JPH0410410Y2 - - Google Patents

Info

Publication number

JPH0410410Y2

JPH0410410Y2 JP20149386U JP20149386U JPH0410410Y2 JP H0410410 Y2 JPH0410410 Y2 JP H0410410Y2 JP 20149386 U JP20149386 U JP 20149386U JP 20149386 U JP20149386 U JP 20149386U JP H0410410 Y2 JPH0410410 Y2 JP H0410410Y2

Authority

JP

Japan

Prior art keywords

working fluid

fluid pressure

fluid supply

pipe

pressure operated

Prior art date

1986-12-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
• Discuss

• 239000012530 fluid Substances 0.000 claims description 113
• 238000003780 insertion Methods 0.000 claims description 14
• 230000037431 insertion Effects 0.000 claims description 14
• 239000000428 dust Substances 0.000 description 12
• 238000011109 contamination Methods 0.000 description 6
• 238000006073 displacement reaction Methods 0.000 description 5
• 238000009825 accumulation Methods 0.000 description 4
• 238000010586 diagram Methods 0.000 description 4
• 239000002184 metal Substances 0.000 description 4
• 239000003595 mist Substances 0.000 description 4
• 239000000843 powder Substances 0.000 description 4
• 238000004891 communication Methods 0.000 description 3
• 230000007423 decrease Effects 0.000 description 3
• 239000000126 substance Substances 0.000 description 3
• 230000000694 effects Effects 0.000 description 2
• 238000007667 floating Methods 0.000 description 2
• 230000003749 cleanliness Effects 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1