JPH0412402B2 - - Google Patents

Info

Publication number
JPH0412402B2
JPH0412402B2 JP59067509A JP6750984A JPH0412402B2 JP H0412402 B2 JPH0412402 B2 JP H0412402B2 JP 59067509 A JP59067509 A JP 59067509A JP 6750984 A JP6750984 A JP 6750984A JP H0412402 B2 JPH0412402 B2 JP H0412402B2
Authority
JP
Japan
Prior art keywords
inclination
light
inclination angle
measured
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59067509A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60211302A (ja
Inventor
Masakazu Hayashi
Tetsushi Imi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP6750984A priority Critical patent/JPS60211302A/ja
Publication of JPS60211302A publication Critical patent/JPS60211302A/ja
Publication of JPH0412402B2 publication Critical patent/JPH0412402B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP6750984A 1984-04-06 1984-04-06 倒れ測定装置 Granted JPS60211302A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6750984A JPS60211302A (ja) 1984-04-06 1984-04-06 倒れ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6750984A JPS60211302A (ja) 1984-04-06 1984-04-06 倒れ測定装置

Publications (2)

Publication Number Publication Date
JPS60211302A JPS60211302A (ja) 1985-10-23
JPH0412402B2 true JPH0412402B2 (enExample) 1992-03-04

Family

ID=13347018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6750984A Granted JPS60211302A (ja) 1984-04-06 1984-04-06 倒れ測定装置

Country Status (1)

Country Link
JP (1) JPS60211302A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010197143A (ja) * 2009-02-24 2010-09-09 Panasonic Corp ポリゴンミラー用モータのシャフトの軸倒れを測定する測定装置及び測定方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8101669A (nl) * 1981-04-03 1982-11-01 Philips Nv Inrichting voor het detekteren van de stand van een voorwerp.

Also Published As

Publication number Publication date
JPS60211302A (ja) 1985-10-23

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