JPH0413552Y2 - - Google Patents

Info

Publication number
JPH0413552Y2
JPH0413552Y2 JP1986108558U JP10855886U JPH0413552Y2 JP H0413552 Y2 JPH0413552 Y2 JP H0413552Y2 JP 1986108558 U JP1986108558 U JP 1986108558U JP 10855886 U JP10855886 U JP 10855886U JP H0413552 Y2 JPH0413552 Y2 JP H0413552Y2
Authority
JP
Japan
Prior art keywords
air blowing
membrane
slit
shaped
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986108558U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6315438U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986108558U priority Critical patent/JPH0413552Y2/ja
Publication of JPS6315438U publication Critical patent/JPS6315438U/ja
Application granted granted Critical
Publication of JPH0413552Y2 publication Critical patent/JPH0413552Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Air-Flow Control Members (AREA)
JP1986108558U 1986-07-15 1986-07-15 Expired JPH0413552Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986108558U JPH0413552Y2 (en, 2012) 1986-07-15 1986-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986108558U JPH0413552Y2 (en, 2012) 1986-07-15 1986-07-15

Publications (2)

Publication Number Publication Date
JPS6315438U JPS6315438U (en, 2012) 1988-02-01
JPH0413552Y2 true JPH0413552Y2 (en, 2012) 1992-03-30

Family

ID=30985861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986108558U Expired JPH0413552Y2 (en, 2012) 1986-07-15 1986-07-15

Country Status (1)

Country Link
JP (1) JPH0413552Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7102032B2 (ja) * 2021-07-15 2022-07-19 株式会社西部技研 クリーンブース

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4603618A (en) * 1985-05-20 1986-08-05 Soltis Charles W Air filtering and distribution for laminar flow clean room

Also Published As

Publication number Publication date
JPS6315438U (en, 2012) 1988-02-01

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