JPH04106965A - Cooling apparatus - Google Patents

Cooling apparatus

Info

Publication number
JPH04106965A
JPH04106965A JP22458090A JP22458090A JPH04106965A JP H04106965 A JPH04106965 A JP H04106965A JP 22458090 A JP22458090 A JP 22458090A JP 22458090 A JP22458090 A JP 22458090A JP H04106965 A JPH04106965 A JP H04106965A
Authority
JP
Japan
Prior art keywords
heat
semiconductor element
pipe
partition
heat dissipation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22458090A
Other languages
Japanese (ja)
Inventor
Toshiya Ishikawa
敏也 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Original Assignee
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Corp, Meidensha Electric Manufacturing Co Ltd filed Critical Meidensha Corp
Priority to JP22458090A priority Critical patent/JPH04106965A/en
Publication of JPH04106965A publication Critical patent/JPH04106965A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prepare a compact and light-weight cooling apparatus able to endure a temporary overheating by painting the surface of a heat radiating fin spottily with paint containing microcapsules so as to form microcapsule colonies. CONSTITUTION:On the surface of a relatively thin heat radiating fin 11 mounted to a semiconductor element A, microcapsule colonies 12 are installed spottily painted with paint containing cooling liquid microcapsules. This spot colony 12 is painted with paint made of epoxy adhesive or the like as matrix with microcapsules 13 containing coolant 14 having large specific heat such as water or anmonium distributed therein. In the case shortcircuit failure or the like occurs and as a result element A is unusually overheated, coolant contained in capsules 13 immediately expands, runs out breaking through thermally softened shells of capsules, and vaporises taking peripheral heat away. With this, the fin 11 is rapidly cooled and element A is protected from being destroyed. With this, since the volumed of fin 11 is reduced, thereby being able to prepare a compact and light-weight cooling apparatus.

Description

【発明の詳細な説明】 A、産業上の利用分野 本発明は、半導体素子1回路素子又は電気回路等の一時
的過熱による熱破壊を防止する冷却装置に関する。
DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a cooling device that prevents thermal destruction of semiconductor devices, single-circuit devices, electric circuits, etc. due to temporary overheating.

B1発明の概要 本発明の冷却装置は、半導体素子等が異常温度になると
1.マイクロカプセル、ボンベ、圧力タンク或はヒート
パイプ中の管等における殻が破れ、又は溶融栓が溶け、
或いは安全弁か開いて中の液体が噴出し気化して、気化
時の潜熱による吸熱により半導体素子等が取着されてい
る放熱フィン。
B1 Summary of the Invention The cooling device of the present invention has the following features: 1. When a semiconductor element or the like reaches an abnormal temperature; The shells of microcapsules, cylinders, pressure tanks, tubes in heat pipes, etc. break, or the melting plug melts.
Alternatively, a heat dissipating fin to which a semiconductor element or the like is attached is absorbed by the latent heat generated when the safety valve is opened and the liquid inside is spouted out and vaporized.

伝熱基板、圧力タンク、ヒ1−ドパイブの吸熱部等を冷
却して半導体素子等の熱破壊を防止するものである。
It cools heat transfer substrates, pressure tanks, heat absorbing parts of heat pipes, etc. to prevent thermal damage to semiconductor elements and the like.

C1従来の技術 従来、パワトランジスタやサイリスタ等の電力変換用半
導体素子は、過熱を防ぐために、熱伝導率の高いAI等
でできた放熱フィンを有する放熱器を取り付けているか
、フィンから空気への熱伝達能率は極めて低く放熱に時
間がかかるため、−時的に熱をフィンの内部に蓄えてお
かなければならないので、フィンの肉厚を厚くするなど
して体積を稼いで、ある程度の熱容量を持たせている。
C1 Conventional technology Conventionally, in order to prevent overheating, semiconductor devices for power conversion such as power transistors and thyristors are equipped with heat sinks with heat dissipation fins made of AI or other materials with high thermal conductivity, or are equipped with heat dissipation fins made of materials such as AI that have high thermal conductivity. Since heat transfer efficiency is extremely low and it takes time to dissipate heat, it is necessary to temporarily store heat inside the fins. Therefore, by increasing the volume of the fins by increasing the wall thickness of the fins, a certain amount of heat capacity can be achieved. I have it.

B1発明が解決しようとする課題 ところで、前記放熱器のフィンの肉厚は、短絡等により
一時的に高温に過熱する場合も考慮して十分なさに設計
する必要がある。このフィンの肉厚は平常状態において
は不必要に厚いため、本来ならばもっと薄く小さくて良
いはずの放熱フィンの部分が異常に大きくなるため盤目
体も大きくなり、小型軽量化の妨げになっていた。
B1 Problems to be Solved by the Invention By the way, the thickness of the fins of the heat radiator needs to be designed to be sufficient in consideration of the possibility of temporary overheating to a high temperature due to a short circuit or the like. The wall thickness of this fin is unnecessarily thick under normal conditions, so the portion of the heat dissipation fin that should normally be thinner and smaller becomes abnormally large, making the board larger and hindering efforts to make it smaller and lighter. was.

本発明は、従来放熱器の有するこのような問題点に江み
てなされたものであり、その目的とするところは、小型
軽量にて一時的な過熱に対処しうる冷却装置を提供する
ことにある。
The present invention has been made in view of these problems with conventional heat radiators, and its purpose is to provide a cooling device that is small and lightweight and can cope with temporary overheating. .

E1課題を解決するための手段 上記目的を達成するために、本発明の冷却装置は、半導
体素子等が取着される放熱フィンの表面に、冷却液が内
包され異常温度時に冷却液の膨張等により壊われるマイ
クロカプセルを含有する塗料をマイクロカプセルコロニ
ーが形成されるように斑点状に塗布してなるものである
E1 Means for Solving Problems In order to achieve the above object, the cooling device of the present invention includes a cooling liquid contained in the surface of a heat dissipation fin to which a semiconductor element or the like is attached, and prevents expansion of the cooling liquid at abnormal temperatures. It is made by applying a paint containing microcapsules that can be broken down in spots to form microcapsule colonies.

同様の目的で、多数の短柱を介して放熱フィンが設けら
れた半導体素子等が取着される伝熱基板と、前記放熱フ
ィンの中心部に口部が前記伝熱板に当接するように設け
られた異常温度により溶融する溶融栓で封じられた小形
液化ガスボンベとより構成してもよい。
For the same purpose, a heat transfer substrate to which a semiconductor element or the like is attached is provided with heat dissipation fins via a large number of short columns, and a center portion of the heat dissipation fin is provided with a mouth portion in contact with the heat transfer plate. It may also be configured with a small liquefied gas cylinder sealed with a melting plug that melts due to the abnormal temperature provided.

又は、内部に水及び多孔質金属片が収容され異常温度で
動作する安全弁を備えた一方の面に半導体素子等が取着
される圧力タンクと、前記圧力タンクの他方の面に固着
された放熱フィンで構成することもできる。
Alternatively, a pressure tank that houses water and a porous metal piece inside, has a safety valve that operates at abnormal temperatures, and has a semiconductor element, etc. attached to one side, and a heat dissipator that is fixed to the other side of the pressure tank. It can also be composed of fins.

或いは、半導体素子等が一端に取着され他端側に中心部
に孔の穿いた仕切りを有し前記一端と仕切りとの間の内
面にウィックが施され他端側に放熱フィンが設けられた
ヒートパイプ機能を有する外側パイプと、一端が前記外
側パイプの一端の内面に異常温度で溶融する溶融栓で支
持されると共に他端が前記仕切りの中心部に固着された
極細パイプと、前記外側パイプの仕切りと後端との間に
設げられたピストン及び圧縮ばねと、前記極細パイプと
前記外側パイプにおける仕切りとピストンとの間に入れ
られた冷媒液体と、前記外側パイプに設けられた外側パ
イプの異常内圧を抜くための安全弁とから構成してもよ
い。
Alternatively, a semiconductor element or the like is attached to one end, a partition with a hole in the center is provided at the other end, a wick is provided on the inner surface between the one end and the partition, and a heat dissipation fin is provided at the other end. an outer pipe having a heat pipe function; an ultra-thin pipe having one end supported by a melting plug that melts at an abnormal temperature on the inner surface of one end of the outer pipe and the other end fixed to the center of the partition; and the outer pipe. A piston and a compression spring provided between the partition and the rear end of the pipe, a refrigerant liquid placed between the partition and the piston in the ultra-thin pipe and the outer pipe, and an outer pipe provided in the outer pipe. It may also consist of a safety valve for releasing abnormal internal pressure.

F0作用 請求項(1)について、通常時は半導体素子等の熱は放
熱フィンのマイクロコロニーのない部分から放熱される
。半導体素子等が異常過熱すると、マイクロカプセル中
の冷却液が膨張し熱で軟化したマーj′クロカプセルの
殻を破って飛び出し周囲の熱を奪って気化し、放熱フィ
ンを急激に冷却して半導体素子等を熱破壊から守る。
Regarding F0 effect claim (1), normally the heat of the semiconductor element, etc. is radiated from the portion of the radiation fin where there are no microcolonies. When a semiconductor device or the like overheats abnormally, the cooling liquid in the microcapsule expands, breaks the shell of the microcapsule that has been softened by the heat, and jumps out, absorbing heat from the surrounding area and vaporizing, rapidly cooling the heat dissipation fins and cooling the semiconductor. Protects elements etc. from thermal damage.

請求項(2)について、通常時は半導体素子等の熱は伝
熱板と短柱を通って放熱フィンにより放熱される。半導
体素子等が異常過熱すると、伝熱板に当接している溶融
栓が溶け、ボンベ内の液化ガスか気化すると共に噴出し
、外部に放散する。
Regarding claim (2), under normal conditions, heat from the semiconductor element, etc. is radiated by the heat radiating fins through the heat exchanger plate and the short pillars. When a semiconductor element or the like overheats abnormally, the melting plug that is in contact with the heat exchanger plate melts, and the liquefied gas in the cylinder vaporizes and blows out, dissipating to the outside.

このとぎ、伝熱板と短板から熱を急速に奪うため半導体
素子等は熱破壊から守られる。
At this point, heat is rapidly removed from the heat exchanger plate and the short plates, so semiconductor elements and the like are protected from thermal damage.

請求項(3)について、通常時は半導体素子等の熱はタ
ンクを介して放熱フィンにより放熱される。半導体素子
等が異常過熱すると、タンク内の水か沸騰して内圧が急
上昇し、安全弁が開いて水蒸気を放出して内圧を下げ水
温を低下させる。このため、半導体素子等の熱破壊は防
止される。
Regarding claim (3), during normal times, heat from the semiconductor elements, etc. is radiated by the heat radiation fins via the tank. When a semiconductor device or the like overheats abnormally, the water in the tank boils and the internal pressure rises rapidly, and the safety valve opens to release water vapor, lowering the internal pressure and water temperature. Therefore, thermal damage to semiconductor elements and the like is prevented.

請求項(4)について、通常時は半導体素子等の熱はヒ
ートパイプとして機能する内側にウィックを有する外側
パイプにより放熱フィンに伝達されフィンより放熱され
る。半導体素子等が異常加熱すると、溶融栓が溶はピス
トンを介して圧縮ばねで加圧された冷媒液体は極細パイ
プより噴出し、吸熱側の高温面に当って気化し吸熱側を
急速に冷却する。このため、半導体素子等の熱破壊は防
止される。液体の気化により外側パイプ内圧が高まると
安全弁か作動し内圧は安全に保たれる。
Regarding claim (4), under normal conditions, heat from the semiconductor element, etc. is transmitted to the heat radiation fins by the outer pipe having a wick inside that functions as a heat pipe, and is radiated from the fins. When a semiconductor element or the like heats up abnormally, the refrigerant liquid pressurized by the compression spring is ejected from the ultra-thin pipe via the piston, vaporizes when it hits the high temperature surface on the endothermic side, and rapidly cools the endothermic side. . Therefore, thermal damage to semiconductor elements and the like is prevented. When the internal pressure of the outer pipe increases due to vaporization of the liquid, a safety valve is activated and the internal pressure is maintained safely.

G、実施例 本発明の実施例について図面を参照して説明する。G. Example Embodiments of the present invention will be described with reference to the drawings.

実施例1 第1図において、Aは半導体素子、10は冷却装置であ
る。11は半導体素子に取着された比較的薄い放熱フィ
ン、12は斑点状にフィン11の表面に冷却液内包の塗
料を塗布したマイクロカプセルコロニーである。このマ
イクロカプセルコロニー12は、第2図に示すように、
水、アンモニア等の比熱の大きい冷却液14を内包した
マイクロカプセル13を第3図に示すように、エポキシ
等の接着剤をマトリックス15とした塗料に分散し塗布
したものである。
Embodiment 1 In FIG. 1, A is a semiconductor element, and 10 is a cooling device. Reference numeral 11 indicates a relatively thin heat dissipation fin attached to a semiconductor element, and reference numeral 12 indicates a microcapsule colony in which the surface of the fin 11 is coated with a paint containing a cooling liquid in spots. This microcapsule colony 12, as shown in FIG.
As shown in FIG. 3, microcapsules 13 containing a cooling liquid 14 having a high specific heat such as water or ammonia are dispersed and applied in a paint having a matrix 15 of an adhesive such as epoxy.

マイクロカプセル13の材質には、ガラス、シリカ、シ
ラス、アルミナ2、ジルユニア等の無機系と、カーボン
、フェノール、塩化ビニリデン、アクリルニトリル等の
有機系があり、粒度は5〜30μm位のものを使用する
。マトリックス15には熱に比較的に強いエポキシが適
当である。
The materials for the microcapsules 13 include inorganic materials such as glass, silica, shirasu, alumina 2, and Zirunia, and organic materials such as carbon, phenol, vinylidene chloride, and acrylonitrile, and the particle size used is approximately 5 to 30 μm. do. Epoxy, which is relatively resistant to heat, is suitable for the matrix 15.

通常時、半導体素子Aの発熱は第4図(a)に示すよう
に、放熱フィン11を通して放熱する。
Normally, the heat generated by the semiconductor element A is radiated through the heat radiation fins 11, as shown in FIG. 4(a).

このため、マイクロカプセルコロニー12はこの通常時
の放熱の妨げにならない程度にその大きさを小さくとり
、斑点の間隔が第1図示のように広くなるようになって
いる。
For this reason, the size of the microcapsule colony 12 is made small to the extent that it does not interfere with heat dissipation during normal operation, and the intervals between the spots are made wide as shown in the first figure.

短絡事故等が発生し、半導体素子Aが異常過熱した場合
1.第4図(b)に示すように、直ちにマイクロカプセ
ル13内の冷却液が膨張し、熱で軟化したマイクロカプ
セル13の殻を破って外に飛び出し周囲の熱を奪って気
化するため、放熱フィン11は急激に冷却され、半導体
素子Aが熱で破壊されることから保護される。
If a short-circuit accident or the like occurs and the semiconductor element A becomes abnormally overheated, 1. As shown in FIG. 4(b), the cooling liquid inside the microcapsules 13 immediately expands, breaks the shell of the microcapsules 13 that has been softened by heat, and jumps out, absorbing the surrounding heat and vaporizing. 11 is rapidly cooled and the semiconductor element A is protected from being destroyed by heat.

マイクロカプセル13の熱強度と冷却液の熱膨張率を適
宜に調整することによって急速冷却時の温度設定値を決
めることができる。
By appropriately adjusting the thermal strength of the microcapsules 13 and the coefficient of thermal expansion of the cooling liquid, the temperature setting value during rapid cooling can be determined.

実施例2 第5図において、Aは半導体素子、20は冷却装置であ
る。21はこの半導体素子に取付けられた放熱フ・tン
24を有する半導体素子が取着されるAA’、Cu等よ
りなる伝熱板、22は伝熱板21と放熱フィンとを接続
する短柱、25は放熱フィンに設けられたN2.Co2
.A、等の液化ガス27入りの小形液化ガスボンベであ
る。
Embodiment 2 In FIG. 5, A is a semiconductor element, and 20 is a cooling device. 21 is a heat exchanger plate made of AA', Cu, etc. to which the semiconductor element is attached, and 22 is a short column connecting the heat exchanger plate 21 and the radiation fins. , 25 are N2. Co2
.. This is a small liquefied gas cylinder containing liquefied gas 27 such as A.

液化ガスボンベ25、第8図に示すように、口が半田、
熱可塑性樹脂よりなる溶融栓26で塞がれており、放熱
フ・tン23の中央部に設けられた雌ねじ28(第7図
)に口部の雄ねじ29が螺合し、溶融栓26が伝熱板2
1に当接するように設けられている。
Liquefied gas cylinder 25, as shown in FIG.
It is closed with a melting plug 26 made of thermoplastic resin, and a male thread 29 at the mouth is screwed into a female thread 28 (Fig. 7) provided in the center of the heat radiation vent 23, and the melting plug 26 is closed. Heat exchanger plate 2
1.

通常時、半導体素子Aの発熱は放熱フィン23を通して
放熱する。ガスボンベの溶融栓25はこの時点の温度で
は溶けずに、半導体素子の破壊寸前の温度で溶けるよう
に調合されている。
Normally, heat generated by the semiconductor element A is radiated through the heat radiation fins 23. The melt plug 25 of the gas cylinder is formulated so that it does not melt at this temperature, but melts at a temperature on the verge of destroying the semiconductor element.

短絡事故が発生し、半導体素子Aが異常加熱し半導体素
子が破壊される寸前の温度になると溶融栓26が溶け、
次の瞬間に小形液化ガスボンベ25内の圧縮された流化
ガスが気化すると共に噴出し、短柱23の間をすり抜け
て外部に放散する。
When a short circuit accident occurs and the semiconductor element A becomes abnormally heated and reaches a temperature on the verge of destroying the semiconductor element, the melting plug 26 melts.
At the next moment, the compressed liquefied gas in the small liquefied gas cylinder 25 vaporizes and blows out, passing between the short columns 23 and dissipating to the outside.

このとき、ガスは伝熱板22と短柱23から熱を急速に
奪うため半導体素子Aを一時的異常加熱による熱破壊を
防止することができる。
At this time, the gas rapidly removes heat from the heat exchanger plate 22 and the short columns 23, so that the semiconductor element A can be prevented from being thermally destroyed due to temporary abnormal heating.

溶融栓26の溶けた破片はこの時の圧力によって吹ぎ飛
ばされる。短柱22はガス流に活流を作って効率的に熱
交換を行うので、細く数が多い程表面櫂が大きくなるの
で効果的である。小形液化ガスボンベ25は作動後はカ
ートリッヂ式に外して取り替えればまた、最初の状態に
できる。
The melted pieces of the melt plug 26 are blown away by the pressure at this time. The short columns 22 create an active flow in the gas flow and efficiently exchange heat, so the thinner the column 22, the more effective the surface paddle becomes. After the small liquefied gas cylinder 25 has been activated, it can be returned to its original state by removing it like a cartridge and replacing it.

実施例3 第9図において、Aは半導体素子、30は冷却装置であ
る。3Iは片面に半導体素子が取着され他の片面に放熱
フィン32が設けられた熱伝導率の良いFl、C,、A
I等よりなる圧力タンクである。
Embodiment 3 In FIG. 9, A is a semiconductor element, and 30 is a cooling device. 3I is Fl, C, A with good thermal conductivity, with a semiconductor element attached to one side and a radiation fin 32 provided on the other side.
This is a pressure tank consisting of I, etc.

圧力タンク31は、安全弁33及び水注入栓34を備え
ており、第10図に示すように、安全弁33はタンク3
2の口部を塞くシリコーンゴム等よりなるボール弁35
とこのボール弁を口部へ押し付ける調圧ばね36及びボ
ール弁35が開いたとき出てくる蒸気を抜く蒸気抜き穴
37を有し、タンク31の内部にはAI、C1等の熱伝
導率の良い多孔質金属片38が挿入されており、その間
に水39が満たされている。
The pressure tank 31 is equipped with a safety valve 33 and a water injection tap 34, and as shown in FIG.
A ball valve 35 made of silicone rubber or the like that closes the opening of 2.
The tank 31 has a pressure regulating spring 36 that presses the ball valve against the mouth and a steam vent hole 37 for releasing steam that comes out when the ball valve 35 is opened. A fine porous metal piece 38 is inserted between which water 39 is filled.

通常時の半導体素子Aの発熱はボンベ31を通して放熱
フィン32より放熱される。ただし、比熱の大きい水3
9かタンク31の中に入っているので、通常のフィンよ
りも小さいものでよい。半導体素子Aから発した熱は一
度水の熱容量に蓄えられながら徐々に放熱フィン32を
通して外気に放散されて行く。このため、タンク31の
内圧は成る程度大きくなるが、この時点での内圧では安
全弁33が開かないようにセットシである。
The heat generated by the semiconductor element A during normal operation is radiated from the heat radiation fins 32 through the cylinder 31. However, water with a large specific heat3
Since the fins are placed inside the tank 31, they only need to be smaller than normal fins. The heat emitted from the semiconductor element A is once stored in the heat capacity of water and gradually radiated to the outside air through the heat radiation fins 32. Therefore, the internal pressure of the tank 31 increases to a certain degree, but the internal pressure at this point is set so that the safety valve 33 does not open.

短絡事故等が発生し半導体素子Aが異常加熱すると、タ
ンク31内の水は、沸騰−気化(気化の潜熱により熱吸
収)−タンク内の圧力上昇(水の沸点上昇)−安全弁開
一水蒸気放出一タンク内の圧力低下−水の沸点低下−気
化(水温低下)−気化(熱の吸収)→タンク内の圧力上
昇→安全弁開−水蒸気放出一以下繰り返しにより熱の吸
収−放出が行なわれる。このサイクルにより半導体素子
を熱破壊から守ることができる。水が減ってきたら注入
口34から注ぎ足せばよい。
When a short circuit accident occurs and the semiconductor element A becomes abnormally heated, the water in the tank 31 boils, vaporizes (absorbs heat due to the latent heat of vaporization), increases the pressure inside the tank (raises the boiling point of water), and opens the safety valve to release water vapor. Heat is absorbed and released by repeating the following steps: pressure drop in the tank - water boiling point drop - vaporization (water temperature drop) - vaporization (heat absorption) -> pressure rise in the tank - safety valve open - water vapor release. This cycle can protect the semiconductor element from thermal damage. When the water gets low, you can add more water through the inlet 34.

実施例4 第11図において、Aは半導体素子、40は冷却装置で
ある。41は前端に半導体素子Aが取着されたC、、S
US、AI等よりなる外側パイプ、42はパイプ41の
後端近くに設けた放熱フィン、43はパイプ41の内側
に設けた金銅、多孔質金属、縦溝等からなるウィック、
44は一端が吸熱側面に半田、熱可塑性謝脂等の溶融栓
45に仮止め的に支えられ他端がパイプ41と一体に構
成された孔を有する仕切り46に固着された極細パイプ
、47は仕切り46の後側に設けられたピストン、48
はピストン47を前方へ付勢する圧縮ばね、49は仕切
り46とピストン46及び極細パイプ44内に入れられ
た水、  C2H50H、N H3等の冷媒液体、50
はパイプ41の後端に設けた空気穴、51はパイプ41
に設けた安全弁である。
Embodiment 4 In FIG. 11, A is a semiconductor element, and 40 is a cooling device. 41 denotes C, S with the semiconductor element A attached to the front end.
An outer pipe made of US, AI, etc., 42 a radiation fin provided near the rear end of the pipe 41, 43 a wick made of gilt copper, porous metal, vertical grooves, etc. provided inside the pipe 41;
44 is an ultra-thin pipe whose one end is temporarily supported by a melt plug 45 made of solder, thermoplastic resin, etc. on the endothermic side, and whose other end is fixed to a partition 46 having a hole formed integrally with the pipe 41; A piston 48 provided on the rear side of the partition 46
50 is a compression spring that urges the piston 47 forward; 49 is water contained in the partition 46, the piston 46, and the ultrathin pipe 44;
51 is the air hole provided at the rear end of the pipe 41, and 51 is the air hole provided at the rear end of the pipe 41.
This is a safety valve installed in the

パイプ41のウィック43の入っている部分には上記冷
媒液体と同種の冷媒液体か少し入っており、パイプ41
はこの冷媒液体とウィック43によりヒートパイプとし
て機能するようになっている。
The part of the pipe 41 containing the wick 43 contains a small amount of refrigerant liquid of the same type as the above-mentioned refrigerant liquid, and the pipe 41
The refrigerant liquid and the wick 43 function as a heat pipe.

しかして、通常時、半導体素子Aの発熱はヒートパイプ
の作用で伝熱し放熱フィン42より放熱される。ただし
、溶融栓45はこの通常時の吸熱側温度では溶けない組
成のものとなっている。
Therefore, under normal conditions, the heat generated by the semiconductor element A is transferred by the action of the heat pipe and is radiated through the heat radiation fins 42. However, the melt plug 45 has a composition that does not melt at this normal endothermic side temperature.

短絡事故等が発生し半導体素子Aが異常加熱すると、溶
融栓45が溶け、圧縮ばね48による圧力のかかった冷
媒液体49が極細パイプ44を通って噴出し、吸熱側の
高温面に当り、冷媒液体の冷却効果及び気化によって吸
熱側の高温面を急速に冷却する。冷媒液体の気化により
上昇したパイプ41内圧は安全弁51が作動して抜かれ
る。
When a short circuit accident occurs and the semiconductor element A is abnormally heated, the melting plug 45 melts, and the refrigerant liquid 49 under pressure by the compression spring 48 blows out through the thin pipe 44 and hits the high temperature surface on the heat absorption side, causing the refrigerant to melt. The cooling effect and vaporization of the liquid rapidly cools the high-temperature surface on the endothermic side. The internal pressure of the pipe 41, which has increased due to the vaporization of the refrigerant liquid, is released by the operation of the safety valve 51.

H1発明の効果 本発明は、上述のとおり構成されているので、次に記載
する効果を奏する。
H1 Effects of the Invention Since the present invention is configured as described above, it produces the following effects.

■請求項(1)の冷却装置においては、半導体素子等の
過熱時の熱を、マイクロカプセル内の冷却液の気化によ
って放散するため、放熱フィンの温度が急激に低下する
ので、半導体素子の熱破壊を防止できる。また、−熱を
放熱フィンの内部に一時的に蓄えておく必要がなくなり
、フィンの熱容量を従来のものより小さくできるので、
ヒートシンク全体の体積が小さくなり、小型軽量化がで
きる。
■In the cooling device of claim (1), the heat generated when the semiconductor element, etc. is overheated is dissipated by vaporizing the coolant inside the microcapsules, so the temperature of the heat dissipation fins decreases rapidly. Destruction can be prevented. In addition, there is no need to temporarily store heat inside the radiation fins, and the heat capacity of the fins can be made smaller than conventional ones.
The overall volume of the heat sink is reduced, making it smaller and lighter.

■請求項(2)の冷却装置においては、半導体素子等の
過熱時の熱を液化ガスが気化するときの熱吸収によって
急激に冷却するため、半導体素子の熱破壊を防止できる
。また、熱を放熱フィンの内部に一時的に蓄えておく必
要がなく、放熱フィンの熱容量を従来のものより小さく
できるので、ヒートシンク全体の体積が小さくなり、小
型軽量化かできる。
(2) In the cooling device of claim (2), the heat generated when the semiconductor element or the like is overheated is rapidly cooled by absorption of heat when the liquefied gas vaporizes, so that thermal damage to the semiconductor element can be prevented. In addition, there is no need to temporarily store heat inside the radiation fins, and the heat capacity of the radiation fins can be made smaller than that of conventional heat sinks, so the overall volume of the heat sink is reduced, making it possible to make it smaller and lighter.

■また、小形液化ガスボンベはカートリッチ式として交
換しうるのでメンテナンスが容易である。
■In addition, maintenance is easy because the small liquefied gas cylinder can be replaced as a cartridge type.

■請求項(3)の冷却装置においては、タンク内部に熱
容量の大きい水が入っているので、従来の放熱フ1′ン
よりもずっと小さい体積の放熱フィンで良く、放熱フィ
ンを小型、軽量化できる。
■In the cooling device according to claim (3), since water with a large heat capacity is contained inside the tank, a radiating fin with a much smaller volume than the conventional radiating fan 1' is sufficient, making the radiating fin smaller and lighter. can.

■また、タンク内部に熱伝導率の高い多孔質金属が挿入
されているので、水に蓄えられた熱を速やかに放熱フィ
ンに伝えることができる。
■Also, since a porous metal with high thermal conductivity is inserted inside the tank, the heat stored in the water can be quickly transferred to the heat dissipation fins.

■更に、半導体素子等の過熱でタンク内部の水が沸騰し
た場合、圧力弁が働いて水蒸気を逃がすと同時に、圧力
低下により水温が低下するので、半導体素子の熱破壊を
防止できる。
Furthermore, when the water inside the tank boils due to overheating of semiconductor devices, etc., the pressure valve operates to release the water vapor, and at the same time, the water temperature decreases due to the pressure drop, which prevents thermal damage to the semiconductor devices.

■請求項(4)の冷却装置においては、半導体素子等の
過熱時の熱を冷媒液体の注入によって急速に冷却するの
で、従来のヒートパイプを用いたものより過熱時の冷却
効果が大きい。
(2) In the cooling device of claim (4), since the heat generated when the semiconductor element or the like is overheated is rapidly cooled by injecting the refrigerant liquid, the cooling effect during overheating is greater than that using a conventional heat pipe.

【図面の簡単な説明】[Brief explanation of drawings]

第1図〜第4図は本発明の実施例1に関するもので、第
1図は冷却装置の斜視図、第2図はマイクロカプセルの
断面図、第3図はマイクロカプセルコロニーの正面部分
拡大図、第4図(a)及び(b)は通常放熱及び過熱時
数熱状態の説明図である。第5図〜第8図は実施例2に
関するもので、第5図は冷却装置の側断面図、第6図は
第5図V−V断面図、第7図は放熱フィン正面図、第8
図はボンベ側面図である。第9図及び第10図は実施例
3に関するもので、第9図は冷却装置の斜視図、第10
図は同側断面図である。第11図は実施例4に関する放
熱器の側断面図である。 A−・・半導体素子、10,20,30.40−i却装
置、11,23,32.42・・・放熱フィン、12・
・・マー1′クロカプセルコロニー、13・・・マイク
ロカプセル、14・・・冷却液、15・・・7トリツク
、21・・・伝熱板、22・・短柱、25・・・液化ガ
スボンベ、26.45・・・溶融枠、27・・・液化ガ
ス、28・・雌ねじ、29・・・雄ねじ、31・・・圧
力タンク、33.51・・・安全弁、35・・・ポール
弁、36・・・調圧ばね、37・・・蒸気抜孔、38・
・・多孔質金属、39・・・水、41・・・外側パイプ
、43・・・ウィック、44・・・極細ハ・1′プ、4
6・・・仕切り、47・・・ピストン、48・・・圧縮
ばね、49・・・冷媒液体、5o・・・空気孔。 第1図 (大充巧・)1) A−−−−一干嶌伴素刊 10−−−−一浄即乾豊 11−−−−一教責ペフ、Alン 12−−−−一で1つ口刀フでルコロニー23−−−放
*Aアソ    29−−一一定わじ11−−−−一枚
戸ムフ・1ン 12−−−−−フAlりDDつで、ル]ロニー13−−
−−一区イク[lカブこル 14−−−−倚坪廐 15−−一タト1片・ノクス (a) ア君1もケス六N 第3図 第4図 (b) L竺睦六然
Figures 1 to 4 relate to Example 1 of the present invention; Figure 1 is a perspective view of a cooling device, Figure 2 is a cross-sectional view of a microcapsule, and Figure 3 is an enlarged front partial view of a microcapsule colony. , FIGS. 4(a) and 4(b) are explanatory diagrams of normal heat dissipation and overheating time thermal states. 5 to 8 relate to the second embodiment, in which FIG. 5 is a side sectional view of the cooling device, FIG. 6 is a sectional view taken along line V-V in FIG.
The figure is a side view of the cylinder. Figures 9 and 10 relate to Example 3, with Figure 9 being a perspective view of the cooling device and Figure 10 being a perspective view of the cooling device.
The figure is a sectional view of the same side. FIG. 11 is a side sectional view of a heat radiator related to Example 4. A-...Semiconductor element, 10, 20, 30.40-i cooling device, 11, 23, 32.42...Radiating fin, 12.
... Mer 1' black capsule colony, 13 ... Microcapsule, 14 ... Coolant, 15 ... 7 tricks, 21 ... Heat exchanger plate, 22 ... Short column, 25 ... Liquefied gas cylinder , 26.45... Melting frame, 27... Liquefied gas, 28... Female thread, 29... Male thread, 31... Pressure tank, 33.51... Safety valve, 35... Pall valve, 36...Pressure adjustment spring, 37...Steam vent hole, 38...
...Porous metal, 39...Water, 41...Outer pipe, 43...Wick, 44...Extra-fine pipe, 4
6... Partition, 47... Piston, 48... Compression spring, 49... Refrigerant liquid, 5o... Air hole. Figure 1 (Tamitsu Takumi) 1) A-----Ichikan Shiban Sokan 10----Ichijo Sokukenho 11----Ichishu Pef, Alun 12----I de 1 Colony 23 --- Release* A Aso 29 --- Ichitsuji 11 --- One door muff 1 n 12 ------ Fu Al DD, Ru] Ronnie 13--
--1 Ward Iku [l Kabukol 14-----Kitsubo 15--1 Tato 1 Piece Nox (a) A-kun 1 also Kesu Roku N Figure 3 Figure 4 (b) L Chiku Mutsu Roku Naturally

Claims (4)

【特許請求の範囲】[Claims] (1)半導体素子等が取着される放熱フインの表面に、
冷却液が内包され異常温度時に冷却液の膨張等により壊
われるマイクロカプセルを含有する塗料をマイクロカプ
セルコロニーが形成されるように斑点状に塗布してなる
ことを特徴とした冷却装置。
(1) On the surface of the heat dissipation fin to which semiconductor elements etc. are attached,
A cooling device characterized in that a paint containing microcapsules containing a coolant and broken by expansion of the coolant at abnormal temperatures is applied in spots so as to form microcapsule colonies.
(2)多数の短柱を介して放熱フインが設けられた半導
体素子等が取着される伝熱基板と、 前記放熱フインの中心部に取着され口部が前記伝熱板に
当接するように設けられた異常温度により溶融する溶融
栓で封じられた小形液化ガスボンベとよりなることを特
徴とした冷却装置。
(2) A heat transfer substrate to which a semiconductor element or the like is attached, which is provided with heat dissipation fins via a large number of short columns, and a heat transfer substrate that is attached to the center of the heat dissipation fin so that the mouth part is in contact with the heat transfer plate. A cooling device comprising a small liquefied gas cylinder sealed with a melting plug that melts due to abnormal temperatures.
(3)内部に水及び多孔質金属片が収容され異常温度で
動作する安全弁を備えた一方の面に半導体素子等が取着
される圧力タンクと、 前記圧力タンクの他方の面に固着された放熱フインとよ
りなることを特徴とした冷却装置。
(3) A pressure tank that contains water and a porous metal piece and is equipped with a safety valve that operates at abnormal temperatures, and a semiconductor element, etc. is attached to one side of the pressure tank, and a pressure tank that is fixed to the other side of the pressure tank A cooling device characterized by consisting of heat dissipation fins.
(4)半導体素子等が一端に取着され他端側に中心部に
孔の穿いた仕切りを有し前記一端と仕切りとの間の内面
にウイックが施され他端側に放熱フインが設けられたヒ
ートパイプ機能を有する外側パイプと、 一端が前記外側パイプの一端の内面に異常温度で溶融す
る溶融栓で支持されると共に他端が前記仕切りの中心部
に固着された極細パイプと、前記外側パイプの仕切りと
後端との間に設けられたピストン及び圧縮ばねと、 前記極細パイプと前記外側パイプにおける仕切りとピス
トンとの間に入れられた冷媒液体と、前記外側パイプに
設けられた外側パイプの異常内圧を抜くための安全弁と
からなることを特徴とした熱ヒーズ付放熱器。
(4) A semiconductor element, etc. is attached to one end, a partition with a hole in the center is provided on the other end, a wick is provided on the inner surface between the one end and the partition, and a heat dissipation fin is provided on the other end. an outer pipe having a heat pipe function, one end of which is supported by a melting plug that melts at an abnormal temperature on the inner surface of one end of the outer pipe, and the other end of which is fixed to the center of the partition; a piston and a compression spring provided between the partition and the rear end of the pipe; a refrigerant liquid placed between the partition and the piston in the ultra-thin pipe and the outer pipe; and an outer pipe provided in the outer pipe. A radiator with a thermal heater characterized by comprising a safety valve for releasing abnormal internal pressure.
JP22458090A 1990-08-27 1990-08-27 Cooling apparatus Pending JPH04106965A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22458090A JPH04106965A (en) 1990-08-27 1990-08-27 Cooling apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22458090A JPH04106965A (en) 1990-08-27 1990-08-27 Cooling apparatus

Publications (1)

Publication Number Publication Date
JPH04106965A true JPH04106965A (en) 1992-04-08

Family

ID=16815964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22458090A Pending JPH04106965A (en) 1990-08-27 1990-08-27 Cooling apparatus

Country Status (1)

Country Link
JP (1) JPH04106965A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06334372A (en) * 1993-05-21 1994-12-02 Iwatani Internatl Corp Cooling system for heat-developing electronic circuit board and cooling system for driver substrate of liquid crystal display
US7153754B2 (en) 2002-08-29 2006-12-26 Micron Technology, Inc. Methods for forming porous insulators from “void” creating materials and structures and semiconductor devices including same
JP2008060384A (en) * 2006-08-31 2008-03-13 Fujitsu Ltd Cooling device, electronic equipment, and cooling medium
JP2008060385A (en) * 2006-08-31 2008-03-13 Fujitsu Ltd Cooling device, electronic equipment, and cooling medium
CN113471156A (en) * 2021-06-28 2021-10-01 彩芯(广州)半导体有限公司 Evaporation cavity packaging structure of integrated circuit and manufacturing method

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06334372A (en) * 1993-05-21 1994-12-02 Iwatani Internatl Corp Cooling system for heat-developing electronic circuit board and cooling system for driver substrate of liquid crystal display
US7153754B2 (en) 2002-08-29 2006-12-26 Micron Technology, Inc. Methods for forming porous insulators from “void” creating materials and structures and semiconductor devices including same
US7262487B2 (en) * 2002-08-29 2007-08-28 Micron Technology, Inc. Semiconductor devices and other electronic components including porous insulators created from “void” creating materials
US7554200B2 (en) 2002-08-29 2009-06-30 Micron Technology, Inc. Semiconductor devices including porous insulators
US8680680B2 (en) 2002-08-29 2014-03-25 Micron Technology, Inc. Semiconductor devices including porous insulators
JP2008060384A (en) * 2006-08-31 2008-03-13 Fujitsu Ltd Cooling device, electronic equipment, and cooling medium
JP2008060385A (en) * 2006-08-31 2008-03-13 Fujitsu Ltd Cooling device, electronic equipment, and cooling medium
JP4679475B2 (en) * 2006-08-31 2011-04-27 富士通株式会社 Cooling device, electronic device and cooling medium
JP4679474B2 (en) * 2006-08-31 2011-04-27 富士通株式会社 Cooling device, electronic device and cooling medium
CN113471156A (en) * 2021-06-28 2021-10-01 彩芯(广州)半导体有限公司 Evaporation cavity packaging structure of integrated circuit and manufacturing method
CN113471156B (en) * 2021-06-28 2024-03-19 广州华钻电子科技有限公司 Evaporation cavity packaging structure of integrated circuit and manufacturing method

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