JPH0410738B2 - - Google Patents

Info

Publication number
JPH0410738B2
JPH0410738B2 JP58165557A JP16555783A JPH0410738B2 JP H0410738 B2 JPH0410738 B2 JP H0410738B2 JP 58165557 A JP58165557 A JP 58165557A JP 16555783 A JP16555783 A JP 16555783A JP H0410738 B2 JPH0410738 B2 JP H0410738B2
Authority
JP
Japan
Prior art keywords
photoresist film
film
forming
electrode layer
lift
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58165557A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6057632A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58165557A priority Critical patent/JPS6057632A/ja
Publication of JPS6057632A publication Critical patent/JPS6057632A/ja
Publication of JPH0410738B2 publication Critical patent/JPH0410738B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
JP58165557A 1983-09-08 1983-09-08 半導体装置の製造方法 Granted JPS6057632A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58165557A JPS6057632A (ja) 1983-09-08 1983-09-08 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58165557A JPS6057632A (ja) 1983-09-08 1983-09-08 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6057632A JPS6057632A (ja) 1985-04-03
JPH0410738B2 true JPH0410738B2 (enFirst) 1992-02-26

Family

ID=15814621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58165557A Granted JPS6057632A (ja) 1983-09-08 1983-09-08 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6057632A (enFirst)

Also Published As

Publication number Publication date
JPS6057632A (ja) 1985-04-03

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