stencil plate, the squeegee movement start point side and end point side of the hole are sealed. A method of resin-sealing a semiconductor integrated element in surface mounting of an electrical wiring board, characterized in that the filling state of the sealing resin is made almost uniform, and then a stencil is removed from the substrate to transfer the sealing resin. .

実施例 以下に本発明樹脂封止法の一実施状況を添附図面にもと
づき説明すると、次の通りである。
EXAMPLE Below, one implementation status of the resin sealing method of the present invention will be explained based on the attached drawings.

第1図(イ)〜(ロ)は本発明樹脂封止法の基本的原理
を工程順に示す概略説明図であり、プリント基板(1)
上に裸状態で搭載された半導体集積素子(2)を樹脂封
止するために、上記素子(2)の搭載パターンと同一の
通孔パターンを有する孔版(3)が用いられる。
FIGS. 1(A) to 1(B) are schematic explanatory diagrams showing the basic principle of the resin encapsulation method of the present invention in the order of steps.
In order to resin-seal the semiconductor integrated element (2) mounted bare thereon, a stencil (3) having the same through-hole pattern as the mounting pattern of the element (2) is used.

第1図(イ)に示された第1工程に於て孔版(3)がス
クリーン印刷機(図示せず)の所定位置に固定セットさ
れ、また基板(1)が上記印刷機のスライドテーブル(
4)上に固定セットされ、更に上記孔版(3)上に所定
量の液状封止樹脂(5)が供給される。
In the first step shown in FIG. 1(a), the stencil (3) is fixedly set in a predetermined position of a screen printing machine (not shown), and the substrate (1) is placed on the slide table (not shown) of the printing machine.
4), and a predetermined amount of liquid sealing resin (5) is further supplied onto the stencil (3).

次に上記印刷機の作動をして、孔版(3)の通孔(3a
)と、基板(1)上に搭載の半導体素子(2)との位置
合せが行なわれた後、孔版(3)が基板(1)面に押付
けられ、各通孔(3a)内にこれに対応する上記素子(
2)が同心状に収納される。この収納状態が第2図に拡
大して示され、通孔(3a)と、これに収納された素子
(2)との間には、素子(2)の樹脂封止に必要な空隙
(6)が形成されている。
Next, operate the printing machine and press the through hole (3a) of the stencil (3).
) and the semiconductor element (2) mounted on the substrate (1), the stencil (3) is pressed against the surface of the substrate (1), and a stencil (3) is inserted into each through hole (3a). The corresponding element above (
2) are stored concentrically. This storage state is shown enlarged in FIG. 2, and there is a gap (6 ) is formed.

次にスキージ(7)の作動をして樹脂(5)が通孔(3
a)内の空隙(6)に押出し充填される。
Next, the squeegee (7) is operated and the resin (5) is pushed through the through hole (3).
The void (6) in a) is extruded and filled.

この状態が第3図に示されている。しかる後、第1図(
ロ)に示されるように印刷機の作動をして孔版(3)が
当初に位置まで退去され、蘇に樹脂層(5a)で封止さ
れた素子(2)が得られる。
This state is shown in FIG. After that, Figure 1 (
As shown in (b), the printing press is operated to move the stencil (3) back to its original position, thereby obtaining the element (2) sealed with the resin layer (5a).

第3図に示されるように、通孔(3a)の空隙(6)内
に充填された樹脂(5)は、スキージ(7)を常法通り
の移動速度で移動すると、従来法通り移動終了点側で、
どうしても盛上り(51)傾向となり、充填量が多くな
る。而してこの状態のままで、樹脂(5)を通孔(3a
)から基板(1)に転写させたのでは、先に従来技術と
して述べたように、終了点側で糸引き現象を生じ、この
糸引き現象は封止樹脂層の厚みの不均一原因となり、ま
た生産性低下の原因ともなる。
As shown in FIG. 3, when the squeegee (7) is moved at the usual speed, the resin (5) filled in the gap (6) of the through hole (3a) stops moving as in the conventional method. On the point side,
There is a tendency to bulge (51) and the amount of filling increases. In this state, insert the resin (5) through the hole (3a).
) to the substrate (1), as mentioned above in the prior art, a stringing phenomenon occurs on the end point side, and this stringing phenomenon causes unevenness in the thickness of the sealing resin layer. It also causes a decrease in productivity.

本発明ではこのような問題点を解消するために、第4図
(イ)〜(ニ)に示すような対策をとっている。即ち第
4図(イ)に示すようにスキージ(7)作動による樹脂
(5)の充填操作に於ては、スキージ(7)を常法に従
い移動する限り、その移動終了点側で樹脂(5)がどう
しても盛上り(51)傾向となるので、この充填操作に
引続き、第4図(ロ)に示すように移動終了点側からド
クタナイフ(8)による切り返し操作を行ない、この切
り返しで、盛上り(51)部分の樹脂を移動距離の中間
部位まで押し戻して行く。この押し戻して終了点側と開
始点側とで樹脂(5)の充填状態が略々均一となり、而
して、この状態で樹脂の転写を行なうと、第4図(ハ)
に示すように、終了点側と開始点側とで樹脂切れがよく
なり、之等の部分では実質的に糸引き現象は発生しない
In order to solve these problems, the present invention takes measures as shown in FIGS. 4(a) to 4(d). That is, as shown in FIG. 4(a), in the filling operation of the resin (5) by operating the squeegee (7), as long as the squeegee (7) is moved according to the usual method, the resin (5) will be filled at the end of its movement. ) tends to rise (51), so following this filling operation, as shown in FIG. (51) The resin in the portion is pushed back to the intermediate portion of the moving distance. By pushing back, the filling state of the resin (5) becomes almost uniform on the end point side and the starting point side, and when the resin is transferred in this state, as shown in Fig. 4 (C).
As shown in Figure 2, the resin is easily cut on the end point side and the starting point side, and virtually no stringing phenomenon occurs in these areas.

方ドクタナイフ(8)の下端部に於ては、押し戻した樹
脂との接触により糸引き(52)が生ずるが、接触面積
小により糸引き量は少なく、短時間の放置で糸切れし、
糸引きによる時間的ロスは少なくなり、生産性を改善で
きる。また糸切れは、移動距離間の中間地点で生ずるの
で、°糸切れによる樹脂は、樹脂層(5a)の上面の中
間地点に回収され、回収後両側に流動して実質的に平ら
になるので、糸切れによる厚み不均一の問題も解消でき
る。
At the lower end of the doctor knife (8), stringing (52) occurs due to contact with the pushed-back resin, but due to the small contact area, the amount of stringing is small, and the string will break if left unattended for a short time.
Time loss due to string pulling is reduced and productivity can be improved. In addition, since the thread breakage occurs at the midpoint between the travel distances, the resin due to the thread breakage is collected at the midpoint of the upper surface of the resin layer (5a), and after collection, it flows to both sides and becomes substantially flat. This also solves the problem of uneven thickness due to thread breakage.

ちなみに、本発明法による好ましい操作条件を列挙する
と、次の通りである。
Incidentally, the preferred operating conditions according to the method of the present invention are listed below.

効    果 本発明法によれば、次の通りの効果が得られる。effect According to the method of the present invention, the following effects can be obtained.

■ ドクタナイフによる切り返しにより、通孔的充填の
樹脂量が、スキージ移動開始点側と終了点側で略々均一
化するので、転写時に、開始点側はもとより、終了点側
に於ても、糸引き現象が発生することが実質的になくな
る。
■ By cutting back with a doctor knife, the amount of resin filled through the hole is approximately equalized on the start and end points of the squeegee movement. The occurrence of the pulling phenomenon is substantially eliminated.

■ 転写時に於て、糸引き現象は両地点の中間で、ドク
タナイフの下端部に於て生ずるが、糸引き量は少ないの
で、糸切れが短時間で起こり、糸切れ待ちの時間的ロス
が少なく、生産性を向上できる。
■ During transfer, stringing occurs at the lower end of the doctor knife, halfway between the two points, but the amount of stringing is small, so thread breakage occurs in a short time, reducing time loss waiting for thread breakage. , productivity can be improved.

■ 糸切れは封止樹脂層の中間部位で起こるので、糸切
れによる樹脂は上記層の中間部位から両側に等分に流動
して回収される。従って封止樹脂層の厚みは、全体が略
々均一に保持される。
(2) Since the thread breakage occurs at the middle part of the sealing resin layer, the resin caused by the thread breakage flows equally from the middle part of the layer to both sides and is recovered. Therefore, the thickness of the sealing resin layer is kept substantially uniform throughout.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(イ)、(ロ)は、本発明の詳細な説明図、第2
図は、孔版の通孔と封止対象の素子との位置合せ状況を
示す部分拡大断面図、第3図は通孔内への封止樹脂の充
填状況を示す部分拡大断面図、第4図(イ)〜(ニ)は
、本発明の詳細な説明図、第5図(イ)〜(ハ)は従来
法の説明図である。 図に於て、(1)は基板、(2)は半導体集積素子、(
3)は孔版、(4)はスライドテーブル、(5)は封止
樹脂、(6)は空隙、(7)はスキージ、(8)はドク
タナイフである。 (以 上) 第 図 第 図 第 図 a 第 図 第 図
Figures 1 (a) and (b) are detailed explanatory diagrams of the present invention;
The figure is a partially enlarged sectional view showing how the through hole of the stencil and the element to be sealed are aligned, FIG. 3 is a partially enlarged sectional view showing how the sealing resin is filled into the through hole, and FIG. (A) to (D) are detailed explanatory diagrams of the present invention, and FIGS. 5(A) to (C) are explanatory diagrams of the conventional method. In the figure, (1) is the substrate, (2) is the semiconductor integrated element, (
3) is a stencil, (4) is a slide table, (5) is a sealing resin, (6) is a gap, (7) is a squeegee, and (8) is a doctor knife. (Above) Figure Figure Figure a Figure Figure a Figure Figure

Claims (1)

【特許請求の範囲】[Claims] (1)電気配線基板上に裸状態で搭載された半導体集積
素子を樹脂封止するに際し、上記素子の搭載パターンと
同一の通孔パターンを有する孔版を用い、該通孔と上記
素子の位置合せを行ない且つ通孔と素子間に、素子封止
に必要な空隙を形成した後、この空隙内に上記通孔を通
じて液状封止樹脂をスキージの作動により押込み充填す
る樹脂封止法に於て、上記スキージ作動による液状封止
樹脂の押込み充填に引続き、その移動終了点側からドク
ターナイフを孔版との接触状態を保持しつつ孔版通孔の
中間部位まで移動させることにより、上記通孔のスキー
ジ移動開始点側と終了点側との封止樹脂充填状態を略々
均一化し、その後、孔版を基板から退去させて封止樹脂
の転写を行なうことを特徴とする電気配線基板の表面実
装に於ける半導体集積素子の樹脂封止方法。
(1) When sealing with resin a semiconductor integrated device mounted bare on an electrical wiring board, use a stencil having a through-hole pattern identical to the mounting pattern of the above-mentioned element, and align the through-hole with the above-mentioned element. In the resin sealing method, after forming a gap necessary for sealing the element between the through hole and the element, liquid sealing resin is forced into the gap by operating a squeegee through the through hole. Following the forced filling of the liquid sealing resin by the squeegee operation, the squeegee moves the through hole by moving the doctor knife from the end point side of the movement to the middle part of the stencil hole while maintaining contact with the stencil. In surface mounting of electrical wiring boards, the filling state of the sealing resin on the starting point side and the ending point side is made almost uniform, and then the stencil is removed from the board to transfer the sealing resin. A resin sealing method for semiconductor integrated devices.
JP26583190A 1989-12-11 1990-10-02 Resin sealing method for semiconductor integrated device in surface mounting of electric wiring board Expired - Lifetime JP2873501B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP26583190A JP2873501B2 (en) 1990-10-02 1990-10-02 Resin sealing method for semiconductor integrated device in surface mounting of electric wiring board
US07/624,440 US5232651A (en) 1989-12-11 1990-12-10 Method of sealing electric parts mounted on electric wiring board with resin composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26583190A JP2873501B2 (en) 1990-10-02 1990-10-02 Resin sealing method for semiconductor integrated device in surface mounting of electric wiring board

Publications (2)

Publication Number Publication Date
JPH04142045A true JPH04142045A (en) 1992-05-15
JP2873501B2 JP2873501B2 (en) 1999-03-24

Family

ID=17422662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26583190A Expired - Lifetime JP2873501B2 (en) 1989-12-11 1990-10-02 Resin sealing method for semiconductor integrated device in surface mounting of electric wiring board

Country Status (1)

Country Link
JP (1) JP2873501B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4152375B2 (en) 2004-01-14 2008-09-17 東海商事株式会社 Electronic component printing device

Also Published As

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JP2873501B2 (en) 1999-03-24

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