JPH04118448U - Inverted evaporation equipment - Google Patents

Abstract

(57) [Summary] [Purpose] The present invention makes it possible to adjust the setting angle of an inverted pallet to a pallet frame in an inverted vapor deposition apparatus. [Configuration] Engagement plates 4 each of which engages 21 and 22 of the reversing pallet 11 are removably attached to the upper end portion 13 of the pallet frame.
1 and the engaging portion 32 of the lower end portion 14 of the pallet frame.
The engaging plate 41 is provided with various diameters necessary for setting the reversing pallet 11 at a required angle, and is replaced as necessary.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

In the present invention, when performing vacuum evaporation on multiple surfaces, the pallet is inverted after the first surface evaporation. The present invention relates to an inversion deposition apparatus for depositing a second surface.

0002

[Conventional technology]

Conventionally, regarding a reverse evaporation apparatus for performing this type of vacuum evaporation, there is a method disclosed in Utility Model Application Publication No. 2-3325. The method disclosed in Publication No. 5 is known, but inversion evaporation which generally performs vacuum evaporation is known. The reversing pallet and pallet frame in the mounting device are A pallet frame 1 having a pallet frame upper end 13 at the top and a pallet frame lower end 14 at the bottom. 2, a reversing pallet 11 is set, and the reversing pallet 11 The kit 11 connects the engaging parts 21 and 22 shown in FIG. 14 to the pallet frame 12 shown in FIG. It is engaged with the mating parts 31 and 32, respectively, and set to be freely reversible with respect to the pallet frame 12. , and the angle θ of the inverted pallet 11 with respect to the pallet frame 12 is usually fixed. It is set at an angle.

0003

[Problem that the idea aims to solve]

However, in the conventional inversion vapor deposition apparatus, the pallet of the inversion pallet 11 The set angle θ to the frame 12, that is, the angle θ of the inverted pallet 11 with respect to the evaporation source (not shown). Although the set angle θ is fixed, the set angle θ is Ideally, in order to maintain a more uniform film thickness distribution, the It is necessary to change the set angle θ of the reversing pallet 11 depending on the type of material to be deposited. Ma In addition, for this purpose, it is necessary to prepare a large number of pallet frames 12 with various angles θ. There are also problems with the manufacturing cost and storage location of the cut frame 12. Therefore, at present, various evaporation One type of pallet frame with an average set angle θ that is the optimal set angle for each kimono However, depending on the material to be deposited, the deposited material may There was a quality problem in that the film thickness was not sufficiently uniform.

0004 This invention was developed in view of the above-mentioned conventional problems, and the pallet of the inverted pallet. An object of the present invention is to provide an inversion evaporation apparatus that allows adjustment of the set angle θ to the frame.

[0005]

[Means to solve the problem]

In order to achieve the above object, the inverted vapor deposition apparatus of the present invention The setting angle to the frame can be adjusted.

[0006]

[Effect]

According to the inverted vapor deposition apparatus of the present invention, the inverted pallet is placed against the pallet frame for various coatings. Vapor deposition can be performed while setting at any angle suitable for the deposited material.

[0007]

【Example】

Embodiments of the present invention will be described below with reference to the drawings.

[0008]

[Example 1] FIG. 1 is a side view showing the pallet frame of Example 1, and FIG. 2 is a plan view of the engagement plate. The inverted pallet 11 is set at an angle θ with respect to the pallet frame 12 and is rotatable. In the inverted vapor deposition apparatus which is The engaging portion 21 of the reversing pallet 11 is connected to the engaging portion 32 of the lower end portion 14 of the pallet frame. It can be set while engaging the engaging portion 51 of the engaging plate 41 provided on the upper end portion 13 of the frame. The engagement plate 41 has holes 5 for set screws in the upper end portion 13 of the pallet frame. 2 and is removably fixed with a set screw 42.

[0009] According to this embodiment, by changing the diameter φ of the engaging plate 41, , it is possible to vary the set angle θ of the reversing pallet 11. Therefore, fix it in advance. Prepare the required number of engagement plates 41 with different diameters φ and adjust them according to the required set angle. By changing the position of the engaging part 21 of the reversing pallet 11 to the diameter of the engaging plate 41, The setting angle θ to the pallet frame 12 can be changed arbitrarily by moving the pallet in the direction becomes.

0010

[Example 2] Figure 3 is a plan view of the upper end of the pallet frame showing the configuration of Embodiment 2, and Figure 4 is an enlarged view of the engaging piece. It is a large plan view. In this embodiment, the engaging portion 22 of the reversing pallet 11 is the engaging portion of the lower end portion 14 of the pallet frame. 32, the engaging portion 21 of the reversing pallet 11 is connected to the engaging portion 21 provided at the upper end portion 13 of the pallet frame. By being engaged with the engaging portion 51 of the joining piece 61, the inverted pallet 11 is moved to the pallet frame 1. 2, and the engaging piece 61 is slid horizontally through the elongated hole 71. It is fixed with a set screw 42 so that the amount of protrusion can be continuously changed at will. It is something.

[0011] According to this embodiment, the set screw 42 is loosened and the engaging piece 61 is slid in the direction of the elongated hole 71. As the amount of protrusion of the engaging piece 61 changes while moving, the reversing pallet 11 changes. The position of the engaging portion 21 changes in the diametrical direction of the upper end portion 13, and therefore the position of the reversing pallet 11 changes. It becomes possible to continuously change the setting angle θ to the pallet frame 12. Also , since each engaging piece 61 moves independently, one pallet It is possible to independently set the angles of the reversing pallets 11 within the frame 12. Ru.

0012

[Example 3] Figures 5 and 6 show the engaging portion of the reversing pallet at the lower end of the pallet frame in Example 3. FIG. 7 is a side view showing the engagement mode of the positioning disc. In this embodiment, the engaging portion 21 of the reversing pallet 11 is the engaging portion of the upper end portion 13 of the pallet frame. 31, the engaging portion 22 of the reversing pallet 11 is connected to the engaging portion 32 of the lower end portion 14 of the pallet frame. The engaging portion 32 has a positioning mechanism as shown in FIG. A female disc 81 is attached so as to be eccentrically rotatable around a disc fixing screw 82. The positioning disk 81 adjusts the setting angle of the inverted pallet 11 to the pallet frame 12. When doing so, rotate the pallet eccentrically and invert it so that the inverted pallet 11 is at the required set angle. The position of the engaging part 22 of the pallet 11 was adjusted by continuously varying it up and down. Then, the positioning disc 81 is fixed to the lower end 14 of the pallet frame through the fixing screw hole 91. It is fixed with set screws 82.

[0013] Note that FIG. 5 shows the position where the engaging portion 22 of the reversing pallet 11 is at its highest position (the setting angle is at its highest). FIG. 6 shows a state in which the engaging portion 22 is engaged at the lowest position (set angle is small). (highest degree).

[0014] In the case of this embodiment as well, the setting angle θ of the inverted pallet 11 to the pallet frame 12 is continuous. In addition, the rotation of the positioning disk 81 of each engaging portion 32 can be changed. Since each rotation is independent, the inverted pallet 11 can be rotated within one pallet frame 12. Each can be set to its own angle.

[0015]

[Example 4] FIG. 8 is a side view of the pallet frame of Example 4, and FIG. 9 is a plan view of the rotary engagement plate. In this embodiment, the engaging portion 22 of the reversing pallet 11 is the engaging portion of the lower end portion 14 of the pallet frame. 32, the engaging portion 21 of the reversing pallet 11 is provided at the upper end portion 13 of the pallet frame. It is engaged with the engaging portion 111 of the rotating engaging plate 101, and the fitting of the rotating engaging plate 101 As shown in FIG. When fitted, the rotary engagement plate fitting part 102 is fixed through the long hole 113 for the set screw. It is fixed to the upper end part 13 of the pallet frame by a set screw 103 so as to be rotatable in angle. It consists of: In the drawings, the same members and configurations as those in Example 1 are denoted by the same reference numerals and explained. Omitted.

[0016] In the case of this embodiment as well, with the set screw 103 loosened, the rotary engagement plate 101 is inserted into the elongated hole. 113, the engaging portion 21 of the reversing pallet 11 is moved horizontally. Since it can be adjusted, the setting angle θ of the reversing pallet 11 to the pallet frame 12 can be adjusted continuously. The angle can be easily adjusted.

[0017]

[Example 5] FIG. 10 is a side view of the pallet frame of Example 5, FIG. 11 is a perspective view of the slide engagement cylinder, FIG. 12 is a sectional view of the pallet frame with the inverted pallet installed. In this embodiment, the engaging portion 22 of the reversing pallet 11 is the engaging portion of the lower end portion 14 of the pallet frame. 32, the engaging portion 21 of the reversing pallet 11 is connected to the slot provided on the upper end portion 13 of the pallet frame. Corresponding ones of the plurality of engagement elongated holes 122 provided in the circumferential direction of the ride engagement tube 121 As shown in FIG. , a fixed distance above and below via the positioning elongated hole 123 provided on the upper end 13 side of the pallet frame. It is fixed to the female threaded part 131 for a set screw with a set screw 124 so that it can be slid away. It consists of In addition, each engagement elongated hole 122 has a slide engagement tube 121. The reversing pallet that is engaged with the slide engagement tube 121 when it slides up and down a certain distance. In order to prevent the engaging portion 21 of the shaft 11 from competing against the slide engaging tube 121. It was established for the purpose of

[0018] In the drawings, the same members and configurations as those in Example 1 are denoted by the same reference numerals and explained. Omitted. In the case of this embodiment as well, when the set screw 124 is loosened, the slide engagement tube 12 1 of the inverted pallet 11 by moving the pallet frame 1 up and down through the elongated hole 123. The setting angle θ to 2 can be changed continuously, making it easy to adjust the angle. easy

[0019]

[Effect of the idea]

As explained above, according to the inverted vapor deposition apparatus of the present invention, the inverted pallet is placed on the pallet frame. By setting the pallet so that its angle can be adjusted, the inverted pallet can be adapted to various types of materials to be deposited. It is possible to set it at a certain angle.

[Brief explanation of drawings]

FIG. 1 is a side view of a pallet frame showing the configuration of Example 1 of the present invention.

FIG. 2 is a plan view of the engagement plate of Embodiment 1 of the present invention.

FIG. 3 is a plan view of the upper end portion of the pallet frame according to the second embodiment of the present invention.

FIG. 4 is a plan view of an engagement piece according to a second embodiment of the present invention.

FIG. 5 is a side view showing a state in which the reversing pallet engaging portion is engaged at the highest position at the lower end of the pallet frame according to the third embodiment of the present invention;

FIG. 6 is a side view showing a state in which the reversing pallet engaging portion is engaged at the lowest position at the lower end of the pallet frame according to the third embodiment of the present invention;

FIG. 7 is a plan view of a positioning disk according to a third embodiment of the present invention.

FIG. 8 is a side view of a pallet frame showing the configuration of Example 4 of the present invention.

FIG. 9 is a plan view of a rotary engagement plate according to a fourth embodiment of the present invention.

FIG. 10 is a side view of a pallet frame showing the configuration of Example 5 of the present invention.

FIG. 11 is a perspective view of a slide engagement tube according to a fifth embodiment of the present invention.

FIG. 12 is a cross-sectional view of a pallet frame in which a reversible pallet is installed in Embodiment 5 of the present invention.

FIG. 13 is a perspective view of a conventional reverse evaporation apparatus pallet frame.

FIG. 14 is a plan view of an inversion pallet of a conventional inversion deposition apparatus.

FIG. 15 is a side view of a pallet frame showing the configuration of a conventional reverse evaporation apparatus.

[Explanation of symbols]

11 Inverted palette 12 Pallet frame 13 Upper end of pallet frame 14 Lower end of pallet frame 21, 22 Engagement part 31 Upper end engaging part 32 Lower end engagement part 41 Engagement plate 42, 43, 103, 124 Set screw 51 Engagement part 52 Hole for set screw 61 Engagement piece 71 Long hole 81 Positioning disk 82 Disk fixing screw 91 Fixing screw hole 101 Rotating engagement plate 102 Rotating engagement plate fitting part 111 Engagement part 112 Fitting hole 113 Long hole for set screw 121 Slide engagement tube 122 Engagement long hole 123 Positioning long hole 131 Female thread part

Claims (1)

[Scope of utility model registration request] 1. An inversion vapor deposition apparatus for inverting a pallet after vapor deposition on a first surface to vapor-deposit a second surface, characterized in that the inversion pallet is set on a pallet frame so that its set angle can be adjusted. Inverted evaporation equipment.