JPH04103024A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPH04103024A JPH04103024A JP22176290A JP22176290A JPH04103024A JP H04103024 A JPH04103024 A JP H04103024A JP 22176290 A JP22176290 A JP 22176290A JP 22176290 A JP22176290 A JP 22176290A JP H04103024 A JPH04103024 A JP H04103024A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- film
- heat
- films
- resistant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 8
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 230000001681 protective effect Effects 0.000 claims abstract description 11
- 229920006254 polymer film Polymers 0.000 claims abstract description 5
- 239000010408 film Substances 0.000 claims description 32
- 239000002184 metal Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 8
- 230000005294 ferromagnetic effect Effects 0.000 claims description 6
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 4
- 239000012210 heat-resistant fiber Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は強磁性金属ＴＲ膜を磁気記録層とし、ＨＤ−Ｖ
ＴＲやディジタルＶＴＲ２高密度ディスクに利用される
磁気記録媒体の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention uses a ferromagnetic metal TR film as a magnetic recording layer to provide an HD-V
The present invention relates to a method of manufacturing a magnetic recording medium used in high-density disks of TRs and digital VTRs.
従来の技術
金属薄膜型磁気記録媒体のスチル耐久性、走行耐久性向
上に関しては、スパッター法やプラズマＣＶＤ法でカー
ボン系保護膜を設けることが中心になってきている。我
々は放電管内のプラズマ状態の物質を薄膜媒体表面へふ
きつける方法で研究している。そのためのノズル内圧を
確保する方法としてキャンとのすきまを１．０１から０
．５１程度に管理してガス流量でコントロールしている
のが現状である。この方法でノズル内圧０．０５ ｔｏ
ｒｒから０．５ｔｏｒｒは確保できている。このときの
真空装冨の真空度は１ｘｌＯ’ｔｏｒｒから１ｘｌＯ’
ｔｏｒｒ程度である。2. Description of the Related Art In order to improve the still durability and running durability of metal thin film magnetic recording media, the use of sputtering or plasma CVD to provide a carbon-based protective film has become central. We are conducting research using a method in which material in a plasma state inside a discharge tube is sprayed onto the surface of a thin film medium. To ensure the nozzle internal pressure, the gap between the can and the can should be increased from 1.01 to 0.
．． At present, it is managed to be about 51 and controlled by gas flow rate. This method reduces the nozzle internal pressure to 0.05 to
0.5 torr can be secured from rr. At this time, the vacuum degree of the vacuum equipment is 1xlO'torr to 1xlO'
It is about torr.
しかし、ノズル内圧をもっと高くして成膜速度を向上し
ようと思えば、キャンとノズルとのギャップをもっと狭
くするか排気能力を上げるしか方法がない、排気能力の
アンプは設備が大型になり、コスト負担にもなるので一
般的でなく、キャンとノズルのギャップコントロールが
ノズル内圧を高めるための要素技術となる。しかし、５
００■以上の広幅で０．５閣以下のギャップ管理はノズ
ル材料の熱膨張の問題もあってかなり困難になってきて
いる。However, if you want to increase the nozzle internal pressure and increase the film deposition rate, the only way to do this is to narrow the gap between the can and the nozzle or increase the exhaust capacity. This is not common because it increases the cost, and gap control between the can and the nozzle is an elemental technology for increasing the nozzle internal pressure. However, 5
Gap control of 0.5 mm or less over a width of 0.00 cm or more is becoming quite difficult due to the problem of thermal expansion of the nozzle material.
発明が解決しようとする課題
そこで、本発明は所望のノズル内圧を得るために、ノズ
ルとキャンとの精密なギャップ調整装置を必要としない
、広幅、大量生産方式に遺したノズル内圧の確保を可能
にするプラズマＣＶＤ法による保護膜形成方法を提案す
るものである。Problems to be Solved by the Invention Therefore, the present invention does not require a precise gap adjustment device between the nozzle and the can in order to obtain the desired nozzle internal pressure, and it is possible to secure the nozzle internal pressure that is left behind in a wide-width, mass-production method. This paper proposes a method for forming a protective film using a plasma CVD method.
課題を解決するための手段
ノズル先端部５．０鵬程度を耐熱性高分子ライルムで構
成し、このフィルムをキャンにふれさせることによりキ
ャンとノズルとのすきまを実質上ゼロとし、媒体の走行
方向において耐熱性高分子フィルム同志の間に隙間をつ
くりこの空間の割合でノズル内圧を調整する。なお使用
する耐熱性フィルムの厚みは１０μｍ〜１００μｍ程度
が適当である。Means for Solving the Problem: The tip of the nozzle, approximately 5.0mm thick, is made of heat-resistant polymer lyme, and by touching this film to the can, the gap between the can and the nozzle is made virtually zero, and the direction of travel of the medium is A gap is created between the heat-resistant polymer films, and the nozzle internal pressure is adjusted according to the proportion of this space. The appropriate thickness of the heat-resistant film used is about 10 μm to 100 μm.
保護膜を形成する媒体の幅方向においては耐熱性の高分
子フィルムで完全に接触させる。In the width direction of the medium on which the protective film is to be formed, complete contact is made with a heat-resistant polymer film.
作用
保ＷｔＭ形成用のノズル先端部を耐熱性フィルムで形成
し、これをキャンと接触させることにより精密なキャン
とノズル間のギャップ調整装置が不要となり、広幅の磁
気記録媒体上に高速で保護膜を形成することが可能とな
る。By forming the tip of the nozzle for forming WtM with a heat-resistant film and bringing it into contact with the can, there is no need for a precise gap adjustment device between the can and the nozzle, and a protective film can be formed on a wide magnetic recording medium at high speed. It becomes possible to form.
実施例
第１図、第２図および第３図にもとづいて説明する０表
面粗さのコントロールされた５００■幅のポリエチレン
テレフタレート５上に触針式で表面最大粗さが７０人〜
１００人、中心線平均粗さが３０人〜５０人の山状突起
の密度がｌ■２あたり１０５〜１０”個存在する形状層
４を形成し、この上に斜方真空蒸着法により酸素を導入
しながらＣｏ−Ｎｉの強磁性金属薄膜３を１８００人形
成する。EXAMPLE Description will be made based on FIGS. 1, 2, and 3. A stylus probe was applied to polyethylene terephthalate 5 with a width of 500 mm and a controlled surface roughness of 0 to 70 mm.
A shaped layer 4 having a density of 105 to 10" mountain-like protrusions per l2 with a center line average roughness of 30 to 50 is formed, and oxygen is deposited on this layer by oblique vacuum evaporation. 1,800 Co--Ni ferromagnetic metal thin films 3 are formed while introducing.
次にプラズマＣＶＤ法により保護Ｍ２を形成するが、こ
こでは保護膜としてダイヤモンド状炭素膜を例に上げて
説明する。Next, a protective film M2 is formed by plasma CVD, and here, a diamond-like carbon film is used as an example to explain the protective film.
石英ガラス等で形成された放電管ノズル８の先端部５．
０閣を耐熱性の高分子フィルＬ９で構成する。ここでは
耐熱性フィルムとしてガラス転移点が１３０℃以上のも
のが使用可能であり、たとえばポリイミドフィルム、ア
ラミドフィルム等があげられるが本実施例においては２
０μｍの厚みのポリイミドフィルムを使用した。なお、
フィルムの厚みは１０μｍから１００μｍまでが使用可
能であった。１０μｍより薄くなると、先端部につけた
フィルムによるガスの流れに対する抵抗が弱くなり、つ
けない場合との放電管内の内圧の有意差がほとんどなく
なってくる。また、１００μｍを趨えると、フィルムの
やわらかさがなくなり、金属薄膜と接触することによる
＊＊キズが入りやすくなる。5. The tip of the discharge tube nozzle 8 made of quartz glass or the like.
The cabinet is made of heat-resistant polymer film L9. Here, a heat-resistant film having a glass transition point of 130°C or higher can be used, such as polyimide film, aramid film, etc., but in this example, 2.
A polyimide film with a thickness of 0 μm was used. In addition,
The thickness of the film could be from 10 μm to 100 μm. When the thickness is less than 10 μm, the resistance to gas flow due to the film attached to the tip becomes weak, and there is almost no significant difference in the internal pressure inside the discharge tube compared to when no film is attached. Moreover, when the thickness exceeds 100 μm, the film loses its softness and becomes susceptible to scratches due to contact with the metal thin film.
耐熱性フィルム９の放電管ノズル８先端への形成例を第
３図に示す、第３図（ａ）、（ハ）および（Ｃ）は、そ
れぞれ放電管ノズル８の平面図、正面図および側面図を
示す、媒体の幅方向はすべて耐熱性フィルム９でカバー
する一方、媒体の走行方向では耐熱性フィルム９に角度
をもたせてノズル先端に形成する。これは媒体の同一点
だけに耐熱性フィルム９の応力がかからないようにする
ためと、このフィルムとフィルムの隙間を調節すること
により放電管内圧のコントロールを可能にするためでも
ある。An example of forming the heat-resistant film 9 on the tip of the discharge tube nozzle 8 is shown in FIG. 3. FIGS. As shown in the figure, the entire width direction of the medium is covered with a heat-resistant film 9, while in the running direction of the medium, the heat-resistant film 9 is formed at an angle at the tip of the nozzle. This is to prevent the stress of the heat-resistant film 9 from being applied only to the same point on the medium, and also to enable control of the internal pressure of the discharge tube by adjusting the gap between the films.
放電条件は、炭素源としてベンゼンを１０１００５ｅ、
アルゴンを２０ｓｅｃｍとし、キャン７と耐熱性フィル
ム９を具備しない放電管ノズル８の先端とのギ＋ｙプを
１．０ｍ、 ０．５ｍｍ ０．４ｍと変化させて本発
明による方法と、このギャップだけで内圧を確保する方
法との比較をしながらサンプルを作成した。それをまと
めて、第１表に示す、なお、ダイヤモンド状炭素膜２の
厚みは１２０人であり、表中に成膜速度とあるのは、所
望厚のダイヤモンド状炭素Ｍ２を得るに必要な移動速度
である。The discharge conditions were benzene 101005e as a carbon source,
Argon was set at 20 sec, and the gap between the can 7 and the tip of the discharge tube nozzle 8 without the heat-resistant film 9 was varied from 1.0 m to 0.5 mm to 0.4 m, and the method according to the present invention and only this gap were used. A sample was created while comparing it with a method of securing internal pressure. This is summarized in Table 1. The thickness of the diamond-like carbon film 2 is 120, and the film-forming speed in the table is the movement required to obtain the desired thickness of the diamond-like carbon M2. It's speed.
（以 下 余 白）
これらサンプルＮ１１ｌ〜６の媒体上に含フツソカルボ
ン酸の潤滑剤層１を５０人、コーティング法により形成
し、スリッターにより８■幅に切断後、８−Ｖ Ｔ Ｒ
でスチル耐久性と走行耐久性をチエツクした。測定環境
は共に２３℃−１０％でおこなった。スチル耐久性は出
力が初期にくらべて３．０ｄＢ低下した時を寿命とした
。また、走行耐久性は１２０分長０テープを３００パス
くり返し走行させた場合の１００時間あたりの目づまり
時間を表示し、また、３００バス後の出力低下を初期と
比較した。(Margins below) Fifty people formed a lubricant layer 1 containing futusocarboxylic acid on the media of samples N11l to 6 by a coating method, cut it into 8-inch widths with a slitter, and then 8-VTR.
We checked the still durability and running durability. The measurement environment was 23° C.-10%. Still durability was defined as the life span when the output decreased by 3.0 dB compared to the initial stage. In addition, running durability is expressed as the clogging time per 100 hours when a 120-minute length 0 tape is repeatedly run for 300 passes, and the decrease in output after 300 passes is compared with the initial state.
その結果を第２表にまとめる。The results are summarized in Table 2.
（以 下 余 白）
なお、本実施例では放電管ノズルの媒体走行方向にフィ
ルムを斜めに並べたが、他にもこの部分に５．０１程度
の長さの細い耐熱性繊維を張り付けてガスの流れに対す
る抵抗にしても可能である。(Margins below) In this example, the films were arranged diagonally in the direction of medium travel of the discharge tube nozzle, but thin heat-resistant fibers with a length of about 5.0 mm could also be attached to this part to inject the gas. It is also possible to resist the flow of water.
発明の効果
第１表および第２表に示したように、放電管ノズル８の
先端部を５．０１程度耐熱性フィルム９で構成すると精
密な位置決め機構なしに充分な内圧を確保できると共に
、成膜速度を２倍程度に高めることができる。一方、媒
体の信較性は十分であり、改良製造法による劣化はない
。Effects of the Invention As shown in Tables 1 and 2, if the tip of the discharge tube nozzle 8 is made of a heat-resistant film 9 of about 5.0 mm, sufficient internal pressure can be secured without a precise positioning mechanism, and the The membrane speed can be increased approximately twice. On the other hand, the reliability of the media is sufficient and there is no deterioration due to the improved manufacturing method.
第１図は磁気記録媒体の構成を示す断面図、第２図は保
護膜製造装！の全体図、第３図は耐熱性フィルムを形成
する放電管ノズルの拡大図で、（ａｌら１． （Ｃ）は
それぞれ平面図、正面図２側面図である。
ｌ・・・・・・潤滑剤層、２・・・・・・保護膜、３・
・・・・・強磁性金属薄膜、４・・・・・・形状層、５
・・・・・・ＰＥＴ、６・・・・・・バックコート、７
・・・・・・キャン、８・・・・・・放電管ノズル、９
・・・・・・耐熱性フィルム。
：／Ｆｋ′Ｉ滑利１
搏環績
痺磁吐４Ｌ属薄繰
一彰扶層
千イン
１Ｆ気Figure 1 is a cross-sectional view showing the structure of a magnetic recording medium, and Figure 2 is a protective film manufacturing equipment! Figure 3 is an enlarged view of the discharge tube nozzle that forms the heat-resistant film, and (C) is a plan view, front view, and side view, respectively. Lubricant layer, 2... Protective film, 3.
...Ferromagnetic metal thin film, 4...Shape layer, 5
...PET, 6...Back coat, 7
...Can, 8...Discharge tube nozzle, 9
...Heat-resistant film. :/Fk'I Nari 1 搏 燏 臏臇 4L 類 Usuki Ichisho Fu layer 1000-in 1F Qi
Claims (1)
性金属薄膜上へプラズマＣＶＤ法で保護膜を形成する際
、放電管ノズル先端部を耐熱性高分子フィルム又は耐熱
性繊維で構成し、強磁性金属薄膜面とそのノズル先端と
を接触させることを特徴とする磁気記録媒体の製造方法
。When forming a ferromagnetic metal thin film on a non-magnetic substrate and then forming a protective film on this ferromagnetic metal thin film by plasma CVD, the tip of the discharge tube nozzle is made of a heat-resistant polymer film or heat-resistant fiber. A method of manufacturing a magnetic recording medium, comprising: bringing a ferromagnetic metal thin film surface into contact with a nozzle tip thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2221762A JP2538112B2 (en) | 1990-08-22 | 1990-08-22 | Method of manufacturing magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2221762A JP2538112B2 (en) | 1990-08-22 | 1990-08-22 | Method of manufacturing magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04103024A true JPH04103024A (en) | 1992-04-06 |
| JP2538112B2 JP2538112B2 (en) | 1996-09-25 |
Family
ID=16771806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2221762A Expired - Fee Related JP2538112B2 (en) | 1990-08-22 | 1990-08-22 | Method of manufacturing magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2538112B2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63279426A (en) * | 1987-05-12 | 1988-11-16 | Matsushita Electric Ind Co Ltd | Method and device for forming protective film of magnetic metallic medium |
-
1990
- 1990-08-22 JP JP2221762A patent/JP2538112B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63279426A (en) * | 1987-05-12 | 1988-11-16 | Matsushita Electric Ind Co Ltd | Method and device for forming protective film of magnetic metallic medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2538112B2 (en) | 1996-09-25 |
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