JPH0412448A - 高周波誘導結合プラズマ質量分析計 - Google Patents
高周波誘導結合プラズマ質量分析計Info
- Publication number
- JPH0412448A JPH0412448A JP2112559A JP11255990A JPH0412448A JP H0412448 A JPH0412448 A JP H0412448A JP 2112559 A JP2112559 A JP 2112559A JP 11255990 A JP11255990 A JP 11255990A JP H0412448 A JPH0412448 A JP H0412448A
- Authority
- JP
- Japan
- Prior art keywords
- parallel concave
- ion
- coupled plasma
- lens
- concave lenses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000006698 induction Effects 0.000 title description 2
- 150000002500 ions Chemical class 0.000 claims abstract description 46
- 230000003287 optical effect Effects 0.000 claims abstract description 20
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 238000009616 inductively coupled plasma Methods 0.000 claims description 30
- 238000010884 ion-beam technique Methods 0.000 abstract description 16
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 230000035699 permeability Effects 0.000 abstract 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 240000001548 Camellia japonica Species 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 235000018597 common camellia Nutrition 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000006199 nebulizer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2112559A JPH0412448A (ja) | 1990-04-27 | 1990-04-27 | 高周波誘導結合プラズマ質量分析計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2112559A JPH0412448A (ja) | 1990-04-27 | 1990-04-27 | 高周波誘導結合プラズマ質量分析計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0412448A true JPH0412448A (ja) | 1992-01-17 |
| JPH0542104B2 JPH0542104B2 (enrdf_load_stackoverflow) | 1993-06-25 |
Family
ID=14589707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2112559A Granted JPH0412448A (ja) | 1990-04-27 | 1990-04-27 | 高周波誘導結合プラズマ質量分析計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0412448A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01252772A (ja) * | 1988-03-31 | 1989-10-09 | Ulvac Corp | イオン注入装置 |
-
1990
- 1990-04-27 JP JP2112559A patent/JPH0412448A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01252772A (ja) * | 1988-03-31 | 1989-10-09 | Ulvac Corp | イオン注入装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542104B2 (enrdf_load_stackoverflow) | 1993-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2543761B2 (ja) | 誘導結合プラズマ質量分析装置 | |
| US5559337A (en) | Plasma ion source mass analyzing apparatus | |
| US8258470B2 (en) | Radio frequency lens for introducing ions into a quadrupole mass analyzer | |
| JP2817625B2 (ja) | プラズマ質量分析装置 | |
| JPH0412448A (ja) | 高周波誘導結合プラズマ質量分析計 | |
| US3622781A (en) | Mass spectrograph with double focusing | |
| JPH0541496Y2 (enrdf_load_stackoverflow) | ||
| JP3058037B2 (ja) | 質量分析装置 | |
| JPH0518842Y2 (enrdf_load_stackoverflow) | ||
| JPH06267497A (ja) | 誘導プラズマ質量分析装置 | |
| JPH0518845Y2 (enrdf_load_stackoverflow) | ||
| JP2956139B2 (ja) | 四重極マスフィルタ | |
| JP3153337B2 (ja) | 誘導結合プラズマ質量分析装置 | |
| JPH0638372Y2 (ja) | 高周波誘導結合プラズマ質量分析装置 | |
| JP2792140B2 (ja) | 高周波誘導結合プラズマ質量分析計 | |
| JP3154831B2 (ja) | 誘導結合プラズマ質量分析装置 | |
| JPH0637563Y2 (ja) | 誘導結合プラズマ質量分析装置 | |
| JPH0615392Y2 (ja) | 高周波誘導結合プラズマ質量分析計 | |
| JP3133167B2 (ja) | 誘導結合プラズマ質量分析装置 | |
| JPS61107650A (ja) | 四重極型質量分析装置 | |
| JP2956706B2 (ja) | 質量分析装置 | |
| JPS63308857A (ja) | 誘導結合プラズマ・質量分析計 | |
| JP3676540B2 (ja) | 誘導結合プラズマ質量分析装置 | |
| JPH0465059A (ja) | 高周波誘導結合プラズマ質量分析装置 | |
| JPH04106858A (ja) | 四重極質量分析計 |