JPH0410199B2 - - Google Patents

Info

Publication number
JPH0410199B2
JPH0410199B2 JP61012566A JP1256686A JPH0410199B2 JP H0410199 B2 JPH0410199 B2 JP H0410199B2 JP 61012566 A JP61012566 A JP 61012566A JP 1256686 A JP1256686 A JP 1256686A JP H0410199 B2 JPH0410199 B2 JP H0410199B2
Authority
JP
Japan
Prior art keywords
support piece
heat
wire
heating element
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61012566A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62170186A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1256686A priority Critical patent/JPS62170186A/ja
Publication of JPS62170186A publication Critical patent/JPS62170186A/ja
Publication of JPH0410199B2 publication Critical patent/JPH0410199B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Furnace Details (AREA)
JP1256686A 1986-01-23 1986-01-23 熱処理装置 Granted JPS62170186A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1256686A JPS62170186A (ja) 1986-01-23 1986-01-23 熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1256686A JPS62170186A (ja) 1986-01-23 1986-01-23 熱処理装置

Publications (2)

Publication Number Publication Date
JPS62170186A JPS62170186A (ja) 1987-07-27
JPH0410199B2 true JPH0410199B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-24

Family

ID=11808902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1256686A Granted JPS62170186A (ja) 1986-01-23 1986-01-23 熱処理装置

Country Status (1)

Country Link
JP (1) JPS62170186A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079036Y2 (ja) * 1990-11-13 1995-03-06 東京エレクトロン東北株式会社 縦型熱処理炉
JPH10233277A (ja) * 1997-02-18 1998-09-02 Tokyo Electron Ltd 熱処理装置
US6807220B1 (en) * 2003-05-23 2004-10-19 Mrl Industries Retention mechanism for heating coil of high temperature diffusion furnace

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367941U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-11-10 1978-06-07
JPS561116U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-06-19 1981-01-08
JPS5623675U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-07-30 1981-03-03

Also Published As

Publication number Publication date
JPS62170186A (ja) 1987-07-27

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