JPH0410504Y2 - - Google Patents
Info
- Publication number
- JPH0410504Y2 JPH0410504Y2 JP1986017169U JP1716986U JPH0410504Y2 JP H0410504 Y2 JPH0410504 Y2 JP H0410504Y2 JP 1986017169 U JP1986017169 U JP 1986017169U JP 1716986 U JP1716986 U JP 1716986U JP H0410504 Y2 JPH0410504 Y2 JP H0410504Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean room
- air conditioner
- room
- blower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002265 prevention Effects 0.000 claims description 4
- 238000009423 ventilation Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986017169U JPH0410504Y2 (xx) | 1986-02-08 | 1986-02-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986017169U JPH0410504Y2 (xx) | 1986-02-08 | 1986-02-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62130331U JPS62130331U (xx) | 1987-08-18 |
JPH0410504Y2 true JPH0410504Y2 (xx) | 1992-03-16 |
Family
ID=30809681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986017169U Expired JPH0410504Y2 (xx) | 1986-02-08 | 1986-02-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0410504Y2 (xx) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0526422Y2 (xx) * | 1985-08-20 | 1993-07-05 | ||
JP2609688B2 (ja) * | 1988-07-14 | 1997-05-14 | 日立プラント建設株式会社 | クリーンルーム |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59185923A (ja) * | 1983-04-07 | 1984-10-22 | Sanki Eng Co Ltd | クリーンルームの形成方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58148525U (ja) * | 1982-03-30 | 1983-10-05 | 株式会社大林組 | 超清浄空気室構造 |
-
1986
- 1986-02-08 JP JP1986017169U patent/JPH0410504Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59185923A (ja) * | 1983-04-07 | 1984-10-22 | Sanki Eng Co Ltd | クリーンルームの形成方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS62130331U (xx) | 1987-08-18 |
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