JP2017024326A - Paste printing device and paste printing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a paste printing device and paste printing method which can eliminate the work of wiping a paste remaining on a substrate after printing the paste and reduce waste of the paste.SOLUTION: A paste printing device 1 comprises: a substrate holding unit 14 which clamps and holds a pair of facing side faces of a substrate 2 with two main clampers 24; and a charging head 41 which charges a paste Pst to an opening KH of a film-like mask FM by sliding a blade 52 from the upper face of one of the two main clampers 24 to the upper face of the other of the two main clampers 24 through the upper face of the substrate 2 with respect to the substrate 2 held by the substrate holding unit 14. The upper face of the one of the two main clampers 24 being the start side of sliding of the blade 52 is made to be the same height as the upper face of the substrate 2, and the upper face of the one being the end side of sliding of the blade 52 is made to be the height lower than the upper face of the substrate 2.SELECTED DRAWING: Figure 16

Description

  The present invention relates to a paste printing apparatus and a paste printing method for printing a paste on an electrode of a substrate through an opening of a film-like mask attached to the upper surface of the substrate.

  Conventionally, as one method of forming a bump on an electrode of a substrate, a solder paste is filled in an opening of a film-like mask (for example, a dry film) affixed on the upper surface of the substrate, and the solder paste is removed after the film-like mask is removed. A method of melting and forming bumps is known. In such a bump forming method using a film-like mask, a paste printing apparatus for filling a paste in an opening of a film-like mask (pasting printing on an electrode) has a rectangular frame-like member on the upper surface of a substrate with a film-like mask. The blade is slid in contact with the rectangular frame-like member surrounding the opening of the film-like mask. At this time, the pair of areas facing the sliding direction of the blade on the upper surface of the frame-shaped member are used as the starting and ending terminals of the paste movement accompanying the sliding of the blade, and the blade starts to slide from one terminal. Then, it is moved so as to reach the other terminal through the upper surface of the substrate (for example, Patent Document 1).

JP 2015-44337 A

  However, when printing the paste on the substrate as described above, since the upper surface of the frame-shaped member is located at a higher position than the upper surface of the substrate, when the blade transfers from the substrate to the terminal on the end point side of the frame-shaped member, Some of the paste cannot be transferred to the frame member and remains on the edge of the frame member. Since the paste remaining on the edge remains on the substrate as it is, it is necessary to wipe off the paste remaining on the substrate after printing the paste, and the amount of paste that is wiped off is wasted. there were.

  Accordingly, an object of the present invention is to provide a paste printing apparatus and a paste printing method that do not require the operation of wiping off the paste remaining on the substrate after the paste is printed, and can reduce the waste of the paste.

  A paste printing apparatus according to the present invention is a paste printing apparatus that prints a paste on an electrode of a substrate through an opening of a film-like mask attached to the upper surface of the substrate. A substrate holding portion clamped and held by one clamp member, and the substrate held by the substrate holding portion from the upper surface of one of the two first clamp members through the upper surface of the substrate. A paste filling means for sliding the blade to the upper surface of the other one of the one clamp members and filling the opening of the film-like mask with the paste, of the two first clamp members, The upper surface on the sliding start side is the same height as the upper surface of the substrate, and the upper surface on the sliding end side of the blade is the same height as the upper surface of the substrate. There is a lower height than the upper surface of the substrate.

  The paste printing method of the present invention is a paste printing method for printing a paste on an electrode of the substrate through an opening of a film-like mask affixed to the upper surface of the substrate. A substrate holding step of clamping and holding by one clamp member, and the two second first clamps from the upper surface of one of the two first clamp members to the substrate held by the substrate holding step. A paste filling step of filling the opening of the film-like mask with a paste by sliding the blade to the upper surface of the other one of the one clamp members, of the two first clamp members, The upper surface on the sliding start side has the same height as the upper surface of the substrate, and the upper surface on the sliding end side of the blade is the same as the upper surface of the substrate. And a height lower than the height or the upper surface of the substrate.

  According to the present invention, it is not necessary to wipe off the paste remaining on the substrate after the paste is printed, and the waste of the paste can be reduced.

The perspective view of the paste printing apparatus in one embodiment of this invention (A)-(d) The fragmentary sectional view of the board | substrate with which a paste is printed by the paste printing apparatus in one embodiment of this invention The side view of the paste printing apparatus in one embodiment of this invention The top view of the paste printing apparatus in one embodiment of this invention (A) Perspective view (b) Side view of main part of paste printing apparatus according to one embodiment of the present invention The block diagram which shows the control system of the paste printing apparatus in one embodiment of this invention (A) Perspective view (b) Side view of main part of paste printing apparatus according to one embodiment of the present invention (A) Perspective view (b) Side view of main part of paste printing apparatus according to one embodiment of the present invention (A) Perspective view (b) Side view of main part of paste printing apparatus according to one embodiment of the present invention (A) Perspective view (b) Side view of main part of paste printing apparatus according to one embodiment of the present invention (A) Perspective view (b) Side view of main part of paste printing apparatus according to one embodiment of the present invention (A) Perspective view (b) Side view of main part of paste printing apparatus according to one embodiment of the present invention The top view of the paste printing apparatus in one embodiment of this invention (A) Perspective view (b) Side view of main part of paste printing apparatus according to one embodiment of the present invention (A) Perspective view (b) Side view of main part of paste printing apparatus according to one embodiment of the present invention (A) Perspective view (b) Side view of main part of paste printing apparatus according to one embodiment of the present invention (A) Perspective view (b) Side view of main part of paste printing apparatus according to one embodiment of the present invention (A) (b) The fragmentary sectional view of the filling head with which the paste printing apparatus in one embodiment of this invention is equipped, and a board | substrate

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a paste printing apparatus 1 of the present invention. The paste printing apparatus 1 is an apparatus that carries a substrate 2 and prints a paste (solder paste). In the present embodiment, the left-right direction of the paste printing apparatus 1 viewed from the operator OP is the left-right direction of the paste printing apparatus 1, and the front-rear direction of the paste printing apparatus 1 viewed from the operator OP is the front-rear direction of the paste printing apparatus 1. And Further, the front side of the paste printing apparatus 1 as viewed from the operator OP is referred to as the front of the paste printing apparatus 1, and the back side of the paste printing apparatus 1 as viewed from the operator OP is referred to as the rear of the paste printing apparatus 1. The left-right direction of the paste printing apparatus 1 is the X-axis direction, the front-back direction of the paste printing apparatus 1 is the Y-axis direction, and the up-down direction of the paste printing apparatus 1 is the Z-axis direction.

  As shown in FIG. 2A, the substrate 2 on which the paste printing apparatus 1 prints a paste exposes the electrode 2a on the upper surface of a plate-like substrate 2b having a pattern including a plurality of electrodes 2a. Thus, the solder resist 2c is provided. A film-like mask FM such as a dry film is attached to the upper surface of the solder resist 2c. The film-shaped mask FM is provided with a plurality of openings KH that communicate with the electrodes 2a.

  The paste printing apparatus 1 fills each opening KH of the film-shaped mask FM with the paste Pst in a paste filling step described later (FIG. 2B). The substrate 2 in which each opening KH of the film-shaped mask FM is filled with the paste Pst is taken out from the paste printing apparatus 1 and reflowed. As a result, the paste Pst is melted and spheroidized to form solder bumps SB (FIG. 2C). When the solder bump SB is formed in each opening KH of the film-shaped mask FM, the film-shaped mask FM is removed, and a finished substrate 2C with bumps as a finished product is generated (FIG. 2 (d)).

  Next, the configuration of the paste printing apparatus 1 will be described. As shown in FIG.1 and FIG.3, the base table 12 is provided on the base 11 with which the paste printing apparatus 1 is provided. The base table 12 is attached to the base 11 via the XYθ table 13, and is moved in the horizontal plane with respect to the base 11 by the operation of the XYθ table 13 (moving in the X and Y axis directions and around the Z axis). Rotate.

  1 and 3, the base table 12 is provided with a substrate holding unit 14 (substrate holding portion). The substrate holding unit 14 is attached to the base table 12 via the unit lifting / lowering means 15 and is lifted / lowered with respect to the base table 12 by the operation of the unit lifting / lowering means 15 (arrow A shown in FIG. 3).

  3, 4, and 5 (a) and 5 (b), the substrate holding unit 14 includes a lifting table 21 that is lifted and lowered by a unit lifting / lowering means 15. On the elevating table 21, two conveyor support portions 22 extending in the X-axis direction and facing the Y-axis direction are provided. The two conveyor support portions 22 are provided with two transport conveyors 23 facing in the Y-axis direction and two main clampers 24 (first clamp members) facing in the Y-axis direction.

  5 (a) and 5 (b), the two conveyor support portions 22 move in the Y-axis direction by the operation of the conveyor support portion moving mechanism 22A (FIG. 3), and are close to each other or separated from each other (arrow B). The two main clampers 24 are individually moved up and down by the operation of the main clamper lifting mechanism 24A (FIG. 3) (arrow C), and opened and closed in the Y-axis direction by the operation of the main clamper opening / closing mechanism 24B (FIG. 3) (arrow D). .

  In FIGS. 1 and 4, a carry-in conveyor 25 is provided on the left side of the substrate holding unit 14, and a carry-out conveyor 26 is provided on the right side of the substrate holding unit 14. The carry-in conveyor 25 receives the substrate 2 sent from the outside, conveys it to the right, and delivers it to the conveyance conveyor 23 of the substrate holding unit 14. The carry-out conveyor 26 conveys the substrate 2 received from the conveyance conveyor 23 of the substrate holding unit 14 to the right and carries it out to the outside.

  3 and 4, a lower receiving portion 27 is provided at a position between the two conveyor support portions 22 in the central portion of the lifting table 21. The lower receiving portion 27 is attached to the elevating table 21 via the lower receiving portion elevating means 28, and is moved up and down with respect to the elevating table 21 by the operation of the lower receiving portion elevating means 28 (FIGS. 5A and 5B). Arrow E) shown inside. A plurality of lower receiving pins 27 </ b> P that support the lower surface of the substrate 2 are detachably attached to the upper surface of the lower receiving portion 27.

  In FIG. 5A, two sub clampers 29 (second clamp members) facing in the X-axis direction are provided at positions before and after the lower receiving portion 27 of the lifting table 21. The two sub clampers 29 are respectively attached to the lower receiving portion 27 via the sub clamper lifting / lowering means 30 and are lifted / lowered by the operation of the sub clamper lifting / lowering means 30 (arrow F shown in FIG. 5A). The two sub clampers 29 are opened and closed in the X-axis direction by the operation of a sub clamper opening / closing mechanism 30A (FIG. 4) provided in the sub clamper lifting / lowering means 30 (arrow G shown in FIG. 5A). In the present embodiment, the dimension of the main clamper 24 in the X-axis direction is larger than the dimension of the substrate 2 in the X-axis direction, and the dimension of the auxiliary clamper 29 in the Y-axis direction is the same as the dimension of the substrate 2 in the Y-axis direction. ing.

  1, 3, and 4, a filling head 41 is provided above the substrate holding unit 14 as paste paste type paste filling means. The filling head 41 is attached to the base 11 via a head moving mechanism 42 provided on the base 11, and the filling head 41 moves in the Y-axis direction with respect to the base 11 by the operation of the head moving mechanism 42. (Arrow H shown in FIG. 3) moves up and down (Arrow J shown in FIG. 3).

  In FIG. 3, the filling head 41 includes a paste storage portion 51 that stores the paste Pst therein, and two blades 52 that protrude downward. The two blades 52 are arranged so that the lower ends extending linearly in the X-axis direction are opposed to the Y-axis direction (that is, the moving direction of the filling head 41), and each is below the center of the filling head 41. As a whole, it forms an inverted “C” shape by inclining toward it. A portion where the lower end portions of the two blades 52 face each other serves as a discharge port (paste discharge port 53) for the paste Pst communicating with the paste storage unit 51. When the paste Pst in the paste storage unit 51 is pressurized by the pressurizing means 54 such as a cylinder, the paste Pst is pressed out from the paste discharge port 53.

  The filling head 41 moves only once from the rear side to the front side or from the front side to the rear side for each substrate 2 when filling the opening KH of the film-like mask FM provided on the substrate 2 with the paste Pst. Then, the lower ends of the two blades 52 included in the filling head 41 are slid on the upper surface of the substrate 2 (the upper surface of the film-like mask FM). Therefore, when the filling head 41 is moved from the rear side to the front side with respect to a certain substrate 2 and filled with the paste Pst, the next substrate 2 moves from the front side to the rear side. Then, the paste Pst is filled.

  Next, a procedure (paste printing method) for printing the paste Pst on the substrate 2 by the paste printing apparatus 1 having the above configuration will be described. As shown in FIG. 6, operation control of each part of the paste printing apparatus 1 is performed by a control device 60 included in the paste printing apparatus 1. When the substrate 2 to be printed is sent from the outside, the carry-in conveyor 25 receives the substrate 2 and transfers it to the transfer conveyor 23 of the substrate holding unit 14 (arrow K shown in FIG. 7A). The transfer conveyor 23 receives and transfers the substrate 2 from the transfer conveyor 25 and positions it at a predetermined work position between the two main clampers 24 (FIGS. 7A and 7B). When the substrate 2 is positioned at the work position, the lower receiving portion 27 is raised (arrow E1 shown in FIGS. 8A and 8B), and the upper ends of the plurality of lower receiving pins 27P are brought into contact with the lower surface of the substrate 2. Then, the substrate 2 is supported from below (FIGS. 8A and 8B).

  When the lower receiving portion 27 supports the substrate 2 from below, the substrate holding step is executed. In the substrate holding step, first, the two conveyor support portions 22 are moved away from each other (arrow B1 shown in FIGS. 9A and 9B). As a result, when the substrate 2 is supported only by the lower receiving portion 27 (FIGS. 9A and 9B), the lower receiving portion 27 rises so that the upper surface of the substrate 2 has a specified height. The substrate 2 is lifted up (arrow E1 shown in FIGS. 10A and 10B). Also, one of the two main clampers 24 rises so that the upper surface thereof is the height of the upper surface of the substrate 2 (that is, the prescribed height), and the other one has a smaller amount of the upper surface than the height of the substrate 2. It rises to a height that is lower by ΔZ (for example, about 0.5 to 1 mm). The two sub clampers 29 rise so that the upper surfaces thereof are the height of the upper surface of the substrate 2 (arrows C1 and F1 shown in FIGS. 10A and 10B).

  Here, of the two main clampers 24, the top surface rises so as to be the height of the top surface of the substrate 2. The top side of the moving direction of the filling head 41 that moves from now on, that is, the top of the substrate 2 slides. This is the main clamper 24 on the sliding start side of the moving blade 52. Further, the height of the upper surface rises so as to be lower by a minute amount ΔZ than the specified height is the end point side in the direction of movement of the filling head 41 that moves from now on, that is, a blade that slides on the substrate 2. 52 is the main clamper 24 on the sliding end side. Here, it is assumed that the moving direction of the filling head 41 to be moved is a direction from the rear side to the front side, and the height of the upper surface of the main clamper 24 on the rear side that is the sliding start side is equal to the height of the upper surface of the substrate 2. Then, it is assumed that the two main clampers 24 are lifted so that the height of the main clamper 24 on the front side, which is the sliding end side, is lower by a minute amount ΔZ than the height of the upper surface of the substrate 2 (FIG. 10). (A), (b)).

  When the main clamper 24 and the sub clamper 29 are respectively raised, the two sub clampers 29 are moved in directions close to each other (arrow G1 shown in FIG. 11A), and the substrate 2 is clamped from the X-axis direction (FIG. 11). (A), (b)). Next, the two main clampers 24 move in directions close to each other (arrow D1 shown in FIGS. 12A and 12B), and the substrate 2 is clamped and held from the Y-axis direction (FIG. 12A). , (B)). As a result, the two side surfaces of the substrate 2 facing in the Y-axis direction are clamped by the two main clampers 24, and the two side surfaces of the substrate 2 facing in the X-axis direction are clamped by the two sub-clampers 29. The process ends (FIG. 13).

  As described above, in the present embodiment, the substrate holding unit 14 includes the two main clampers 24 when the pair of side surfaces opposed to the Y-axis direction of the substrate 2 are clamped by the two main clampers 24 in the substrate holding process. The upper surface on the side where the blade 52 starts to slide is the same height as the upper surface of the substrate 2, and the upper surface on the side where the blade 52 ends sliding is lower than the upper surface of the substrate 2. Further, when the pair of side surfaces opposed to the direction (X-axis direction) orthogonal to the sliding direction (Y-axis direction) of the blade 52 with respect to the substrate 2 is clamped by the two sub-clampers 29, The height is the same as the upper surface of the substrate 2.

  When the substrate holding step is completed, a paste filling step is performed on the substrate 2 held in the substrate holding step. In the paste filling step, the substrate holding unit 14 moves up with respect to the base table 12 (arrow A1 shown in FIG. 14A), and the filling is located above the rear main clamper 24 that is the sliding start side. The head 41 is lowered (arrow J1 shown in FIGS. 14A and 14B), and the lower ends of the two blades 52 are brought into contact with the upper surface of the main clamper 24 on the rear side which is the sliding start side (see FIG. 14 (a), (b)). Then, the filling head 41 moves from the rear to the front, and the two blades 52 are slid from the upper surface of the rear main clamper 24 through the upper surface of the substrate 2 to the upper surface of the front main clamper 24 (FIG. 15A). , (B) → FIG. 16 (a), (b) → FIGS. 17 (a), (b), an arrow H1 shown in these drawings). While the filling head 41 is moving, the pressurizing means 54 pressurizes the paste storage portion 51 of the filling head 41 and presses the paste Pst downward from the paste discharge port 53 of the filling head 41 (FIG. 15B). FIG. 16 (b) and FIG. 17 (b) show arrows P). Thereby, the paste Pst is filled in each opening KH of the film-like mask FM (paste filling step).

  In this paste filling step, the upper surface of the main clamper 24 on the sliding start side (rear side in this case) of the two main clampers 24 is at the same height as the upper surface of the substrate 2. When transferring from the main clamper 24 on the sliding start side to the substrate 2 (FIGS. 14 (a), (b) → FIGS. 15 (a), (b)), the paste Pst smoothly transfers to the upper surface of the substrate 2, No paste Pst remains on the upper surface of 2. In addition, since the upper surface of the main clamper 24 on the sliding end side (here, the front side) of the two main clampers 24 is lower than the upper surface of the substrate 2, the blade 52 of the filling head 41 slides from the substrate 2. When transferring to the main clamper 24 on the movement end side (FIGS. 16 (a), (b) → FIGS. 17 (a), (b) and FIG. 18 (a) → FIG. 18 (b)), the paste Pst is slid Transfer smoothly onto the main clamper 24 on the end side. When the paste Pst is transferred onto the main clamper 24 on the sliding end side, the paste is put on the main clamper 24 due to the difference between the upper surface of the substrate 2 and the upper surface of the main clamper 24 (this difference is equal to the above-mentioned minute amount ΔZ). Even if Pst may remain (indicated by ΔPst in FIG. 18B), this is located on the side surface for the substrate 2 and does not remain on the upper surface of the substrate 2 (FIG. 18 ( b)). That is, the paste Pst does not remain on the substrate 2 in the paste filling step.

  When the paste Pst is filled in each opening KH of the film-like mask FM as described above, the filling head 41 moves up and separates the lower ends of the two blades 52 from the upper surface of the main clamper 24 on the sliding end side. Then, after the main clamper 24 and the sub clamper 29 release the clamp of the substrate 2, the two conveyor support portions 22 move in the direction approaching each other, and then the lower receiving portion 27 is lowered. As a result, when the substrate 2 is supported by only the two conveyors 23 (FIGS. 7A and 7B), the conveyor 23 transports the substrates 2 and delivers them to the carry-out conveyor 26. Unloads the substrate 2 received from the conveyor 23 to the outside of the paste printing apparatus 1. When the substrate 2 having been filled with the paste Pst is carried out to the outside by the carry-out conveyor 26, the carry-in conveyor 25 newly carries the substrate 2 and prints the paste Pst on the substrate 2 as described above (each opening of the film-like mask FM). Fill KH with paste Pst). In the printing of the paste Pst on the next substrate 2, the filling head 41 is moved from the front side to the rear side, so that the front main clamper 24 slides and the rear main clamper 24 slides. At the end side, the height of the upper surface after rising is reversed.

  As described above, in the paste printing apparatus 1 according to the present embodiment, two opposing side surfaces of the substrate 2 are clamped by the two main clampers 24 facing the sliding direction (Y-axis direction) of the blade 52 with respect to the substrate 2. Of the two main clampers 24, the upper surface on the side where the blade 52 starts to slide is flush with the upper surface of the substrate 2, and the upper side which is the end of the blade 52 slide. The upper surface is lower than the upper surface of the substrate 2. For this reason, when the blade 52 is transferred from the main clamper 24 on the sliding start side to the substrate 2 and when transferred from the substrate 2 to the main clamper 24 on the sliding end side, the paste Pst does not remain on the upper surface of the substrate 2, and the paste The operation of wiping off the paste Pst remaining on the substrate 2 after printing of Pst becomes unnecessary. Moreover, since the work of wiping off the paste Pst is eliminated, the waste of the paste Pst can be reduced accordingly.

  In the above-described embodiment, the upper surface of the two main clampers 24 that is the sliding end side of the blade 52 is set to be lower than the upper surface of the substrate 2. You may make it become the same height. Also in this case, when the blade 52 is transferred from the substrate 2 to the main clamper 24 on the sliding end side, the paste Pst smoothly transfers to the upper surface of the main clamper 24 on the sliding end side, so that it is the same as in the above-described embodiment. The effect is obtained.

  In the above-described embodiment, the substrate holding unit 14 slides the blade 52 against the substrate 2 in addition to the two main clampers 24 that clamp the substrate 2 from the sliding direction (Y-axis direction) of the blade 52 with respect to the substrate 2. The sub-clamper 29 is configured to clamp the substrate 2 from the direction orthogonal to the moving direction (X-axis direction), but the X-axis dimension of the blade 52 is larger than the X-axis dimension of the substrate 2. However, when the blade 52 is slid only in the region of the substrate 2, the auxiliary clamper 29 is not necessarily required.

  Further, the paste filling means for filling the respective openings KH of the film-like mask FM with the paste Pst by sliding the blade 52 on the substrate 2 held by the substrate holding unit 14 is as shown in the above embodiment. The paste Pst does not have to be a type that extrudes, but may be a squeegee type that simply scrapes the paste Pst on the substrate 2 with a blade.

  Provided are a paste printing apparatus and a paste printing method that do not require an operation of wiping off a paste remaining on a substrate after printing the paste, and that can reduce waste of the paste.

1 Paste Printing Device 2 Substrate 2a Electrode 14 Substrate Holding Unit (Substrate Holding Unit)
24 Main clamper (first clamp member)
29 Secondary clamper (second clamp member)
41 Filling head (paste filling means)
52 blade FM film mask KH opening Pst paste

Claims (4)

A paste printing apparatus for printing a paste on an electrode of the substrate through an opening of a film-like mask attached to the upper surface of the substrate,
A substrate holding part for clamping and holding a pair of opposite side surfaces of the substrate by two first clamp members;
With respect to the board | substrate hold | maintained at the said board | substrate holding | maintenance part, a braid | blade is passed from the upper surface of one side of the said two 1st clamp members to the upper surface of the other one of the said 2nd 1st clamp members through the upper surface of the said board | substrate. A paste filling means for sliding and filling the opening of the film-like mask with a paste;
Of the two first clamp members, the upper surface that is the sliding start side of the blade has the same height as the upper surface of the substrate, and the upper surface that is the end side of the blade sliding is the upper surface of the substrate. A paste printing apparatus having the same height as the upper surface or a height lower than the upper surface of the substrate.   The substrate holding portion clamps a pair of side surfaces facing each other in a direction perpendicular to the sliding direction of the blade with respect to the substrate by two second clamp members, and sets the height of the upper surfaces of the two second clamp members to The paste printing apparatus according to claim 1, wherein the paste printing apparatus has the same height as the upper surface of the substrate. A paste printing method for printing a paste on an electrode of the substrate through an opening of a film-like mask attached to the upper surface of the substrate,
A substrate holding step of clamping and holding a pair of opposite side surfaces of the substrate by two first clamp members;
For the substrate held in the substrate holding step, a blade is passed from the upper surface of one of the two first clamp members to the upper surface of the other one of the two first clamp members through the upper surface of the substrate. A paste filling step of sliding and filling the opening of the film-like mask with a paste,
Of the two first clamp members, the upper surface that is the sliding start side of the blade has the same height as the upper surface of the substrate, and the upper surface that is the end side of the blade sliding is the upper surface of the substrate. A paste printing method, wherein the height is the same as the upper surface or lower than the upper surface of the substrate.   In the substrate holding step, a pair of side surfaces facing each other in a direction perpendicular to the sliding direction of the blade with respect to the substrate is clamped by two second clamp members, and the height of the upper surfaces of the two second clamp members is The paste printing method according to claim 3, wherein the paste printing method has the same height as the upper surface of the substrate.

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