JPH0412448A - 高周波誘導結合プラズマ質量分析計 - Google Patents

高周波誘導結合プラズマ質量分析計

Info

Publication number
JPH0412448A
JPH0412448A JP2112559A JP11255990A JPH0412448A JP H0412448 A JPH0412448 A JP H0412448A JP 2112559 A JP2112559 A JP 2112559A JP 11255990 A JP11255990 A JP 11255990A JP H0412448 A JPH0412448 A JP H0412448A
Authority
JP
Japan
Prior art keywords
parallel concave
ion
coupled plasma
lens
concave lenses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2112559A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542104B2 (enrdf_load_stackoverflow
Inventor
Kazuo Yamanaka
一夫 山中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP2112559A priority Critical patent/JPH0412448A/ja
Publication of JPH0412448A publication Critical patent/JPH0412448A/ja
Publication of JPH0542104B2 publication Critical patent/JPH0542104B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP2112559A 1990-04-27 1990-04-27 高周波誘導結合プラズマ質量分析計 Granted JPH0412448A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2112559A JPH0412448A (ja) 1990-04-27 1990-04-27 高周波誘導結合プラズマ質量分析計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2112559A JPH0412448A (ja) 1990-04-27 1990-04-27 高周波誘導結合プラズマ質量分析計

Publications (2)

Publication Number Publication Date
JPH0412448A true JPH0412448A (ja) 1992-01-17
JPH0542104B2 JPH0542104B2 (enrdf_load_stackoverflow) 1993-06-25

Family

ID=14589707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2112559A Granted JPH0412448A (ja) 1990-04-27 1990-04-27 高周波誘導結合プラズマ質量分析計

Country Status (1)

Country Link
JP (1) JPH0412448A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01252772A (ja) * 1988-03-31 1989-10-09 Ulvac Corp イオン注入装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01252772A (ja) * 1988-03-31 1989-10-09 Ulvac Corp イオン注入装置

Also Published As

Publication number Publication date
JPH0542104B2 (enrdf_load_stackoverflow) 1993-06-25

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