JP3048287B2 - Manufacturing equipment for magnetic recording media - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium manufacturing apparatus for manufacturing a magnetic recording medium having excellent high-density recording / reproducing characteristics.

[0002]

2. Description of the Related Art At present, magnetic recording / reproducing apparatuses tend to be miniaturized and densified, and metal thin-film type media have been attracting attention as exceeding the limit of high density of conventional coating type media.
In this regard, a metal thin film type medium made of Co—Ni—O has been put to practical use as a magnetic tape for a VTR. As a method for manufacturing a thin film type magnetic layer, an oblique deposition method is known.

An example of a conventional oblique deposition method will be described below with reference to the drawings. FIG. 5 shows a schematic view of a vapor deposition section of a conventional continuous vacuum vapor deposition apparatus for performing oblique vapor deposition. In FIG. 5, 10 is a polymer film substrate, 11 is a cylindrical can,
Reference numeral 12 denotes a shielding plate that defines an initial incident angle, 13 denotes a shielding plate that defines a final incident angle, 14 denotes a nozzle for introducing a gas, 15 denotes an evaporation source, and 16 denotes a free roller. Evaporated atoms from the evaporation source 15 pass through the opening between the shielding plate 12 and the shielding plate 13 and travel along the cylindrical can.
Deposited on top. The incident angle is defined by the angle formed between the evaporated atoms and the normal to the substrate.
However, the final incident angle φf is controlled and defined by the shielding plate 13. The magnetic properties of the magnetic layer are controlled by the range of the incident angle and the introduction of gas.

[0004]

However, in the conventional apparatus as described above, if the evaporation rate is increased or deposition is performed for a long time, the gap between the cylindrical can 11 and the shielding plate 12 on the initial incidence side is increased. In some cases, crystal grains were formed, and the polymer film substrate 10 was sometimes damaged. For this reason, the shielding plate 12 is separated from the cylindrical can 11 to prevent scratches.However, the coercive force and the squareness ratio are reduced, and sufficient characteristics as a magnetic recording medium cannot be obtained. there were.

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems and to provide an apparatus for manufacturing a magnetic recording medium capable of withstanding mass production while securing sufficient magnetic characteristics.

[0006]

In order to achieve the above object, the present invention provides, as a first invention, an oblique method using a continuous vacuum vapor deposition apparatus on a polymer film substrate running along the peripheral surface of a cylindrical can. In a manufacturing apparatus of a magnetic recording medium provided with a magnetic layer by a vapor deposition method, a first shielding plate that defines an initial incident angle of evaporated atoms with respect to the polymer film substrate, and is located on a traveling upstream side of the polymer film substrate, An apparatus for manufacturing a magnetic recording medium, comprising: a second shielding plate disposed close to an initial incidence portion on a peripheral surface of the cylindrical can without changing an initial angle of incidence defined by the first shielding plate.

According to a second aspect of the present invention, there is provided an apparatus for manufacturing a magnetic recording medium having a plurality of second shielding plates. In addition, the third
As a third aspect of the present invention, a third element is located between the first shielding plate and the evaporation source, and suppresses the attachment of evaporated atoms to the first shielding plate without changing the initial angle of incidence defined by the first shielding plate.
A magnetic recording medium manufacturing apparatus provided with a shielding plate.

[0008]

According to the first aspect of the present invention, the evaporated atoms are scattered by the second shield plate provided close to the initial incidence portion without changing the initial incident angle of the evaporated atoms defined in the first shield plate. Atoms can be suppressed from adhering to the polymer film substrate. Further, in the second invention, by providing the plurality of second shielding plates, the adhesion of the scattered evaporated atoms to the polymer film substrate can be sufficiently suppressed.

Further, in the third invention, the third shielding plate is provided with the first shielding plate.
Since it is provided between the shielding plate and the evaporation source, it is possible to prevent the evaporation atoms from attaching to the first shielding plate and to suppress the scattering evaporation atoms from attaching to the polymer film substrate.

[0010]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. FIG. 1 shows a main part of an apparatus for manufacturing a magnetic recording medium according to the first invention, in which a magnetic layer is formed on a polymer film substrate by oblique evaporation. In FIG. 1, 1 is a polymer film substrate, 2 is a cylindrical can, and 3 is an evaporation source which emits evaporated atoms. Reference numeral 4 denotes a first shielding plate that regulates the initial incident angle of the evaporated atoms emitted from the evaporation source 3 and controls the attachment of the evaporated atoms onto the polymer film substrate 1.

Reference numeral 5 denotes a second shielding plate, which is located on the upstream side of the polymer film substrate 1 with respect to the first shielding plate 4 and has a cylindrical shape without changing the initial incident angle defined by the first shielding plate 4. It was provided at a position close to the initial incidence portion on the peripheral surface of the can 2. Reference numeral 6 denotes a shielding plate that defines the final incident angle of the evaporated atoms emitted from the evaporation source 3. Reference numeral 7 denotes a nozzle for introducing gas.
Reference numeral 8 denotes a free roller, which has a role of guiding the polymer film substrate 1 to the cylindrical can 2.

Using this first shielding plate 4, the problems of the prior art were examined. That is, the relationship between the distance between the shielding plate and the cylindrical can and the magnetic properties of the film was examined. The role of the first shielding plate 4 and the second shielding plate 5 will be described with reference to an enlarged view of the initial incidence part shown in FIG. The distance between the first shielding plate 4 and the cylindrical can 2 was defined as d as shown in FIG. The distance d was changed by moving the first shielding plate 4 in parallel so that the initial incident angle φi was constant. Coercivity and squareness ratio distance d
FIG. 3 shows an example of the dependency on.

In FIG. 3, ○ represents coercive force, and □ represents squareness ratio. Initial incidence angle φi is 70 °, final incidence angle φ
This is an example of a Co—O film manufactured by setting f to 50 °. As can be seen from FIG. 3, the coercive force and the squareness ratio decrease as the distance d increases. This may be due to scattering of evaporated atoms. That is, the scattered atoms out of the evaporated atoms regulated by the first shielding plate 4 enter the higher incident angle side than the position of the cylindrical can 2 where the initial incident angle φi is defined, and the polymer film It is considered that it adheres to the substrate 1. This is because atoms adhering to the polymer film substrate 1 due to scattering hinder the growth of crystals to be controlled by the incident angle, and are considered to lead to an increase in magnetic anisotropic dispersion.

Next, the role of the second shielding plate 5 will be described. The second shielding plate 5 suppresses the adhesion of the scattered atoms to the polymer film substrate 1 described above. FIG. 4 is an enlarged view of the initial incidence part. In FIG. 4, the second shield plate 5 is disposed on the upstream side of the substrate traveling from the position where the initial incident angle φi is defined, and is close to the cylindrical can 2.
When the dependence of the coercive force and the squareness ratio on the distance d was examined in the same manner as in FIG. 3 with the second shielding plate 5 fixed at such a position, the coercive force and the squareness ratio were almost constant. And
That value was almost equal to the value obtained at the minimum distance identified in FIG. This result supports the effect of the scattered atoms on the magnetic properties. However, when the distance d increases, the number of atoms adhering to the second shielding plate 5 increases rapidly, resulting in damage to the polymer film substrate 1. Therefore, as a second invention, a shielding plate is further provided between the first shielding plate 4 and the second shielding plate 5 in FIG.
The additional shield plate is also classified as a second shield plate in the sense that it shields the scattered vapor flow.

Next, the third invention will be described. In FIG. 1, reference numeral 9 denotes a third shielding plate, which is located between the first shielding plate 4 and the evaporation source 3 and does not change the initial incident angle defined by the first shielding plate 4. It has the role of suppressing the attachment of evaporated atoms to the surface. The third shielding plate 9 is configured such that the evaporated atoms are
It is intended to suppress the adhesion to the surface. The third shielding plate 9
Since it is closest to the evaporation source, the effect of radiant heat is large and the amount of deposition is large. Therefore, it is necessary to provide a strong member and take measures such as water cooling. Further, it is desirable to add a retreat mechanism so that the initial incident angle does not change due to an increase in the deposition amount during the vapor deposition.

Further, by using the three types of shielding plates described in the first, second and third inventions in combination, it becomes possible to mass-produce a magnetic recording medium having excellent magnetic properties. Using the apparatus for manufacturing a magnetic recording medium according to one embodiment of the present invention shown in FIG. 1, the Co-O film was formed as a magnetic layer with an incident angle range of 70 ° to 50 °. The diameter of the cylindrical can 2 is 1 m.
Melted by kW electron beam. Gas introduction nozzle 7
From which 1.2 liters of oxygen per minute were introduced. The running speed of the polymer film substrate 1 is 60 m / min. The first shielding plate 4 was provided at a position where the distance d in FIG. 2 was 10 mm, and two second shielding plates 5 were used. One is at the position of the second shielding plate 5 in FIG. 5 and the gap with the cylindrical can 2 is 1.5 m.
m. The other second shield plate had a distance d in FIG. 2 of 4 mm. The third shielding plate 9 was arranged about 2 cm below the first shielding plate 4. In this state, vapor deposition was performed for about 3 hours. As a result, a film having substantially uniform magnetic properties over a long length was obtained without damage.

Although the Co-O film has been described above, the present invention is effective when oblique deposition is performed on other magnetic layers. The present invention works more effectively as the initial angle of incidence is larger.

[0018]

According to the present invention, as described above, in the oblique evaporation method, the initial incident angle is securely maintained, the scattering of the evaporated atoms is prevented, and the excellent magnetic characteristics suitable for high-density recording / reproducing. Thus, it was possible to easily mass-produce a long magnetic recording tape medium.

[Brief description of the drawings]

FIG. 1 is an explanatory view of a main part of an apparatus for manufacturing a magnetic recording medium shown as an embodiment of the present invention.

FIG. 2 is an enlarged explanatory view of an initial incident portion according to the present invention.

FIG. 3 is a diagram showing a relationship between a distance d and a coercive force and a squareness ratio.

FIG. 4 is an enlarged view of an initial incident portion of the magnetic recording medium manufacturing apparatus of the present invention.

FIG. 5 is an explanatory view of a main part showing an example of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 polymer film substrate 2 cylindrical can 3 evaporation source 4 first shielding plate 5 second shielding plate 6 shielding plate 9 third shielding plate

Continuation of the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G11B 5/85 C23C 14/24

Claims (3)

(57) [Claims] An apparatus for manufacturing a magnetic recording medium, wherein a magnetic layer is provided on a polymer film substrate running along the peripheral surface of a cylindrical can by oblique evaporation using a continuous vacuum evaporation apparatus. A first shielding plate for defining an initial incident angle of vaporized atoms with respect to a film substrate; and a cylindrical plate positioned upstream of the polymer film substrate in a running direction, without changing an initial incident angle defined by the first shielding plate. An apparatus for manufacturing a magnetic recording medium, comprising: a second shielding plate disposed near an initial incidence portion on a peripheral surface of a can. 2. The apparatus for manufacturing a magnetic recording medium according to claim 1, wherein a plurality of second shielding plates are provided. 3. The method according to claim 1, wherein the first shielding plate and the evaporation source are located between the first shielding plate and the first shielding plate. An apparatus for manufacturing a magnetic recording medium, comprising a third shielding plate.